JPS5829211A - 薄膜圧電振動子 - Google Patents
薄膜圧電振動子Info
- Publication number
- JPS5829211A JPS5829211A JP12705781A JP12705781A JPS5829211A JP S5829211 A JPS5829211 A JP S5829211A JP 12705781 A JP12705781 A JP 12705781A JP 12705781 A JP12705781 A JP 12705781A JP S5829211 A JPS5829211 A JP S5829211A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- piezoelectric
- thickness
- thin
- order
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 163
- 239000000463 material Substances 0.000 claims description 17
- 230000008878 coupling Effects 0.000 abstract description 38
- 238000010168 coupling process Methods 0.000 abstract description 38
- 238000005859 coupling reaction Methods 0.000 abstract description 38
- 239000000758 substrate Substances 0.000 abstract description 26
- 238000005530 etching Methods 0.000 abstract description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 8
- 230000007423 decrease Effects 0.000 abstract description 7
- 229910052681 coesite Inorganic materials 0.000 abstract description 4
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 4
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 4
- 229910052682 stishovite Inorganic materials 0.000 abstract description 4
- 229910052905 tridymite Inorganic materials 0.000 abstract description 4
- 239000000377 silicon dioxide Substances 0.000 abstract description 3
- 230000010355 oscillation Effects 0.000 abstract 2
- 229910052710 silicon Inorganic materials 0.000 description 20
- 239000010703 silicon Substances 0.000 description 20
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 19
- 230000004044 response Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 239000010408 film Substances 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 238000009826 distribution Methods 0.000 description 4
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 3
- 229910004613 CdTe Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- -1 electrode Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/174—Membranes
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12705781A JPS5829211A (ja) | 1981-08-13 | 1981-08-13 | 薄膜圧電振動子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12705781A JPS5829211A (ja) | 1981-08-13 | 1981-08-13 | 薄膜圧電振動子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5829211A true JPS5829211A (ja) | 1983-02-21 |
| JPH0356013B2 JPH0356013B2 (enrdf_load_stackoverflow) | 1991-08-27 |
Family
ID=14950523
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12705781A Granted JPS5829211A (ja) | 1981-08-13 | 1981-08-13 | 薄膜圧電振動子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5829211A (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6068711A (ja) * | 1983-09-26 | 1985-04-19 | Toshiba Corp | 圧電薄膜共振子 |
| US4642508A (en) * | 1984-03-09 | 1987-02-10 | Kabushiki Kaisha Toshiba | Piezoelectric resonating device |
| WO2004038914A1 (ja) * | 2002-10-28 | 2004-05-06 | Matsushita Electric Industrial Co., Ltd. | 圧電振動子、それを用いたフィルタ及び圧電振動子の調整方法 |
| JP2008182512A (ja) * | 2007-01-25 | 2008-08-07 | Seiko Epson Corp | バルク音響振動子の製造方法及びバルク音響振動子 |
| JP2011015423A (ja) * | 2001-01-24 | 2011-01-20 | Koninkl Philips Electronics Nv | 超音波変換器のアレイ |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4848573U (enrdf_load_stackoverflow) * | 1971-10-08 | 1973-06-26 | ||
| JPS4928795A (enrdf_load_stackoverflow) * | 1972-07-14 | 1974-03-14 | ||
| JPS5399976U (enrdf_load_stackoverflow) * | 1977-01-17 | 1978-08-12 |
-
1981
- 1981-08-13 JP JP12705781A patent/JPS5829211A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4848573U (enrdf_load_stackoverflow) * | 1971-10-08 | 1973-06-26 | ||
| JPS4928795A (enrdf_load_stackoverflow) * | 1972-07-14 | 1974-03-14 | ||
| JPS5399976U (enrdf_load_stackoverflow) * | 1977-01-17 | 1978-08-12 |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6068711A (ja) * | 1983-09-26 | 1985-04-19 | Toshiba Corp | 圧電薄膜共振子 |
| US4642508A (en) * | 1984-03-09 | 1987-02-10 | Kabushiki Kaisha Toshiba | Piezoelectric resonating device |
| JP2011015423A (ja) * | 2001-01-24 | 2011-01-20 | Koninkl Philips Electronics Nv | 超音波変換器のアレイ |
| WO2004038914A1 (ja) * | 2002-10-28 | 2004-05-06 | Matsushita Electric Industrial Co., Ltd. | 圧電振動子、それを用いたフィルタ及び圧電振動子の調整方法 |
| US7414349B2 (en) | 2002-10-28 | 2008-08-19 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric vibrator, filter using the same and its adjusting method |
| CN1685610B (zh) | 2002-10-28 | 2010-10-06 | 松下电器产业株式会社 | 压电振子、使用其的滤波器和压电振子的调整方法 |
| JP2008182512A (ja) * | 2007-01-25 | 2008-08-07 | Seiko Epson Corp | バルク音響振動子の製造方法及びバルク音響振動子 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0356013B2 (enrdf_load_stackoverflow) | 1991-08-27 |
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