JPS5828655A - 単結晶体の切断面検査装置 - Google Patents

単結晶体の切断面検査装置

Info

Publication number
JPS5828655A
JPS5828655A JP56125961A JP12596181A JPS5828655A JP S5828655 A JPS5828655 A JP S5828655A JP 56125961 A JP56125961 A JP 56125961A JP 12596181 A JP12596181 A JP 12596181A JP S5828655 A JPS5828655 A JP S5828655A
Authority
JP
Japan
Prior art keywords
sample
rays
incident
section
diffracted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56125961A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6326333B2 (enrdf_load_stackoverflow
Inventor
Masao Nakayama
中山　正雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIGAKU DENKI KK
Rigaku Denki Co Ltd
Original Assignee
RIGAKU DENKI KK
Rigaku Denki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIGAKU DENKI KK, Rigaku Denki Co Ltd filed Critical RIGAKU DENKI KK
Priority to JP56125961A priority Critical patent/JPS5828655A/ja
Publication of JPS5828655A publication Critical patent/JPS5828655A/ja
Publication of JPS6326333B2 publication Critical patent/JPS6326333B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP56125961A 1981-08-13 1981-08-13 単結晶体の切断面検査装置 Granted JPS5828655A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56125961A JPS5828655A (ja) 1981-08-13 1981-08-13 単結晶体の切断面検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56125961A JPS5828655A (ja) 1981-08-13 1981-08-13 単結晶体の切断面検査装置

Publications (2)

Publication Number Publication Date
JPS5828655A true JPS5828655A (ja) 1983-02-19
JPS6326333B2 JPS6326333B2 (enrdf_load_stackoverflow) 1988-05-30

Family

ID=14923256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56125961A Granted JPS5828655A (ja) 1981-08-13 1981-08-13 単結晶体の切断面検査装置

Country Status (1)

Country Link
JP (1) JPS5828655A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4812726A (en) * 1986-01-16 1989-03-14 Mitsubishi Denki Kabushiki Kaisha Servo circuit positioning actuator
US5619548A (en) * 1995-08-11 1997-04-08 Oryx Instruments And Materials Corp. X-ray thickness gauge

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4812726A (en) * 1986-01-16 1989-03-14 Mitsubishi Denki Kabushiki Kaisha Servo circuit positioning actuator
US5619548A (en) * 1995-08-11 1997-04-08 Oryx Instruments And Materials Corp. X-ray thickness gauge
EP0858664A4 (en) * 1995-08-11 2002-04-10 Therma Wave Inc X-RAY Thickness Gauge

Also Published As

Publication number Publication date
JPS6326333B2 (enrdf_load_stackoverflow) 1988-05-30

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