JPS58221135A - シリコンダイアフラム形圧力センサ - Google Patents

シリコンダイアフラム形圧力センサ

Info

Publication number
JPS58221135A
JPS58221135A JP10387582A JP10387582A JPS58221135A JP S58221135 A JPS58221135 A JP S58221135A JP 10387582 A JP10387582 A JP 10387582A JP 10387582 A JP10387582 A JP 10387582A JP S58221135 A JPS58221135 A JP S58221135A
Authority
JP
Japan
Prior art keywords
resistors
diaphragm
pressure sensor
thin
strain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10387582A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0138255B2 (enrdf_load_stackoverflow
Inventor
Satoshi Shimada
智 嶋田
Shigeyuki Kobori
小堀　重幸
Hiroji Kawakami
寛児 川上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10387582A priority Critical patent/JPS58221135A/ja
Publication of JPS58221135A publication Critical patent/JPS58221135A/ja
Publication of JPH0138255B2 publication Critical patent/JPH0138255B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP10387582A 1982-06-18 1982-06-18 シリコンダイアフラム形圧力センサ Granted JPS58221135A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10387582A JPS58221135A (ja) 1982-06-18 1982-06-18 シリコンダイアフラム形圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10387582A JPS58221135A (ja) 1982-06-18 1982-06-18 シリコンダイアフラム形圧力センサ

Publications (2)

Publication Number Publication Date
JPS58221135A true JPS58221135A (ja) 1983-12-22
JPH0138255B2 JPH0138255B2 (enrdf_load_stackoverflow) 1989-08-11

Family

ID=14365604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10387582A Granted JPS58221135A (ja) 1982-06-18 1982-06-18 シリコンダイアフラム形圧力センサ

Country Status (1)

Country Link
JP (1) JPS58221135A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6189137U (enrdf_load_stackoverflow) * 1984-11-16 1986-06-10
JP2010002405A (ja) * 2008-05-23 2010-01-07 Alps Electric Co Ltd 半導体圧力センサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6189137U (enrdf_load_stackoverflow) * 1984-11-16 1986-06-10
JP2010002405A (ja) * 2008-05-23 2010-01-07 Alps Electric Co Ltd 半導体圧力センサ

Also Published As

Publication number Publication date
JPH0138255B2 (enrdf_load_stackoverflow) 1989-08-11

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