JPS58213519A - 弾性表面波装置 - Google Patents
弾性表面波装置Info
- Publication number
- JPS58213519A JPS58213519A JP57096176A JP9617682A JPS58213519A JP S58213519 A JPS58213519 A JP S58213519A JP 57096176 A JP57096176 A JP 57096176A JP 9617682 A JP9617682 A JP 9617682A JP S58213519 A JPS58213519 A JP S58213519A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- surface acoustic
- acoustic wave
- wave device
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims abstract description 15
- 238000010897 surface acoustic wave method Methods 0.000 claims description 29
- 239000000758 substrate Substances 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 5
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 2
- 229910052594 sapphire Inorganic materials 0.000 claims description 2
- 239000010980 sapphire Substances 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000011787 zinc oxide Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 230000005684 electric field Effects 0.000 abstract description 2
- 230000002265 prevention Effects 0.000 abstract description 2
- 230000000694 effects Effects 0.000 description 5
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910003327 LiNbO3 Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- HPGPEWYJWRWDTP-UHFFFAOYSA-N lithium peroxide Chemical compound [Li+].[Li+].[O-][O-] HPGPEWYJWRWDTP-UHFFFAOYSA-N 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/0222—Details of interface-acoustic, boundary, pseudo-acoustic or Stonely wave devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14502—Surface acoustic wave [SAW] transducers for a particular purpose
- H03H9/14508—Polyphase SAW transducers
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57096176A JPS58213519A (ja) | 1982-06-07 | 1982-06-07 | 弾性表面波装置 |
| US06/499,930 US4456847A (en) | 1982-06-07 | 1983-06-01 | Surface acoustic wave device |
| GB08315313A GB2122832B (en) | 1982-06-07 | 1983-06-03 | Surface acoustic wave device |
| DE3320567A DE3320567C2 (de) | 1982-06-07 | 1983-06-07 | SAW-Bauelement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57096176A JPS58213519A (ja) | 1982-06-07 | 1982-06-07 | 弾性表面波装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58213519A true JPS58213519A (ja) | 1983-12-12 |
| JPH0353802B2 JPH0353802B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-08-16 |
Family
ID=14158012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57096176A Granted JPS58213519A (ja) | 1982-06-07 | 1982-06-07 | 弾性表面波装置 |
Country Status (4)
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2847438B2 (ja) * | 1991-03-29 | 1999-01-20 | 三井金属鉱業株式会社 | 弾性表面波素子 |
| JPH04343514A (ja) * | 1991-05-20 | 1992-11-30 | Clarion Co Ltd | 弾性表面波素子 |
| US5220234A (en) * | 1992-03-02 | 1993-06-15 | Hewlett-Packard Company | Shear transverse wave device having selective trapping of wave energy |
| US5498920A (en) * | 1993-05-18 | 1996-03-12 | Sanyo Electric Co., Ltd. | Acoustic wave device and process for producing same |
| JP3237387B2 (ja) * | 1994-04-12 | 2001-12-10 | 株式会社村田製作所 | 弾性表面波共振子フィルタ |
| US6242844B1 (en) * | 1999-12-28 | 2001-06-05 | Cts Corporation | Wide-band single-phase unidirectional transducer |
| DE10010089A1 (de) * | 2000-03-02 | 2001-09-06 | Epcos Ag | Oberflächenwellenwandler mit optimierter Reflexion |
| GB2363011B (en) * | 2000-05-31 | 2002-04-17 | Acoustical Tech Sg Pte Ltd | Surface acoustic wave device |
| GB2363012B (en) * | 2000-05-31 | 2002-08-07 | Acoustical Tech Sg Pte Ltd | Surface acoustic wave device |
| JP4407872B2 (ja) * | 2001-07-16 | 2010-02-03 | 富士通株式会社 | タッチパネル装置 |
| US6640636B1 (en) * | 2002-05-20 | 2003-11-04 | Kohji Toda | Ultrasound radiating and receiving device |
| JP2005117313A (ja) * | 2003-10-07 | 2005-04-28 | Fujitsu Ltd | 圧電素子およびタッチパネル装置 |
| US20180329493A1 (en) * | 2017-05-11 | 2018-11-15 | Immersion Corporation | Microdot Actuators |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3401360A (en) * | 1963-07-19 | 1968-09-10 | Bell Telephone Labor Inc | Phased transducer arrays for elastic wave transmission |
| US3582837A (en) * | 1967-11-08 | 1971-06-01 | Zenith Radio Corp | Signal filter utilizing frequency-dependent variation of input impedance of one-port transducer |
| FR2085588B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1970-02-06 | 1976-09-03 | United Kingdom Government | |
| US3723919A (en) * | 1972-03-20 | 1973-03-27 | Zenith Radio Corp | Acoustic surface wave filters with reflection suppression |
| US3987376A (en) * | 1974-03-22 | 1976-10-19 | Hazeltine Corporation | Acoustic surface wave device with harmonic coupled transducers |
| US4037176A (en) * | 1975-03-18 | 1977-07-19 | Matsushita Electric Industrial Co., Ltd. | Multi-layered substrate for a surface-acoustic-wave device |
| US3938062A (en) * | 1975-04-10 | 1976-02-10 | The United States Of America As Represented By The Secretary Of The Army | End fire surface wave piezoelectric transducer |
| US3955160A (en) * | 1975-04-30 | 1976-05-04 | Rca Corporation | Surface acoustic wave device |
| FR2345007A1 (fr) * | 1976-03-16 | 1977-10-14 | Thomson Csf | Dispositif acousto-electrique de traitement de signal par correlation ou convolution |
| US4162465A (en) * | 1977-09-14 | 1979-07-24 | University Of Illinois Foundation | Surface acoustic wave device with reflection suppression |
| FR2407610A1 (fr) * | 1977-10-25 | 1979-05-25 | Thomson Csf | Dispositif d'interaction a ondes magnetoelastiques de surface |
| DE2938542C2 (de) * | 1979-09-24 | 1984-10-25 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Signalzuführungsanordnung für ein Oberflächenwellen-Bauteil |
| JPS5687913A (en) * | 1979-12-19 | 1981-07-17 | Matsushita Electric Ind Co Ltd | Surface elastic wave element |
-
1982
- 1982-06-07 JP JP57096176A patent/JPS58213519A/ja active Granted
-
1983
- 1983-06-01 US US06/499,930 patent/US4456847A/en not_active Expired - Fee Related
- 1983-06-03 GB GB08315313A patent/GB2122832B/en not_active Expired
- 1983-06-07 DE DE3320567A patent/DE3320567C2/de not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| DE3320567A1 (de) | 1983-12-08 |
| GB2122832A (en) | 1984-01-18 |
| JPH0353802B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-08-16 |
| US4456847A (en) | 1984-06-26 |
| DE3320567C2 (de) | 1994-06-23 |
| GB8315313D0 (en) | 1983-07-06 |
| GB2122832B (en) | 1986-02-26 |