JPS5820754A - 導電性被膜の成膜法 - Google Patents
導電性被膜の成膜法Info
- Publication number
- JPS5820754A JPS5820754A JP11719281A JP11719281A JPS5820754A JP S5820754 A JPS5820754 A JP S5820754A JP 11719281 A JP11719281 A JP 11719281A JP 11719281 A JP11719281 A JP 11719281A JP S5820754 A JPS5820754 A JP S5820754A
- Authority
- JP
- Japan
- Prior art keywords
- glass substrate
- indium
- powder
- compound
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 14
- 239000011521 glass Substances 0.000 claims abstract description 17
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 239000000203 mixture Substances 0.000 claims abstract description 12
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 5
- 150000001875 compounds Chemical class 0.000 claims abstract description 5
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims abstract description 4
- 150000003606 tin compounds Chemical class 0.000 claims description 4
- 150000002472 indium compounds Chemical class 0.000 abstract description 7
- 239000000843 powder Substances 0.000 abstract description 7
- XALNPQXSWUMLQE-UHFFFAOYSA-K 2-hydroxypropanoate;indium(3+) Chemical compound [In+3].CC(O)C([O-])=O.CC(O)C([O-])=O.CC(O)C([O-])=O XALNPQXSWUMLQE-UHFFFAOYSA-K 0.000 abstract description 3
- 229910052738 indium Inorganic materials 0.000 abstract description 3
- 229910003437 indium oxide Inorganic materials 0.000 abstract description 3
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 abstract description 3
- 239000002245 particle Substances 0.000 abstract description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 abstract description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-M Lactate Chemical compound CC(O)C([O-])=O JVTAAEKCZFNVCJ-UHFFFAOYSA-M 0.000 abstract description 2
- 229910044991 metal oxide Inorganic materials 0.000 abstract description 2
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 abstract 1
- 238000005507 spraying Methods 0.000 description 5
- NGCDGPPKVSZGRR-UHFFFAOYSA-J 1,4,6,9-tetraoxa-5-stannaspiro[4.4]nonane-2,3,7,8-tetrone Chemical compound [Sn+4].[O-]C(=O)C([O-])=O.[O-]C(=O)C([O-])=O NGCDGPPKVSZGRR-UHFFFAOYSA-J 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- SKEZDZQGPKHHSH-UHFFFAOYSA-J 2-hydroxypropanoate;tin(4+) Chemical compound [Sn+4].CC(O)C([O-])=O.CC(O)C([O-])=O.CC(O)C([O-])=O.CC(O)C([O-])=O SKEZDZQGPKHHSH-UHFFFAOYSA-J 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- LKEDUJPRSZGTHZ-UHFFFAOYSA-H indium(3+);oxalate Chemical compound [In+3].[In+3].[O-]C(=O)C([O-])=O.[O-]C(=O)C([O-])=O.[O-]C(=O)C([O-])=O LKEDUJPRSZGTHZ-UHFFFAOYSA-H 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/27—Oxides by oxidation of a coating previously applied
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
- Manufacturing Of Electric Cables (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11719281A JPS5820754A (ja) | 1981-07-28 | 1981-07-28 | 導電性被膜の成膜法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11719281A JPS5820754A (ja) | 1981-07-28 | 1981-07-28 | 導電性被膜の成膜法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5820754A true JPS5820754A (ja) | 1983-02-07 |
| JPH0121107B2 JPH0121107B2 (enrdf_load_stackoverflow) | 1989-04-19 |
Family
ID=14705676
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11719281A Granted JPS5820754A (ja) | 1981-07-28 | 1981-07-28 | 導電性被膜の成膜法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5820754A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61194181A (ja) * | 1985-01-22 | 1986-08-28 | Nippon Sheet Glass Co Ltd | 基体上に薄層を形成する方法 |
| JPS627844A (ja) * | 1985-07-03 | 1987-01-14 | Nippon Sheet Glass Co Ltd | 特性改良のための金属酸化物または金属薄層の処理 |
| KR100436379B1 (ko) * | 2000-04-18 | 2004-06-16 | 인터내셔널 비지네스 머신즈 코포레이션 | 마이크로콘택트 프린팅을 통해 패턴화된 인듐-아연 산화물및 인듐-주석 산화물 필름을 제조하는 방법 및 그의 용도 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5227165A (en) * | 1975-08-21 | 1977-03-01 | Paper Converting Machine Co | Business form substack processor for making balanced stack |
| JPS5319013A (en) * | 1976-08-05 | 1978-02-21 | Fujitsu Ltd | Writing circuit for magnetic memory apparatus |
| JPS5663844A (en) * | 1979-10-31 | 1981-05-30 | Nippon Sheet Glass Co Ltd | Forming method of metal oxide coat |
-
1981
- 1981-07-28 JP JP11719281A patent/JPS5820754A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5227165A (en) * | 1975-08-21 | 1977-03-01 | Paper Converting Machine Co | Business form substack processor for making balanced stack |
| JPS5319013A (en) * | 1976-08-05 | 1978-02-21 | Fujitsu Ltd | Writing circuit for magnetic memory apparatus |
| JPS5663844A (en) * | 1979-10-31 | 1981-05-30 | Nippon Sheet Glass Co Ltd | Forming method of metal oxide coat |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61194181A (ja) * | 1985-01-22 | 1986-08-28 | Nippon Sheet Glass Co Ltd | 基体上に薄層を形成する方法 |
| JPS627844A (ja) * | 1985-07-03 | 1987-01-14 | Nippon Sheet Glass Co Ltd | 特性改良のための金属酸化物または金属薄層の処理 |
| KR100436379B1 (ko) * | 2000-04-18 | 2004-06-16 | 인터내셔널 비지네스 머신즈 코포레이션 | 마이크로콘택트 프린팅을 통해 패턴화된 인듐-아연 산화물및 인듐-주석 산화물 필름을 제조하는 방법 및 그의 용도 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0121107B2 (enrdf_load_stackoverflow) | 1989-04-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Siefert | Properties of thin In2O3 and SnO2 films prepared by corona spray pyrolysis, and a discussion of the spray pyrolysis process | |
| TW201131790A (en) | Conductive metal oxide films and photovoltaic devices | |
| TWI225468B (en) | Coating solution for forming transparent conductive tin oxide film, method for producing transparent conductive tin oxide film, and transparent conductive tin oxide film | |
| JP2009131844A (ja) | 透明伝導性ナノ粒子コーティングフィルムの製造方法 | |
| JPH10261326A (ja) | 透明導電性組成物、これから形成された透明導電膜及びその製造方法 | |
| JPS60140880A (ja) | 太陽電池の製造方法 | |
| JPH0350148A (ja) | 酸化亜鉛焼結体及びその製造法並びに用途 | |
| JP3507623B2 (ja) | 透明導電膜の製造方法及びそれを用いた薄膜太陽電池 | |
| JPS5820754A (ja) | 導電性被膜の成膜法 | |
| JPH01132004A (ja) | 透光性導基板およびその製造方法 | |
| JPS62157618A (ja) | 透明導電膜の作成方法 | |
| JPS62278705A (ja) | 透明導電材料 | |
| JPH05314820A (ja) | 透明導電膜形成用組成物と透明導電膜形成方法 | |
| JPS60220507A (ja) | 透明導電膜およびその形成方法 | |
| KR100378019B1 (ko) | 투명 도전막의 보호막 형성용 조성물 및 이로부터 투명도전막을 제조하는 방법 | |
| JPH0221083B2 (enrdf_load_stackoverflow) | ||
| JP2742068B2 (ja) | 透明導電性微粒子の製造法及びそれによる透明導電性薄膜の作成方法 | |
| JP3545452B2 (ja) | 透明導電膜の製造方法 | |
| JP3194764B2 (ja) | 導電膜の製造方法 | |
| JPH0530001B2 (enrdf_load_stackoverflow) | ||
| JPS61294703A (ja) | 光透過性導電膜およびその製造方法 | |
| JPS60220505A (ja) | 透明導電膜およびその形成方法 | |
| JPH05290621A (ja) | 高 温 焼 成 用 ｉ ｔ ｏ ペ ー ス ト | |
| CN101318776A (zh) | 纳米涂膜及光伏发电 | |
| JPH0513097B2 (enrdf_load_stackoverflow) |