JPS58205830A - Thin force sensor - Google Patents

Thin force sensor

Info

Publication number
JPS58205830A
JPS58205830A JP57087907A JP8790782A JPS58205830A JP S58205830 A JPS58205830 A JP S58205830A JP 57087907 A JP57087907 A JP 57087907A JP 8790782 A JP8790782 A JP 8790782A JP S58205830 A JPS58205830 A JP S58205830A
Authority
JP
Japan
Prior art keywords
force sensor
force
wrist
present
base plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57087907A
Other languages
Japanese (ja)
Inventor
Michiro Takahashi
道郎 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57087907A priority Critical patent/JPS58205830A/en
Publication of JPS58205830A publication Critical patent/JPS58205830A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/22Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/161Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
    • G01L5/1627Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of strain gauges

Abstract

PURPOSE:To obtain an appropriate sensitivity to force and moment in any direction pertaining to a force sensor for detecting external force mounted on the wrist of a robbot by arranging a plurality of arms extending radially from the center in a construction of bending beam. CONSTITUTION:The body of a force sensor has a base plate 10 cut out of a disc in a shape of a human hand. A strain gage 17 is applied somewhere on the six cantilever beams 11-16 as a part of the base plate 10 to detect a distortion caused in any of the centilever beams. With such an arrangement, the force sensor made thinner enables effective utilization of working space when mounted on the wrist of a robot and can provide an even sensitivity to a 6-axis stress.

Description

【発明の詳細な説明】 本発明はフォースセンサに関する。詳しくはロボットの
手首に取付けて、ツールやバンドに加わる外力や反力を
検出する目的で用いるフォースセンサに関するO 従来のフォースセンサについて、ドレイバー研究所のフ
ォースセンサの構造を第1図及び第2図により説明する
0当該フオースセンサは図示の如く、2個の円環(1)
、(2)をつなぐ3本の柱(3) 、 (4) 、 (
5)に歪ゲージ(6)を貼付け、3本の柱の歪(伸び、
ちぢみ、ねじれ1曲げ)を検出し、ネれにより2個の円
環相互の間に働く力(圧縮引張り9曲げ、ねじれ等6種
)を算出する構造のものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a force sensor. For more information, see the force sensor attached to the robot's wrist and used to detect external force or reaction force applied to a tool or band. Regarding the conventional force sensor, Figures 1 and 2 show the structure of the Draver Institute's force sensor. The force sensor has two rings (1) as shown in the figure.
, (2) are connected by three pillars (3), (4), (
Attach the strain gauge (6) to 5) and measure the strain (elongation,
It has a structure that detects shrinkage, torsion (1 bending) and calculates the force acting between two circular rings due to twisting (6 types of compression, tension, 9 bending, and torsion, etc.).

しかし乍ら、この構造のフォースセンサは、3本の柱の
高さに相当する分厚く必要があり、全体に厚いものとせ
ざるを得ないこと、又前記6種の力(これを以下Fx 
+ Fy + Fz + Txa  Ty l Tzで
表わす)に対する感度がバラバラであり、実際は6種の
力全部を精度良く測ることはできないという欠点をもっ
ていた。この欠点は3本の柱を検出用のメンバーとして
用いるために、柱の曲げ剛性が伸びちぢみ剛性に比較し
て著しく低い点によるものである。
However, the force sensor with this structure needs to be thick enough to correspond to the height of the three pillars, so it has to be thick as a whole, and the above six types of force (hereinafter referred to as Fx
+ Fy + Fz + Txa Tyl Tz)), and had the disadvantage that it was not possible to measure all six types of force with high accuracy. This drawback is due to the fact that since three columns are used as detection members, the bending rigidity of the columns is significantly lower than the stretching and shrinking rigidity.

そこで、本発明は、全体の厚さを最小限に薄くし、ロボ
ット等の手首に取付けを可能となし又測定対象としてい
るすべての方向の力及びモーメントに対して適度な感度
を有し、しかも構造が簡単なフォースセンサを提供する
ことを目的としたものである。
Therefore, the present invention minimizes the overall thickness, makes it possible to be attached to the wrist of a robot, etc., has appropriate sensitivity to forces and moments in all directions as the object of measurement, and The purpose is to provide a force sensor with a simple structure.

即ち、本発明は、中心から放射状に伸びた複数の力検出
用の腕を持ち、当該腕は曲りばり構造をなすとともに、
当該腕の中途に腕のたわみを検出する歪ゲージを有して
成ることを特徴とするフォースセンサに存する。
That is, the present invention has a plurality of force detection arms extending radially from the center, the arms having a curved structure, and
The force sensor is characterized by having a strain gauge in the middle of the arm to detect the deflection of the arm.

次に本発明の構成について更に補足説明する。Next, the configuration of the present invention will be further explained in a supplementary manner.

本発明は、従来技術の欠点である感度のアンバランスを
解決する方法として、従来用いられてきた柱の伸び、ち
ぢみ1曲げを検出に利用することをやめ、1曲りばり」
の曲げだけですべての方向の力を検出するものである。
As a method to solve the imbalance in sensitivity, which is a drawback of the conventional technology, the present invention eliminates the conventional use of elongation, shrinkage, and bending of columns for detection, and instead detects only one bend.
It detects forces in all directions just by bending.

蕊に本発明でいう「曲りばり」とは前記腕が途中で折れ
曲るか或いは円弧をなしている如き態様をいう〇又薄形
のフォースセンサとするために一枚板構造となすのがよ
く、一枚板構造においても、X + 3’ + Z軸方
向の力とそれらの軸まわりのモーメントを検出できる様
にするため放射状に足を持たせ、更に上記構造において
適切な検出感度を持たせるために折り曲げた構造もしく
は曲率を持たせた構造即ち曲りばり構造となしたもので
ある。
In addition, the term "curved" as used in the present invention refers to a mode in which the arm is bent in the middle or forms an arc.Also, in order to make a thin force sensor, it is made of a single plate structure. Even in a single-plate structure, it is common to have legs radially in order to be able to detect forces in the X + 3' + Z axis directions and moments around those axes, and to have appropriate detection sensitivity in the above structure. It has a bent structure or a curvature structure, that is, a curved structure.

次に、本発明を図示の実施例に基づいて説明する。Next, the present invention will be explained based on illustrated embodiments.

第6図は本発明フォースセンサの全体の外観を示す平面
図である0尚該フオ一スセンサ本体は円板を人手状に切
り抜いて作られるペースプレート(10)に、ペースプ
レート(10)の一部である6本の片持ばり(11)〜
(16)の中途に片持ばりに生ずるひずめを検出するだ
めの歪ゲージ(17)を貼り付けたものである。次いで
、本発明のフォースセンサの使用態様を第4図によシ説
明する。第4図(イ)に示す如く、片持ばり(12)。
FIG. 6 is a plan view showing the overall appearance of the force sensor of the present invention. Six cantilever beams (11) ~
A strain gauge (17) is attached to the middle of (16) to detect strain occurring in the cantilever beam. Next, the manner of use of the force sensor of the present invention will be explained with reference to FIG. As shown in Figure 4 (a), the cantilever beam (12).

(14)、(16)の先端をロボットの手首(18)に
固定し、片持ばり(11)、 (13)、 (15)の
先端をリール(19)に固定する。その座標系を、第4
図(ロ)に図示の通りに定める0 又第5図(イ)に片持ばり(11)の1本を拡大して示
す。当該片持ばりに於ける歪ゲージは、同図(ロ)のA
矢視図及び(ハ)のB矢視図に示す如(、(111)を
上面に、(112)を下面に、(113) 、 (11
4)を側面に貼付けである。
The tips of (14) and (16) are fixed to the robot's wrist (18), and the tips of cantilever beams (11), (13), and (15) are fixed to the reel (19). The coordinate system is the fourth
0 defined as shown in Figure (b). Figure 5 (a) also shows an enlarged view of one of the cantilever beams (11). The strain gauge on the cantilever beam is A in the same figure (b).
As shown in the arrow view and the B arrow view in (c), (111) is on the top surface, (112) is on the bottom surface, (113), (11
4) is pasted on the side.

次に本発明のフォースセンサの原理について・ 6 ・ 説明する。前記第4図において、ツール(19)がロボ
ット手首(18)に対しZ方向に力を及ぼすと片持ばり
(11)、 (13)、 (15)は第5図においてZ
のプラス方向に曲げられ、片持ばり(10)、 (12
)。
Next, the principle of the force sensor of the present invention will be explained. In FIG. 4, when the tool (19) exerts a force on the robot wrist (18) in the Z direction, the cantilever beams (11), (13), and (15) move in the Z direction in FIG.
bent in the positive direction of cantilever beams (10), (12
).

(14)はZのマイナス方向へ曲げられる0故に歪ゲー
ジによって検出された歪をδ(i)(但し、iは歪ゲー
ジの図中での番号、番号のつけ方は第5図の如く上位2
ケタが片持ばりの番号、下位1ケタの1は上面、2は下
面、3は2■側から見た各はりのO側、4は■側とする
)とすれば外力をF2とした場合下式によシFzを検出
することができる。同様にTx、Tyも検出できる。同
様に側面に付けた歪ゲージを利用することによりFXI
 FXI Tz (Z軸まわりのモーメント)を検出で
きる0 斯くて、本発明のフォースセンサによれば、薄形となし
たことによりロボットの手首に取付けた。4合作業空間
を有7効に使用でき、又6軸応・ 4 ・ 力(FXI Fy I Fz I TX I TyI 
TZ )に対し、平均した感度を得ることができ、しか
も構造が簡単なフォースセンサを提供することができた
(14) is bent in the negative direction of Z, so the strain detected by the strain gauge is δ(i) (where i is the number of the strain gauge in the diagram, and the numbering method is as shown in Figure 5). 2
The digit is the number of the cantilever beam, the lower one digit 1 is the top surface, 2 is the bottom surface, 3 is the O side of each beam when viewed from the 2 ■ side, and 4 is the ■ side), then when the external force is F2 Fz can be detected using the following formula. Similarly, Tx and Ty can also be detected. Similarly, by using the strain gauge attached to the side, FXI
FXI Tz (moment around the Z-axis) can be detected 0 Therefore, according to the force sensor of the present invention, the thin shape allows it to be attached to the wrist of a robot. The 4-way work space can be used effectively, and the 6-axis response/4/force (FXI Fy I Fz I TX I TyI
It was possible to provide a force sensor that can obtain average sensitivity with respect to TZ) and has a simple structure.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来例を示す断面図、第2図は従来例を示す正
面図、第3図乃至第5図は本発明の実施例を示し、第6
図は本発明フォースセンサの全体の外観を示す平面図、
第4図(イ)は本発明センサの使用態様を示す側面図、
第4図(ロ)は第4図(イ)における座標系を示す説明
図、第5図(イ)は本発明センサの要部平面図、第5図
(ロ)は第5図(イ)におけるA矢視図、第5図Hは同
B矢視図である。 10・・・フォースセンサ 11、12.1!l、 14.15.16・・・曲りば
り17・・・歪ゲージ 華、5図 1b 刑4図 デ5図 ]8
FIG. 1 is a sectional view showing a conventional example, FIG. 2 is a front view showing a conventional example, FIGS. 3 to 5 show an embodiment of the present invention, and FIG.
The figure is a plan view showing the overall appearance of the force sensor of the present invention.
FIG. 4(a) is a side view showing how the sensor of the present invention is used;
Figure 4 (B) is an explanatory diagram showing the coordinate system in Figure 4 (A), Figure 5 (A) is a plan view of the main part of the sensor of the present invention, and Figure 5 (B) is Figure 5 (A). FIG. 5H is a view taken along arrow A in FIG. 5, and FIG. 5H is a view taken along arrow B in FIG. 10...Force sensor 11, 12.1! l, 14.15.16...Curved bar 17...Strain gauge flower, 5 figure 1b punishment 4 figure de 5 figure] 8

Claims (1)

【特許請求の範囲】[Claims] 中心から放射状に伸びた複数の力検出用の腕を持ち、当
該腕は曲りばり構造をなすとともに尚該腕の中途に腕の
たわみを検出する歪ゲージを有して成ることを特徴とす
る薄型フォースセンサ。
A thin type device having a plurality of arms for detecting force extending radially from the center, each arm having a curved structure and further having a strain gauge in the middle of the arm for detecting the deflection of the arm. Force sensor.
JP57087907A 1982-05-26 1982-05-26 Thin force sensor Pending JPS58205830A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57087907A JPS58205830A (en) 1982-05-26 1982-05-26 Thin force sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57087907A JPS58205830A (en) 1982-05-26 1982-05-26 Thin force sensor

Publications (1)

Publication Number Publication Date
JPS58205830A true JPS58205830A (en) 1983-11-30

Family

ID=13927977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57087907A Pending JPS58205830A (en) 1982-05-26 1982-05-26 Thin force sensor

Country Status (1)

Country Link
JP (1) JPS58205830A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61284390A (en) * 1985-06-11 1986-12-15 工業技術院長 Tactile sensor
US4823618A (en) * 1986-09-17 1989-04-25 Jr3, Inc. Force-moment sensors
FR2731514A1 (en) * 1995-03-07 1996-09-13 Europ Propulsion Continuous monitoring of joint gap between two flange connected components
JP2004354049A (en) * 2003-03-31 2004-12-16 Wacoh Corp Force detection device
JP2011500331A (en) * 2007-10-22 2011-01-06 エーアーデーエス・ドイッチェランド・ゲゼルシャフト ミット ベシュレンクテル ハフツング Tool holder and stepwise sheet forming method using the tool holder
CN103528746A (en) * 2013-11-01 2014-01-22 哈尔滨工业大学 Cross-shaped beam type elastomer for six-dimensional force sensor
WO2022121870A1 (en) * 2020-12-10 2022-06-16 苏州艾利特机器人有限公司 High overload protection force sensor and robot

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61284390A (en) * 1985-06-11 1986-12-15 工業技術院長 Tactile sensor
JPH0411348B2 (en) * 1985-06-11 1992-02-28
US4823618A (en) * 1986-09-17 1989-04-25 Jr3, Inc. Force-moment sensors
FR2731514A1 (en) * 1995-03-07 1996-09-13 Europ Propulsion Continuous monitoring of joint gap between two flange connected components
JP2004354049A (en) * 2003-03-31 2004-12-16 Wacoh Corp Force detection device
JP2011500331A (en) * 2007-10-22 2011-01-06 エーアーデーエス・ドイッチェランド・ゲゼルシャフト ミット ベシュレンクテル ハフツング Tool holder and stepwise sheet forming method using the tool holder
CN103528746A (en) * 2013-11-01 2014-01-22 哈尔滨工业大学 Cross-shaped beam type elastomer for six-dimensional force sensor
WO2022121870A1 (en) * 2020-12-10 2022-06-16 苏州艾利特机器人有限公司 High overload protection force sensor and robot

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