JPH0772026A - Strain generating construction and multiaxis force detection sensor using the same - Google Patents

Abstract

PURPOSE:To achieve an obtaining of a high output and a detection of force components is three axes and moment about the three axes individually without interference while being low in cost and easy in machining. CONSTITUTION:A multiaxis power detection sensor 10 is made up of a load introduction part 12a, a flat strain generating member 12, four columnar strain generating members 41-44 and a base member of a pedestal member 11. The flat strain generating member 12 has W-shaped through holes 13-16 and 8-figured deformed part bores 21-28 cut near four corner parts and a strain gauge is attached onto the top surface corresponding to the bores 21-28 to detect force components in the direction of Z axis. 8-figured deformed part bores 51-54 and 45-48 are cut at parts closer to the upper ends and the lower ends of the columnar strain generating members 41-44 in the directions orthogonal to one another. Strain gauges are attached onto the sides corresponding to the bores 51-54 and 45-48 to detect force components in the directions of X and Y axes and moment components about the X, Y and Z axes.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flexure element structure and a multi-axis force detection sensor using the flexure element structure, and more specifically, to an X-axis, a Y-axis and a Z-axis which are orthogonal to each other. The present invention relates to improvements in a strain-generating body structure that detects a force applied to an object from three directions and a moment acting on each axis, and a multi-axis force detection sensor using the same.

[0002]

2. Description of the Related Art This type of multi-axis force detection sensor is widely used in, for example, model experiments of assembling robots, aircrafts, ships, etc., and various techniques have been proposed for this purpose. .

For example, Japanese Patent Application Laid-Open No. 57-118132 proposes a multi-axis force detection sensor having four columnar flexure members (beams) having a relatively simple structure. Japanese Patent Laid-Open No. 60-62497 proposes a multi-axis force detection sensor having a complicated structure but excellent detection performance or detection accuracy.

[0004]

DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention
In the multi-axis force detection sensor disclosed in Japanese Patent No. 8132, a beam arranged in four equal parts is provided between a fixed side flange and a measurement side flange, and strain gauges are attached to the respective beams to measure the direction of the X axis applied to the measurement side flange. , The Y-axis direction, the Z-axis direction force components, and the moment components around these three axes are detected, so that the structure is simple and, moreover, the machining becomes easier. There are advantages.

However, on the other hand, in this structure,
It is difficult to detect an external force related to a predetermined axial direction (around the axis) separately from an external force related to another axial direction (around the axis), and the external force related to each axial direction (around the axis) may interfere with each other. There is a drawback that the detection error becomes extremely large.

On the other hand, the multi-axis force detection sensor described in Japanese Patent Laid-Open No. 60-62497 has succeeded in providing some effect in terms of performance, but in consideration of the following manufacturing aspects. Due to its lack, this is a drawback of this multi-axis force detection sensor.

That is, in this type of multi-axis force detection sensor, the deformation action in the deformation detection unit must be detected with high sensitivity. Therefore, the deformation detection unit is formed by precision machining such as electric discharge machining or milling. It is usually done. Therefore, in order to increase the efficiency in manufacturing, it is desired that the number of points to be processed is small and the processing direction at that time is set to a direction limited as much as possible.

However, the cited multi-axis force detection sensor has eight parallel plate structures 74A _FX , 7 which are the deformation detecting portions.
4B _FX , 74D _FY , 74E _FY , 74C _FZ (4 pieces) and the same 8 radiation plate structures 75A _MX , 75B _MX , 75
D _MY , 75E _MY , 75A _MZ , 75B _MZ , 75D _MZ , 75
In order to form E _MZ , a structure that requires a total of 17 perforations including the circular hole 82 of the central responding portion C is adopted, and the machining directions for the respective perforations are different. In addition to the complicated setup work such as the above setting, the structure requires a considerable skill and a great deal of time for machining.

Therefore, with this multi-axis force detection sensor, machining becomes extremely difficult and complicated, and the manufacturing efficiency is significantly reduced. That is, the cost will rise sharply. This is JP-A-60-6249.
This is a major drawback of the multi-axis force detection sensor disclosed in Japanese Patent No.

The present invention has been made in view of the above circumstances, and an object of the present invention is to significantly improve efficiency in manufacturing and achieve low cost.
Under the condition that a large amount of output can be obtained from each strain gauge, the new force that can detect the target force components F _X , F _Y , F _{Z and the} moment component around the axis with high sensitivity and high accuracy. An object is to provide a strained body structure and a multi-axis force detection sensor using the strained body structure.

[0011]

In order to achieve the above object, the present invention relates to an X-axis and a Y-axis which are set so as to be orthogonal to each other through a center point of a multi-axis force detection sensor, and this X-axis. A Z-axis that is set so as to pass through the intersection of the axis and the Y-axis and intersect perpendicularly to the plane including the X-axis and the Y-axis, and the directions of the X-axis, the Y-axis, and the Z-axis, respectively. In a strain body structure that forms the base of a multi-axis force detection sensor that measures the force component applied to and the axial moment components related to these X-axis, Y-axis, and Z-axis. A thick plate-shaped pedestal member that is provided as a constituent member and that is provided so as to be located on the Z axis so as to be coupled to one side of the object to be measured, and another one of the flexure body structures. Is provided as a member that constitutes the part, and is connected to the other side of the measured object. Each of the two is provided so as to be parallel to the pedestal member at a predetermined interval on the Z-axis, and further at positions equidistant from the Z-axis and orthogonal to the X-axis. There are four sides of a substantially regular quadrangle, each side and two sides that are equidistant from the Z axis and that are set at positions orthogonal to the Y axis, and a load is applied on the Z axis. A flat plate-shaped strain body member formed to have an introduction portion, and a member that constitutes yet another part of the strain body structure, and the pedestal member and the flat plate strain body member. In order to connect between the X axis and the Y axis, at positions equidistant from each other and at four positions symmetrical with respect to the Z axis, along the Z axis. Installed parallel to each other, Four columnar flexure members formed so as to have a substantially regular quadrilateral cross-sectional shape having four sides positioned parallel to the four sides of the regular quadrilateral of the flat plate flexure member; It is provided in a region symmetrical with respect to the Z-axis in the region of the four sides of the flexure member, and when the load introducing portion is applied with an external force in the Z-axis direction, each bends in parallel and at least The load introducing portion has a parallel plate-like structure that acts as a rigid portion when an external force in the X-axis direction and the external force in the Y-axis direction is applied, and sandwiches the X-axis and the Y-axis. When the external force in the X-axis direction is applied to the load introducing section, the first group deformation detecting section provided in pairs on each side and the four columnar flexural body members are parallel to each other. Flexes and less In addition, the second group compound deformation provided as a deformation detecting unit having a parallel plate-like structure that acts as a rigid portion when external forces in the Y-axis direction and the Z-axis direction are applied to the load introducing unit. When an external force in the Y-axis direction is applied to the load introducing section, the detecting section and each of the four columnar flexural body members are bent in parallel, and at least the load introducing section has the X-direction. And a third group composite deformation detection unit provided as a deformation detection unit of a parallel plate structure that acts as a rigid portion when an external force is applied in the axial direction and the Z-axis direction. It is characterized by having done.

In order to achieve the above object, the present invention provides an X-axis and a Y-axis which are set to pass through the center point of the multi-axis force detection sensor and are orthogonal to each other, and the X-axis and the Y-axis. And a Z-axis that is set to intersect with a plane including the X-axis and the Y-axis perpendicularly to the plane including the X-axis and the Y-axis, and a force component applied in each of these X-axis, Y-axis, and Z-axis. And a multi-axis force detection sensor for measuring the moment components about the axes related to the X-axis, the Y-axis, and the Z-axis, the multi-axis force detection sensor being provided as a member that constitutes a part of the flexure body structure, and , Z for coupling to one side of the object to be measured
A slab-shaped pedestal member provided so as to be located on the axis,
It is provided as a member that constitutes another part of the strain body structure, and is parallel to the pedestal member at a predetermined interval in the Z axis so as to be coupled to the other side of the object to be measured. And each of the two sides set at positions equally spaced from the Z axis and orthogonal to the X axis, and at positions equally spaced from the Z axis and the Y It has four sides of a substantially regular quadrangle consisting of two sides each set at a position orthogonal to the axis, and further, said Z
A plate-shaped strain-generating body member formed so as to have a load introducing portion on an axis, and a member that constitutes yet another part of the strain-generating body structure, and the pedestal member and the plate-shaped member. In order to connect with the strain-flexing member, the Z-axis is provided at four positions that are equidistant from the X-axis and the Y-axis and are symmetrical to each other with respect to the Z-axis. Formed in parallel with each other along the axis, and each having a substantially regular quadrangular cross-sectional shape having four sides positioned parallel to the four sides of the regular quadrilateral of the plate-shaped strain body member. And the four columnar flexure members that are provided, and the four sides of the flat plate flexure member are provided in regions that are symmetrical with respect to the Z axis, and an external force in the Z axis direction is applied to the load introducing portion. When is given, each bends in parallel, A parallel plate-like structure that acts as a rigid portion when an external force is applied to at least the load introducing portion in the X-axis direction and the Y-axis direction. When the external force in the X-axis direction is applied to the load introducing section, the first group deformation detecting section is provided in pairs on each side with respect to each other, and the four columnar flexure body members are respectively applied. A parallel plate-like structure as a deformation detecting part that flexes in parallel and at least acts as a rigid part when an external force is applied to the load introducing part in the Y-axis direction and the Z-axis direction. When the external force of the Y-axis is applied to the load introducing section, the second group composite deformation detecting section and the four columnar flexural body members are flexed in parallel to each other, and at least Also, the third group composite deformation provided as a deformation detecting unit of a parallel plate structure that acts as a rigid body when an external force is applied to the load introducing unit in the X-axis direction and the Z-axis direction, respectively. It is configured to have a detection unit and a strain gauge attached to each of the first group deformation detection unit, the second group composite deformation detection unit and the third group composite deformation detection unit. It is a thing.

[0013]

The strain-generating body structure configured as described above has the X-axis and the Y-axis set so as to be orthogonal to each other through the center point of the multi-axis force detection sensor, and the X-axis and the Y-axis. And a Z-axis that is set to intersect perpendicularly to a plane including the X-axis and the Y-axis,
The force components applied in the Y-axis and Z-axis directions and these X components
In order to measure (measure) the axial moment components related to the axes Y, Z, and Z without mutual interference, the flexure body structure that forms the base of the multi-axis force detection sensor is first described below. It consists of two parts.

(A) A pedestal member in the form of a slab provided so as to be located on the Z-axis for connecting to one side of the object to be measured, and (B) for connecting to the other side of the object to be measured. A flat plate-shaped flexure member formed in parallel with the pedestal member at a predetermined distance in the Z-axis and having a load introducing portion on the Z-axis; and (C) the pedestal member and the flat-plate flexural member. In order to connect with the members, it is composed of three members, that is, four columnar flexure members provided in parallel with each other along the Z axis.

In this case, the flat plate-shaped strain generating member is arranged at two equally spaced positions from the Z axis and at two positions set at positions orthogonal to the X axis, and at equally spaced positions from the Z axis. And the four columnar flexure members are arranged from the X axis and the Y axis. The columnar flexure members are provided so that they are equidistant from each other and located at four positions symmetrical to each other with respect to the Z-axis, and each of the columnar flexure members is a regular quadrilateral of the flat plate flexure member. Is formed as a member having a substantially regular quadrilateral cross-sectional shape having four sides positioned in parallel with the four sides.

As a deformation detecting portion for detecting a force component in the three-axis directions and a moment component around the three axes, (a) symmetry with respect to the Z-axis in the above-mentioned four side regions of the flat plate flexure member. In each of the regions, a pair of the first group deformation detecting portions is formed at a position sandwiching the X axis or the Y axis on each side.

The first group deformation detecting section is formed in a parallel flat plate shape, and when the load introducing section is applied with an external force in the Z-axis direction, the first group deforming detecting section bends in parallel, and at least the load introducing section has the above-mentioned structure. When an external force is applied in the X-axis direction and the Y-axis direction, each acts as a rigid body portion.

(B) An external force in the X-axis direction is applied to the load introducing portion at a portion near one end in the longitudinal direction of the four columnar flexure members, that is, in a region close to the pedestal member or a flat plate flexure member. The second group of parallel flat plate-like structures each of which is bent in parallel when a load is applied and each of which acts as a rigid part when at least an external force in the Y-axis direction and the Z-axis direction is applied to the load introducing portion. A composite deformation detection unit is formed.

(C) A portion of the four columnar flexure members near the other end in the longitudinal direction, that is, a region close to the flat plate flexure member or a region close to the pedestal member. When the external force is applied, each of them is bent in parallel, and when at least the external force in the X-axis direction and the Z-axis direction is applied to the load introducing portion, each of them acts as a rigid body. A group composite deformation detector is formed.

Further, the multi-axial force detection sensor using the strain-generating body structure having such a structure is the above-mentioned first group deformation detecting section of the strain-generating body structure, the second group composite deformation detecting section, and the third group. A required number of strain gauges are attached to each of the group composite deformation detection units, and the amount of deformation generated in these three types of deformation detection units is independently detected by these strain gauges, and force components F _X , F in the three-axis directions are obtained.
_Y , F _Z and moment components M _X , M _Y about the three axes,
Detect M _Z.

[0021]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The configuration of the multi-axis force detection sensor of the present invention will be described in detail below with reference to the illustrated embodiments.

FIG. 1 is a perspective view showing the overall structure of a multi-axis force detection sensor common to a plurality of embodiments of the present invention, and FIG. 2 is a flat plate strain element of the multi-axis force detection sensor in the posture shown in FIG. 4 when viewed from the same direction as in Fig. 1 with the member removed
FIG. 3 is a perspective view showing the detailed configuration of the columnar flexure body members in the same direction, and FIG. 3 is a detailed configuration of the four columnar flexure body members when viewed from a direction opposite to the posture shown in FIG. FIG. 4 is a perspective view showing the structure in the opposite direction, and FIG. 4 is a flat plate-shaped strain body member when the pedestal member of the multi-axis force detection sensor in the posture shown in FIG. 2 is removed from the same direction as FIG. FIG. 3 is a perspective view showing the detailed configuration of the same.

1 to 4, reference numeral 10 denotes a multi-axis force detection sensor common to a plurality of embodiments of the present invention, which passes through an X-axis and a Y-axis set so as to be orthogonal to each other and a center point of itself. The Z-axis is set so as to intersect perpendicularly to the plane including the X-axis and the Y-axis, but in the following description, for convenience, the plane including the X-axis and the Y-axis will be described. Will be described as a horizontal plane, and will be described on the assumption that the Z axis is perpendicular to the horizontal plane.

Further, the strain body structure, which is the base body of the multi-axis force detection sensor 10, is a thick plate-shaped pedestal member 11 for coupling with one side (set downward in the figure) of the object to be measured (not shown). , A flat plate-shaped strain-generating member 12 for connecting to the other side (set upward in the drawing) of the object to be measured (not shown), the pedestal member 11 and the flat-shaped strain-generating member 12 are predetermined on the Z axis. It is configured to be composed of three types of members, that is, four columnar flexure members 41 to 44 which are connected in parallel with each other at intervals.

In the illustrated embodiment, a lathe processing method and a lathe processing method are used to manufacture the flat plate strain generating member 12 including the pedestal member 11 and the load introducing portion 12a and the four columnar strain generating members 41 to 44. It is manufactured using only the milling method.

The pedestal member 11 is formed as a thick plate member having a substantially quadrilateral plane shape, although each of the four corners is chamfered with an appropriate metal material having rigidity on the Z axis. ing.

On the other hand, the flat plate strain element member 12 is a thick plate member having a substantially regular quadrangular plane shape, although the four corners are chamfered with the same metal material as the pedestal member 11. Further, as a member having, for example, a columnar and large load introducing portion 12a on the Z-axis on the upper surface (on the drawing), it is provided on the Z-axis so as to be parallel to the pedestal member 11 at a predetermined interval. Has been.

In this case, the four sides of the flat plate strain generating member 12 are the first side 121 and the third side 123 set at positions orthogonal to the X axis, and the second side set at a position orthogonal to the Y axis. It is composed of a side 122 and a fourth side 124, and each side is a center point P of the multiaxial force detection sensor 10.
It is configured to be formed at positions at equal intervals from (also the Z axis).

Moreover, as shown in FIG. 4, in the four corner regions of the flat plate flexure member 12, first through fourth through grooves each having a W-shaped plane shape symmetrical with respect to the Z axis are provided. 13-
16 is formed in a state of penetrating from the upper surface to the lower surface (both in the drawing) of the flat plate-shaped flexure member 12.

That is, in the first through groove 13, the partial groove 131 near the X axis is the first side 121 of the flat plate strain-generating member 12.
And the Y-axis-side partial groove 132 is formed so as to be parallel to the fourth side 124 of the flat plate strain-generating member 12.

The second through-groove 14 has a partial groove 141 close to the X-axis so that the partial groove 141 near the X-axis is parallel to the first side 121 of the flat strain element 12, and the partial groove 142 close to the Y-axis. It is formed so as to be parallel to the second side 122 of the flat plate strain-generating member 12.

The third through-groove 15 has a partial groove 151 near the X-axis so that the partial groove 151 near the X-axis is parallel to the third side 123 of the flat strain element 12, and the partial groove 152 near the Y-axis. It is formed so as to be parallel to the second side 122 of the flat plate strain-generating member 12.

The fourth through-groove 16 is arranged such that the X-axis-side partial groove 161 is parallel to the third side 123 of the flat plate flexure member 12, and the Y-axis-side partial groove 1 thereof.
The plate 62 is formed so as to be parallel to the fourth side 124 of the flat flexure member 12. Each of these four through grooves 13 to 16 is configured to be formed by, for example, milling along the Z axis.

On the other hand, the first side 12 of the flat plate strain-generating member 12
In the region 1, the X-axis is sandwiched between the outer peripheral surface of the first side 121 and the X-axis-side partial groove 131 of the first through groove 13 and the X-axis-side partial groove 141 of the second through groove 14. Two deformed portion perforations 21 and 22 are formed.

Further, the second side 12 of the flat plate strain-generating member 12
In the second region, the Y axis is sandwiched between the outer peripheral surface of the second side 122 and the Y axis near partial groove 142 of the second through groove 14 and the Y axis near partial groove 152 of the third through groove 15. Two deformation portion perforations 23 and 24 are formed.

Similarly, the third side 1 of the flat strain element 12
In the region 23, the third side 123 is sandwiched across the X axis.
From the outer peripheral surface of the third through groove 15 to the X-axis side partial groove 151
And two deformation portion perforations 25 and 26 reaching the X-axis-side partial groove 161 of the fourth through groove 16 are formed.

Further, the fourth side 12 of the plate-shaped flexure member 12
In the area of 4, the Y-axis is sandwiched between the outer peripheral surface of the fourth side 124 and the Y-axis-side partial groove 162 of the fourth through groove 16 and the Y-axis-side partial groove 132 of the first through groove 13. Individual deformed portion perforations 27, 28 are formed.

In the illustrated embodiment, each of the two perforations (21, 22), (23, 2) formed in the region of each side is deformed.
4), (25, 26), (27, 28) are formed at symmetrical positions with respect to the Z-axis, and further four perforation holes are formed in the first side 121 and the third side 123. 21, 22, 2
5 and 26 are each formed from two circular holes drilled in parallel along the X axis by, for example, milling,
Similarly, the remaining four deformed portion perforations 23, 24, 27, 28 formed in the second side 122 and the fourth side 124 are all formed in parallel along the Y axis by, for example, milling. It is configured to be formed from two circular holes each.

As a result, the pair of deformed portion perforations 2 formed in the surface of the flat plate strain generating member 12 and the region of the first side 121.
The first side thin portions 31 and 32 as the strain generating portions are formed between the strain generating portions 1 and 22, respectively, and similarly, the surface of the flat plate strain generating body member 12 and the second side 122 to the second side. Four sides 124
A pair of deformation part perforations (2
3, 24), (25, 26), and (27, 28), second side thin-walled portions 33, 34 as strain generating portions,
The third side thin portions 35, 36 and the fourth side thin portions 37, 38 are formed.

Similarly, the back surface of the plate-shaped strain-generating member 12 and a pair of deformation portion perforations (1 to 121 to 4 to 124) are formed (2).
1,22), (23,24), (25,26), (2
7, 28) and the first side thin-walled parts 31, 3 respectively.
Similar to the second to fourth side thin portions 37, 38, four pairs of back surface side thin portions as strain generating portions are formed.

Then, the first side thin-walled portions 31, 32 to the fourth side thin-walled portions 37, 38 and the four backside thin-walled portions form four pairs of parallelogram beam deformation detecting portions. However, the thickness, length, and width of the thin-walled portions forming the four pairs of deformation detection portions are such that the thin-walled portions are parallel to each other when an external force in the Z-axis direction is applied to the load introducing portion 12a. Can be bent by a predetermined amount in at least the X-axis direction and Y
The values are set such that the respective thin-walled portions act as rigid portions when an external force in the axial direction is applied.

The four pairs of deformation detectors (31, 32)
.About.37, 38 and four pairs of back surface side thin-walled portions) constitute the first group deformation detecting portion described in the claims, but in the illustrated embodiment, four pairs of back surface side thin-walled portions have strain gauges. Since the structure is not attached, the thin portion on the back surface side is not particularly labeled.

Now, the four columnar flexure members 41-44
Are formed in parallel with each other along the Z-axis with the same metal material as the flat plate strain generating member 12 and the pedestal member 11, and both ends of the first to fourth columnar strain generating members 41 to 44 are The pedestal member 11 and the flat plate strain member 12 are provided so as to be integrated with each other.

These four columnar flexure members 41 to 44
Are located at four positions on the pedestal member 11 and the flat-plate strain body member 12 that are equidistant from the X axis and the Y axis, respectively, and are symmetrical to each other with respect to the Z axis. It is arranged.

Then, each of the columnar strain generating element members 41 to 44 is formed.
However, in each case, each of the two sides (two side surfaces) set in a position orthogonal to the X axis and each of the two sides set in a position orthogonal to the Y axis.
It is formed as a member having a quadrilateral cross-sectional shape including sides (two side surfaces). That is, the four sides of each of the columnar flexure body members 41 to 44 are configured to be parallel to the first side 121 to the fourth side 124 of the flat plate flexure body member 12, respectively.

Then, each of the columnar flexure members 41-44
2 and 3, the region near the pedestal member 11 penetrates in the Y-axis direction (direction parallel to the Y-axis) from one side surface orthogonal to the Y-axis toward the other side surface. One downward deformation portion perforation 45 to 48 is formed.

It should be noted that these four downward deformation portion perforations 45-
Each of 48 is configured to be formed from two circular holes formed in parallel along the Y axis by milling, for example.

As a result, between the two side surfaces of the first columnar flexure member 41 orthogonal to the X-axis and the lower deformed portion perforations 45 formed in the columnar flexure member 41, a strain section is formed. A pair of the first column lower thin portions 451 and 452 are formed, and similarly, the second to fourth columnar flexure body members 42 to 4 are formed.
As for No. 4, a pair of second pillar to fourth pillar is provided between each of the two side surfaces of each columnar flexure member 42 to 44 orthogonal to the X axis and the lower deformable portion perforations 46 to 48 formed on each side surface. Lower thin portions (461, 462), (471, 472),
(481,482) will be formed.

The first pillar lower thin portions 451 and 452
~ Four pairs of parallelogrammatic beam type deformation detecting portions are formed by the fourth pillar lower thin portions 481 and 482. The thickness of each thin portion forming the four pairs of deformation detecting portions, The length and width are such that when an external force in the X-axis direction is applied to the load introducing portion 12a, the thin portions can be bent in parallel by a predetermined amount, and at least the external force in the Y-axis direction and the Z-axis direction is applied. Is set to such a value that each thin portion acts as a rigid body portion. In addition, these four pairs of lower thin-walled portions 451, 452 to 48
1,482 constitutes the second group composite deformation detecting section described in the claims.

On the other hand, in the region of each of the columnar flexure members 41 to 44 near the flat plate flexure member 12, the X axis direction (X axis) from one side surface orthogonal to the X axis to the other side surface. One upper deformation portion perforation 51 penetrating in a direction parallel to
To 54 are formed.

Incidentally, these four upper deformation portion perforations 51 to 51
Each of 54 is configured to be formed by two circular holes formed in parallel along the X axis by, for example, milling.

As a result, between the two side surfaces of the first columnar flexure member 41 orthogonal to the Y-axis and the upper deformation portion perforation 51 formed in the first columnar flexure member 41, a pair of holes is formed. The first pillar upper thin portions 511 and 512 are formed.

Similarly, the second to fourth columnar flexure body members 42 to
Also for 44, between the two side surfaces of each of the columnar flexure body members 42 to 44 orthogonal to the Y axis and the upper deformation portion perforations 52 to 54 formed in each, a pair of second column upper thin portions, Third upper thin portion, fourth pillar upper thin portion (521, 5
22), (531, 532), and (541, 542) will be formed.

Then, the first pillar upper thin wall portions 511 and 512
~ Four pairs of parallelogrammatic beam type deformation detecting portions are formed by the fourth pillar upper thin portions 541 and 542. The thickness of each thin portion forming the four pairs of deformation detecting portions, The length and width are such that, when an external force in the Y-axis direction is applied to the load introducing portion 12a, the thin-walled portions can be bent in parallel by a predetermined amount, and at least the external force in the Z-axis direction and the X-axis direction is applied. Is set to such a value that each thin portion acts as a rigid body portion. The four pairs of deformation detecting units 511, 512 to 54
1, 542 constitutes the third group composite deformation detecting section described in the claims.

Next, the thin-walled portions 31 to 38, 451 to 482 and 511 to 5 constituting the above-mentioned three types of deformation detecting portions.
The strain gauge attached to 42 will be described with reference to FIGS. 2, 3 and 4 viewed from opposite directions.

(A) X-axis force component detecting strain gauges 1 _b-3 and 1 _b-4 , 2 _b-3 for detecting the force component F _X applied to the load introducing portion 12 a in the X-axis direction. Reference numerals 2 _b-4 , 3 _b-1 and 3 _b-2 , 4 _b-1 and 4 _b-2 are four pairs of strain gauges which are arranged at a predetermined interval from each other, and are each a first columnar strain element. Attached to the surface of the thinnest part of the lower thin parts 452, 462, 472, 482 formed inside each of the members 41 to the fourth columnar flexure member 44 (the side facing the other columnar flexure members). Has been done. These eight X-axis force component detecting strain gauges are connected so as to form a Wheatstone bridge circuit shown in FIG.

(B) Y-axis force component detecting strain gauges 1 _a-1 and 1 _a-2 , 2 _a-1 for detecting the Y-axis direction force component F _Y applied to the load introducing portion 12a. 2 _a-2 , 3 _a-1 and 3 _a-2 , 4 _a-1 and 4 _a-2 are four pairs of strain gauges that are arranged at a predetermined interval from each other, and are each a first columnar strain element. It is attached to the surfaces of the upper thin-walled portions 512, 522, 532, 542 formed inside each of the members 41 to the fourth columnar flexure body member 44 (on the side facing the other columnar flexure body members). The eight Y-axis force component detecting strain gauges are connected so as to form a Wheatstone bridge circuit shown in FIG.

(C) Z-axis force component detecting strain gauges 5 _a-1 and 5 _a-2 , 5 _b-1 for detecting the force component F _Z in the Z-axis direction applied to the load introducing portion 12a. 5 _b-2 , 6 _a-1 and 6 _a-2 , 6 _b-1 and 6 _b-2 , 7 _a-1 and 7 _a-2 , 7 _b-1 and 7
_As shown in FIG. 4, _b-2 , _8a-1 and _8a-2 , _8b-1 and _8b-2 are eight pairs of strain gauges, which are arranged at a predetermined interval from each other, respectively. It is attached to the surface of the first side thin portion 31, 32 to the fourth side thin portion 37, 38 formed on the surface side of the flat plate strain generating member 12.

In this case, each of the two strain gauges constituting each pair of strain gauges has a respective deformed portion perforation 21 to 2 formed on each side of the flat plate flexure member 12.
It is desirable that the both ends of 8 are attached to the thinnest part.

The 16 Z-axis force component detecting strain gauges are connected so as to form a Wheatstone bridge circuit shown in FIG.

(D) X-axis moment component detecting strain gauges 1 _a-3 and 1 _a-4 for detecting the moment component M _X around the X axis applied to the load introducing portion 12a.
_a-3 and 2 _a-4 , 3 _a-3 and 3 _a-4 , 4 _a-3 and 4 _a-4 are four pairs of strain gauges, which are spaced apart from each other by a predetermined distance, respectively. It is attached to the surfaces of the upper thin-walled portions 511, 521, 531, 541 formed on the outer sides (sides facing outward) of each of the columnar flexure body members 41 to 44. The eight strain gauges for detecting the moment component around the X axis are connected so as to form the Wheatstone bridge circuit shown in FIG.

(E) Y-axis moment component detecting strain gauges 1 _b-1 and 1 _{b-2 '} for detecting the Y-axis moment component M _Y applied to the load introducing portion 12a, 2
_b-1 and 2 _{b-2 '} , 3 _b-3 and 3 _b-4' , 4 _b-3 and 4 _{b-4 '} are four pairs of strain gauges arranged in a predetermined relation position with each other, respectively. Outside (side facing outward) of each of the first columnar flexure body member 41 to the fourth columnar flexure body member 44.
Lower thin portions 451, 461, 471, 48 formed on the
It is attached to the surface of 1. The eight strain gauges for detecting the moment component around the Y-axis are connected so as to form a Wheatstone bridge circuit shown in FIG.

(F) Z-axis moment component detection strain gauges 1 _b-2 , 2 _b-2 , 3 for detecting the Z-axis moment component M _Z applied to the load introducing portion 12a.
_b-4 and 4 _b-4 are adjacent to the above-mentioned four pairs of strain gauges 1 _b-1 and 1 _{b-2 ′} for detecting moment components around the Y-axis to 4 _b-3 and 4 _{b-4 ′.} As the individual strain gauges, lower thin-walled portions 451, 461, 47 formed on the outer sides of the first columnar flexure body member 41 to the fourth columnar flexure body member 44, respectively.
It is attached to the surface of 1,481. And these 4
The strain gauges for detecting the moment component around the Z-axis are connected so as to form a Wheatstone bridge circuit shown in FIG.

Hereinafter, the force components F _X and F in the three-axis directions in the multi-axis force detection sensor 1 of the first embodiment having such a configuration will be described.
_Y , F _Z and moments about three axes M _X , M _Y , M _Z
The detection operation of will be described.

[Detection of Force Component F _X in X-axis Direction] The force component F in the X-axis direction is applied to the load introducing portion 12a of the multi-axis force detection sensor 10.
_{When X} is applied, this force component F _X becomes
Flat plate-shaped flexure member 12 → four columnar flexure members 41 to 4
11 is transmitted to the pedestal member 11 connected to the first rigid body portion (one side of the object to be measured) via 4 and, in the process, the first columnar flexure body member 41 to the fourth columnar flexure body member 44 are shown in FIG. As shown in, each is deformed in the X-axis direction.

At this time, the first to fourth columnar flexure body members 41
4 pairs of upper thin-walled portions (511, 512), (52) that constitute the third group composite deformation detection portion located in the upper region of
1,522), (531,532), (541,54)
2) are four rigid thin portions (451, 452), (461, 462) constituting the second group composite deformation detecting portion located in the lower region, because they act as rigid portions.
Only (471, 472) and (481, 482) are deformed.

That is, of the first pillar and second pillar lower thin portions, the two lower thin portions 452, 4 located on the side (inner side) facing the third and fourth columnar flexure body members 43, 44.
62 is deformed in parallel to the right in FIG. 11 together with the two lower thin-walled parts 451 and 461 located on the side facing outward (outer side), and at the same time, of the third pillar and the fourth pillar lower thin-walled parts. , Two lower thin-walled portions 472, 48 located on the side (inner side) facing the first and second columnar flexure members 41, 42
2 has two lower thin-walled parts 471, 481 located on the outer side.
Along with it, it deforms parallel to the right.

Therefore, the lower thin wall portions 45 at these four locations
A pair of X-axis force component detecting strain gauges (1 _b-3 and 1) attached to the respective surfaces of 2, 462, 472 and 482.
_b-4 ), (2 _b-3 and 2 _b-4 ), (3 _b-1 and 3 _b-2 ),
(4 _b-1 and 4 _b-2 ) electrically detect the deformation amount (strain amount) of the four lower thin wall portions at this time.

In this case, these four lower thin portions 45 are
2, 462, 472, 482, since the deformation region (direction) differs between the upper region and the lower region of the thin portion, the relationship between each component force and the output of each bridge circuit is as shown in FIG. Properties of electrical signals output from the four strain gauges 1 _b-3 , 2 _b-3 , 3 _b-2 , 4 _b-2 attached to the upper region of the thin portion (in this case, minus) And four strain gauges 1 _b-4 , 2 attached to the lower area of each thin portion.
_The polarities of the electric signals output from _b-4 , 3 _b-1 , and 4 _b-1 (plus in this example) are opposite to each other.

Therefore, these eight strain gauges 1
_b-3 , 2 _b-3 , 3 _b-2 , 4 _b-2 , 1 _b-4 , 2 _b-4 , 3 _b-1
, 4 _b-1 are connected as shown in FIG. 5 to form a Wheatstone bridge circuit, the output is large and the force component F _{X in the} X-axis direction is highly accurate with little interference with other force components.
Only the detection can be performed.

That is, if the Wheatstone bridge circuit as shown in FIG. 5 is constructed, force components F _Y and F _Z other than the X axis direction and moment components M _X , M _Y and M _Z around the three axes are present in the load introducing portion 12a. In addition, these force components F _Y , F
Four pairs of lower thin-walled parts (451, 452) forming the second group composite deformation detection part by the action of _Z , M _X , M _Y , M _Z ,
(461, 462), (471, 472), (481,
Even if 482) is deformed, as shown in Attached Table 1, eight X-axis force component detecting strain gauges 1 _b-3 , 1 _b-4 , 2 _b-3 , 2 _b-4 generated by this deformation are generated. 3 _b-1 , 3
The output from the Wheatstone bridge circuit for detecting the X-axis force component composed of _b-2 , _4b-1 , _4b-2 can be suppressed to "0".

In the process of detecting the force component F _{X in} the X-axis direction, the lower thin portions 451, 461, 471, 481 located outside the four columnar flexure members 41 to 44 are also deformed. However, in the process of detecting the force component F _{X in} the X-axis direction, the deformation amounts generated in these four lower thin portions are not used, and therefore the description regarding this deformation amount is omitted.

Further, in the process of detecting the force component F _{X in} the X-axis direction, as shown in FIG. 11, the flat plate flexure member 12 is also left-right (see the figure) with the center point P of the multi-axis force detection sensor 10 as a boundary. 11
The above regions will be deformed in mutually opposite directions. However, in the process of detecting the force component F _{X in} the X-axis direction, the amount of deformation that occurs in the flat plate flexure member 12 at this time is also not utilized, so
The explanation about this deformation amount is also omitted.

[Detection of force component F _Y in the Y-axis direction] The force component F in the Y-axis direction is applied to the load introducing portion 12a of the multi-axis force detection sensor 10.
_{When Y} is applied, this force component F _Y becomes
Flat plate-shaped flexure member 12 → four columnar flexure members 41 to 4
4 is transmitted to the pedestal member 11 connected to the first rigid body portion, and in the process, the first columnar flexure body member 41 to the fourth columnar flexure body member 44 are respectively moved in the Y-axis direction as shown in FIG. Transform it.

At this time, the first to fourth columnar flexure body members 41
4 pairs of lower thin-walled portions (451, 452), (46) forming the second group composite deformation detection portion located in the lower region of
1,462), (471,472), (481,48)
2) each act as a rigid body part, and four pairs of upper thin-walled parts (511, 512), (521, 522), (5
Only 31, 532) and (541, 542) are deformed.

That is, of the second pillar and the third pillar upper thin-walled portions, the two upper thin-walled portions 522, 53 located on the inner side.
2 is deformed in parallel to the right side in FIG. 12 together with the two upper thin-walled portions 521 and 531 located on the outer side, and at the same time, the inner two of the first pillar and the fourth pillar upper thin-walled portion
The two upper thin portions 512 and 542 are deformed in parallel to the right along with the two upper thin portions 511 and 541 located outside.

Therefore, the four upper thin wall portions 51 are
A pair of Y-axis force component detecting strain gauge gauges (1 _a-1 attached to each surface of 2, 522, 532 and 542).
And 1 _a-2 ), (2 _a-1 and 2 _a-2 ), (3 _a-1 and 3
_a-2 ) and ( _4a-1 and _4a-2 ) electrically detect the deformation amounts of the four upper thin portions at this time, respectively.

In this case, as in the case of the detection operation of the force component F _X in the X-axis direction, the upper thin wall portions 5 at these four locations are detected.
In Nos. 12, 522, 532, and 542, since the deformation characteristics are different between the upper region and the lower region of the thin portion, as shown in Attached Table 1, the four strain gauges 1 _a attached to the upper region of each thin portion 1 _{a -1} , 2 _a-1 , 3 _a-1 , 4 _a-1 output signals and four strain gauges 1 _a-2 , 2 _a- attached to the lower region of each thin wall _The polarities of the electric signals output from ₂ , 3 _a-2 and 4 _a-2 are opposite to each other.

Therefore, these eight strain gauges 1 _a-1
By constructing the Wheatstone bridge circuit by connecting 4a _-2 to 4a _-2 as shown in FIG. 6, it is possible to detect the force component F _{Y in} the Y-axis direction with high output and high accuracy.

Moreover, if the Wheatstone bridge circuit as shown in FIG. 6 is constructed, the force components F _X and F _Z other than the Y-axis direction and the moment component M about the three axes around the load introducing portion 12a are provided.
_X , M _Y , M _Z are added, and these force components F _X , F _Z ,
Even when the four upper thin-walled portions 512, 522, 532, and 542 are deformed by the action of M _X , M _Y , and M _Z , the relationship between each component force and the output of each bridge circuit is shown in FIG. as referred to, "0 output from the Wheatstone bridge circuit for the configured Y-axis force component detection of eight Y-axis force component detection strain gauge _{1 a-1} ~4 _{a- 2} generated by this deformation It will be possible to suppress.

Even in the process of detecting the force component F _{Y in} the Y-axis direction, the upper thin-walled portions 511, 521, 531 and 541 located outside the four columnar flexure members 41 to 44 and the flat plate-shaped flexure members 441 to 44 are formed. Left and right with the center point P of the strain member 12 as a boundary (see FIG.
The above regions will be respectively deformed, but the deformation amount generated in them is not used in the process of detecting the force component F _{Y in} the Y-axis direction, so the description of these deformation amounts will be omitted.

[Detection of Force Component F _Z in Z-axis Direction] Force component F in Z-axis direction is applied to the load introducing portion 12a of the multi-axis force detection sensor 10.
_{When Z} is applied, this force component F _Z becomes
Flat plate-shaped flexure member 12 → four columnar flexure members 41 to 4
It is transmitted to the pedestal member 11 connected to the first rigid body portion via 4

In this transmission process, the lower thin-walled portions 451 to 482 as the second group composite deformation detection section and the upper thin-walled section as the third group composite deformation detection section formed on the four columnar flexure members 41 to 44 are formed. Since each of the parts 511 to 542 acts as a rigid body part, each side 12 of the flat plate flexure body member 12
Comprising the first group deformation detection unit formed in 1 to 124 8
The thin portions 31 to 38 at the points are respectively deformed upward along the Z axis as shown in FIG.

Although only the fourth side 124 and the second side 122 are shown in FIG. 13, the deforming action of the flat plate flexure member 12 also applies to the first side 121 and the third side 123. Since it occurs in the same way, it will be added in the description even if it is not shown.

Now, the four sides 1 of the plate-shaped flexure member 12
When 21 to 124 are deformed upward, on the fourth side 124, the two thin-walled portions 37 and 38 of the fourth-side thin-walled portion are deformed symmetrically with respect to the center point P in opposite directions.

Therefore, a pair of Z-axis force component detecting strain gauges (8 _b-1 and 8 _b-2 ) attached to the surfaces of the two thin portions 37 and 38 of the fourth side thin portion, ( 8
_a-1 and 8 _a-2 ) electrically detect the deformation amounts of the two thin portions 37 and 38, which deform in opposite directions.

In this case, since the outer region and the inner region of one thin portion 37 have different deformation characteristics, the strain gauge 8 _b-2 attached to the outer region of this thin portion 37 is added as shown in Appendix Table _2. And strain gauge 8 attached to the inner area
_The electric signals outputted from _b-1 and _b-1 have opposite polarities to each other, and the electric signals outputted from the two strain gauges 8 _a-1 and 8 _a-2 attached to the surface of the thin portion 38 on the other side. The characteristics of the signals also have opposite polarities.

However, two strain gauges 8 _b-2 and 8 _a-1 located outside each other of these two thin portions 37 and 38 are provided.
And have the same polarity, and the two strain gauges 8 _b-1 and 8 _a-2 located inside each other also have the same polarity.

This means that each pair of strain gauges (5 _b-1 and 5 _b-2 ) and (5) attached to the two thin portions 31 to 36 of the remaining first to third side thin portions, respectively. _a-1 and 5 _a-2 ), (6
_a-1 and 6 _a-2 ), (6 _b-1 and 6 _b-2 ), (7 _a-1 and 7 _a-2
), (7 _b-1 and 7 _b-2 ) is the same,
Electrical signals having opposite polarities are output from the strain gauges associated with the same thin portion.

Further, electric signals of the same polarity are output from the two strain gauges located on the outer sides of the two thin-walled portions provided on the same side, and the two strain gauges located on the inner sides of the two strain gauges. Will also output electrical signals of the same polarity.

Therefore, these 16 strain gauges 5
If the Wheatstone bridge circuit is configured by connecting _a-1 to _8b-2 as shown in FIG. 7, it becomes possible to detect the force component F _{Z in} the Z-axis direction with high output and high accuracy. .

Moreover, if the Wheatstone bridge circuit as shown in FIG. 7 is constructed, the force components F _X and F _{Y in} the load introducing portion 12a other than the Z-axis direction and the moment component M about the three axes are provided.
_X , M _Y , M _Z are added, and these force components F _X , F _Y ,
Even when the eight thin portions 31 to 38 forming the first group deformation detecting portion are deformed by the action of M _X , M _Y , and M _Z ,
As shown in FIG. 32, the output from the Wheatstone bridge circuit for detecting the Z-axis force component composed of 16 strain gauges 5 _a-1 to 8 _b-2 generated by this deformation is suppressed to "0". You will be able to

[Detection of Moment Component M _X Around X Axis]
When a counterclockwise moment component M _X around the X axis is applied to the load introducing portion 12 a of the multi-axis force detection sensor 10, this force component M _X is transmitted from the flat plate strain member 12 to the pedestal member 11.

In this transmission process, four pairs of lower thin-walled portions (451, 452) constituting the second group composite deformation detecting portion located in the lower region of the first to fourth columnar flexure body members 41 to 44,
(461, 462), (471, 472), (481,
482) each act as a rigid body portion, and the four pairs of upper thin portions (511, 512), (521, 522), (53) that constitute the third group composite deformation detection portion located in the upper region.
1, 532) and (541, 542) are deformed as shown in FIG.

At this time, the two upper thin-walled portions 511 and 541 located on the outer side of the first pillar and the fourth pillar upper thin-walled portions.
Respectively deform in the shrinking direction, and at the same time, the two upper thin-walled portions 521 and 531 located outside of the second pillar and the third pillar upper thin-walled portions respectively deform in the pulling direction.

Therefore, each pair of strain gauges 1 for detecting the moment component around the X-axis attached to the surfaces of the two upper thin portions 511 and 541 of the first pillar and the fourth pillar upper thin portions.
_a-3 and 1 _a-4 , 4 _a-3 and 4 _a-4 electrically detect the amount of deformation in the compression direction that occurs in these two upper thin portions 511 and 541 and output an electrical signal during compression. In addition, the two upper thin portions 521 and 531 of the second pillar and the third pillar upper thin portions.
The pair of strain gauges 2 _a-3 and 2 _a-4 , 3 _a-3 and 3 _a-4 for detecting the moment component around the X-axis attached to the surface of
The amount of deformation in the pulling direction occurring in the two upper thin portions 521 and 531 is electrically detected and an electric signal for pulling is output.

Therefore, four strain gauges 1 _a-3 , 1 _a-4 , 4 each of which outputs electric signals having different properties from each other are provided.
If the Wheatstone bridge circuit is constructed by connecting _a-3 , 4 _a-4 and 2 _a-3 , 2 _a-4 , 3 _a-3 , 3 _a-4 as shown in FIG. It is possible to detect the moment component M _X around the X axis with high accuracy.

Moreover, if the Wheatstone bridge circuit as shown in FIG. 8 is configured, the moment component M other than the force components F _X , F _Y , F _Z in the three axis directions and the moment component M _X around the X axis is provided in the load introducing portion 12a. _Y and M _Z are added, and by the action of these force components F _X , F _Y , F _Z , M _Y , and M _Z , the above-mentioned four upper thin-walled portions 511, 521, 531, 5
Even when 41 is deformed, as shown in FIG. 32, X-axis moment component detection composed of eight X-axis moment component detection strain gauges 1 _a-3 to 4 _a-4 generated by this deformation is detected. Therefore, the output from the Wheatstone bridge circuit for use can be suppressed to "0".

Even in the process of detecting the moment component M _X about the X axis, the upper thin portions 512, 522, 532 and 542 located inside the four columnar flexure body members 41 to 44 are also detected.
And the thin-walled portions 31 to 38 of the flat plate strain generating member 12 are respectively deformed. However, since the deformation amount generated in them is not used in the process of detecting the moment component M _X around the X axis, these deformation amounts are not used. I omit the explanation about.

[Detection of Moment Component M _Y Around Y Axis]
When a clockwise Y-axis moment component M _Y is applied to the load introducing portion 12a of the multi-axis force detection sensor 10, this force component M
_Y is transmitted from the flat plate strain generating member 12 to the pedestal member 11.

In this transmission process, four pairs of upper thin portions (511, 512) constituting the third group composite deformation detecting portion located in the upper regions of the first to fourth columnar flexure body members 41 to 44,
(521,522), (531,532), (541,
542) each act as a rigid body portion, and the four pairs of lower thin-walled portions (451, 452), (461, 462), (47) that constitute the second group composite deformation detection portion located in the lower region
1, 472) and (481, 482) are transformed as shown in FIG.

At this time, the two lower thin wall portions 451 and 461 located on the outer side of the lower thin wall portions of the first pillar and the second pillar.
Respectively deform in the contraction direction, and at the same time, the two lower thin-walled portions 471, 481 located outside of the third pillar and fourth pillar lower thin-walled portions respectively deform in the pulling direction.

Therefore, each pair of Y-axis moment component detecting strain gauges 1 attached to the surfaces of the two lower thin portions 451 and 461 of the first pillar and the second pillar lower thin portions.
_b-1 and 1 _{b-2 '} , 2 _b-1 and 2 _b-2' are electric signals at the time of compression by electrically detecting the deformation amount in the compression direction generated in these two lower thin portions 451 and 461. And the two lower thin wall portions 471, 481 of the third pillar and the fourth pillar lower thin wall portions.
Strain gauges 3 _b-3 and 3 _{b-4 '} , 4 _b-3 and 4 _b-4' for detecting the moment component around the Y-axis attached to the surface of
The amount of deformation in the pulling direction generated in the two lower thin portions 471 and 481 is electrically detected, and an electric signal for pulling is output.

Therefore, four strain gauges 1 _b-1 , 1 _{b-2 '} , 2 each of which outputs electric signals having different properties from each other are output.
_{If b-1} , 2 _{b-2 '} and 3 _b-3 , 3 _b-4' , 4 _b-3 , 4 _{b-4 '} are connected as shown in FIG. It is possible to detect the moment component M _Y around the Y axis with a large value and high accuracy.

Moreover, if the Wheatstone bridge circuit as shown in FIG. 9 is configured, the moment components M other than the force components F _X , F _Y , F _Z in the three axis directions and the moment component M _Y around the Y axis are provided in the load introducing portion 12a. _X and M _Z are added, and by the action of these force components F _X , F _Y , F _Z , M _X , and M _Z , the above-described four lower thin wall portions 451, 461, 471, 4
Even when 81 is deformed, as shown in FIG. 33, from the Wheatstone bridge circuit composed of eight Y-axis moment component detecting strain gauges 1 _b-1 to 4 _{b-4 ′} generated by this deformation, as shown in FIG. The output can be suppressed to "0".

The moment component M _Y about the Y axis is
Also in the detection process of, the lower thin portions 452, 462, 472, 48 located inside the four columnar flexure body members 41 to 44 are detected.
2 and the thin-walled portions 31 to 38 of the flat plate-shaped strain generating member 12, respectively, are deformed. However, in the process of detecting the moment component M _Y about the Y-axis, the amount of deformation generated therein is not used, and therefore A description of the amount of deformation is omitted.

[Detection of Moment Component M _Z Around Z Axis]
When a counterclockwise moment component M _Z about the Z-axis is applied to the load introducing portion 12 a of the multi-axis force detection sensor 10, this force component M _Z is transmitted from the flat plate strain element member 12 to the pedestal member 11, and In the process, as shown in FIG. 17, the flat plate flexure member 12 is rotated relative to the pedestal member 11 so as to be twisted counterclockwise while maintaining a parallel distance between the members.

Therefore, the four columnar flexure members 41 to 44 are
Is, for example, as shown in FIG.
The 1st and 4th columnar flexure body members 44 and the 2nd columnar flexure body member 42 and the 3rd columnar flexure body member 43 are deformed so as to be twisted in opposite directions. Four pairs of upper thin-walled portions (511, 512) forming the third group composite deformation detection portion located in the upper region of the strain body members 41 to 44,
(521,522), (531,532), (541,
542) each act as a rigid body portion, and therefore, in this transmission process, four pairs of lower thin-walled portions constituting the second group composite deformation detection portion located in the lower region of the four columnar flexure body members 41 to 44 are formed. (451, 452), (461, 462),
Only (471, 472) and (481, 482) are shown in FIG.
It deforms as shown in.

Therefore, the first columnar flexure body member 41 and the fourth columnar flexure body member 44 which are deformed so as to be twisted in the same direction.
However, the lower portion of the thin portion 451 located on the outer side of the first pillar lower thin portion is deformed in the compression direction, and the lower portion of the outer thin portion 481 of the fourth pillar lower thin portion is formed. The part deforms in the contracting direction.

On the other hand, in the second columnar flexure element member 42 and the third columnar flexure element member 43, conversely, the lower part of the thin part 461 located on the outer side of the second pillar lower thin part is deformed in the shrinking direction. Of the third pillar lower thin portion, the thin portion 4 located outside
The lower part of 71 is deformed in the pulling direction.

As a result, the strain gauge _1b-2 for detecting the moment component around the Z-axis attached to the surface of the thin portion 451 outside the first pillar lower thin portion and the thin portion outside the third pillar lower thin portion. The strain gauge 3 _b-4 for detecting the moment component around the Z-axis attached to the lower part of the 471 electrically detects the amount of deformation in the compression direction generated in the two lower thin parts 451 and 471 to detect the electric power at the time of compression. A strain gauge 2 _b-2 for outputting a signal and for detecting a moment component around the Z-axis attached to the lower portion of the thin portion 461 outside the second pillar lower thin portion.
And the strain gauge 4 for detecting the moment component around the Z axis attached to the outer thin portion 481 of the fourth pillar lower thin portion.
_b-4 means these two lower thin portions 461 and 48, respectively.
The amount of deformation in the pulling direction that occurs in the lower part of 1 is electrically detected and an electric signal during pulling is output.

Therefore, two strain gauges 1 _b-2 , 3 _b-4 and 2 which output electric signals having different properties from each other are provided.
_b-2 4 _b-4 can be connected as shown in FIG. 10 to form a Wheatstone bridge circuit, which makes it possible to detect the moment component M _Z around the Z axis with high output and high accuracy. become.

Moreover, if the Wheatstone bridge circuit as shown in FIG. 10 is configured, the moment components M other than the force components F _X , F _Y , F _Z in the three axis directions and the moment component M _Z around the Z axis are provided in the load introducing portion 12a. _X and M _Y are added, and the action of these force components F _X , F _Y , F _Z , M _X , and M _Y causes the above-described four lower thin-walled portions 451, 461, 471,
Even when 481 is deformed so as to be twisted, as shown in FIG. 33, the output from the _four strain gauges 1 _b-2 to 4 _b-4 for detecting the moment component around the Z-axis generated by this deformation is “0. Can be suppressed.

The moment component M _Z about the Z axis is
Also in the detection process of, the lower thin portions 452, 462, 472, 48 located inside the four columnar flexure body members 41 to 44 are detected.
2 and the thin-walled portions 31 to 38 of the flat plate strain generating member 12, respectively, are deformed. However, in the process of detecting the moment component M _Z around the Z axis, the deformation amount generated therein is not used. The explanation of the deformation amount of is omitted.

18, FIG. 19 and FIG. 34 show a method of connecting strain gauges when constructing respective Wheatstone bridge circuits for detecting the force component F _{X in the X-} axis direction and the force component F _Y in the Y-axis direction. Another embodiment of the present invention constitutes a second embodiment of the present invention.

In addition, FIGS. 20 to 25, 35, and 3.
6 is a third embodiment and a modification thereof related to the method of connecting the strain gauges when forming the Wheatstone bridge circuit for detecting the force component F _Z in the Z-axis direction.

Further, FIG. 26 to FIG. 30 and FIG.
It is a 4th example concerning the connecting method of a strain gauge at the time of forming a Wheatstone bridge circuit for detecting the moment component M _Z around the Z-axis, and its modification.

Thus, the force components F _X , F _Y in the three-axis directions,
Even if each Wheatstone bridge circuit related to the moment component M _Z about the F _Z and the Z axis is modified and configured, the output is high as in the case of the first embodiment and the accuracy is high without mutual interference. Can be measured.

Although the illustrated embodiment has been described above, the present invention is not limited to this, and various modifications can be made without departing from the scope of the invention.

For example, in the illustrated embodiment, a total of 16 strain gauges 5 _a-1 to 8 _b-2 are used in eight thin portions to detect the force component F _Z in the Z-axis direction. You may make it detect using a total of eight strain gauges attached to the position of Z-axis symmetry among eight thin parts.

Further, the vertical deformation positions of the lower deformed portion perforations 45 to 48 and the upper deformed portion perforations 51 to 54 formed in the four columnar flexure body members 41 to 44 are defined by these two types of perforations. They may be formed at positions opposite to each other within a range in which the function to be carried is changed.

Further, the load introducing portion 11 is formed in such a shape that it largely projects from the surface of the flat plate-shaped flexure member on the side where the four columnar flexure members are not located. It is not necessary to increase the size as shown in the drawing, and the entire shape of the load introducing portion need not be limited to the circular trapezoid.

Further, in the illustrated embodiment, the thin-walled portions 31 to 38 as the first-group deformation detecting portion, the lower thin-walled portions 451 to 482 as the second-group composite deformation detecting portion, and the upper portion as the third-group composite deformation detecting portion. In order to manufacture the thin-walled parts 511 to 542, two circular openings are formed by using a milling method so as to be parallel to the three-axis directions. You may manufacture by the method of forming.

[0124]

As described above, according to the present invention, (a) first, a thick plate-shaped pedestal member provided so as to be located on the Z axis so as to be coupled to one side of the object to be measured, A flat plate flexure member formed in parallel with the pedestal member at a predetermined distance in the Z-axis so as to be coupled to the other side of the object to be measured, and having a load introducing portion on the Z-axis, In order to connect between the pedestal member and the flat plate-shaped flexure member, it is composed of three members, that is, four columnar flexure members provided in parallel with each other along the Z axis.

(B) The flat plate strain generating member is arranged at two positions which are equidistant from the Z axis and at positions orthogonal to the X axis, and at equidistant positions from the Z axis. The four columnar flexure members are arranged from the X-axis and the Y-axis, respectively. The columnar strain element members are arranged at four positions equidistant from each other and symmetrical to each other with respect to the Z-axis. A member having a substantially regular quadrilateral cross-sectional shape having four sides positioned parallel to each other.

(C) As the deformation detecting portion for detecting the force component in the Z-axis direction, the respective regions symmetrical with respect to the Z-axis in the above-mentioned four side regions of the flat plate strain-generating member, A pair of first group deformation detection units is provided on each side on both sides of the X-axis or the Y-axis to detect the remaining force components in the X-axis direction and the Y-axis direction and the moment component around the three axes. As the deformation detection unit, the second group composite deformation detection unit and the third group composite deformation detection unit were provided in the region of the four columnar flexure members close to the base member and in the region of the flat plate flexure member. thing.

(D) When the first group deformation detecting section, the second group compound deformation detecting section, and the third group compound deformation detecting section are provided, in the case of the first group deformation detecting section, the load introducing section has an X-axis. When the external force in the direction is applied, each flexes in parallel, and at least when the external force in the Y-axis direction and the Z-axis direction is applied to the load introducing portion, the parallel plate-like structure is formed so that each acts as a rigid body portion. Further, in the case of the second group composite deformation detecting portion, when an external force in the X-axis direction is applied to the load introducing portion, each of them flexes in parallel and at least the external force in the Y-axis direction and the Z-axis direction is applied to the load introducing portion. In the case of the third group compound deformation detecting section, a flat plate-shaped strain body member of four columnar strain body members is used as a parallel plate-shaped structure in which each acts as a rigid body portion when applied. Near the area or pedestal member When the Y-axis external force is applied to the load introducing portion, the respective areas are bent in parallel to each other, and at least when the load introducing portion is applied with the external force in the X-axis direction and the Z-axis direction, each acts as a rigid body portion. The parallel plate-like structure is formed so that each of them is formed.

The above-mentioned points are characteristic, and by adopting such a configuration, it is possible to use only the general machining method (lathe machining method, milling method and milling method) which is cost-effective. It has become possible to manufacture strained structures.

On the other hand, in the multi-axial force detection sensor using this flexure element structure, the first group deformation detection section, the second group compound deformation detection section and the third group compound deformation detection section of the flexure element structure are used. The required number of strain gauges are attached to each, and the amount of deformation that occurs in the three types of deformation detectors is detected using electrical work that simply configures each strain gauge into a Wheatstone bridge circuit. Direction force components F _X , F _Y ,
It has become possible to measure F _Z and moment components around the three axes with high output and with high accuracy without being interfered by other force components and moment components.

Therefore, when the present invention is used, it is possible to significantly improve the manufacturing efficiency while reducing the cost, and further, under the condition that a large amount of output from each strain gauge can be obtained. Force component F _X ,
It is possible to provide a new strain-generating body structure capable of separating only F _Y , F _{Z and a} moment component around an axis to detect with high accuracy, and a multi-axis force detection sensor using the strain-generating body structure. . Could be realized.

[Brief description of drawings]

FIG. 1 is a perspective view showing the overall configuration of a first embodiment of a multi-axis force detection sensor according to the present invention.

FIG. 2 shows a detailed configuration of four columnar flexure members when the flat flexure member is removed from the multi-axis force detection sensor in the posture shown in FIG. 1 and viewed from the same direction as FIG. It is a same direction perspective view.

FIG. 3 is a reverse perspective view showing a detailed configuration of four columnar flexure members when viewed from a direction opposite to the posture shown in FIG. 2 by 180 degrees.

FIG. 4 is a view of the multi-axis force detection sensor in the posture shown in FIG.
It is the same direction perspective view which shows the detailed structure of the flat plate-shaped strain body member when the part below the intermediate part of the columnar strain body member of this book is removed, and it sees from the same direction as FIG.

FIG. 5: X applied to the load introducing part of the multi-axis force detection sensor
It is a circuit diagram which shows 1st Example of the Wheatstone bridge circuit for detecting the force component of an axial direction.

FIG. 6 is a diagram showing Y applied to a load introducing portion of a multi-axis force detection sensor.
It is a circuit diagram which shows 1st Example of the Wheatstone bridge circuit for detecting the force component of an axial direction.

FIG. 7 is Z applied to the load introducing portion of the multi-axis force detection sensor.
It is a circuit diagram which shows 1st Example of the Wheatstone bridge circuit for detecting the force component of an axial direction.

FIG. 8 is an X given to a load introducing portion of the multi-axis force detection sensor.
It is a circuit diagram which shows the 1st Example of the Wheatstone bridge circuit for detecting the moment component around an axis.

FIG. 9: Y applied to the load introducing portion of the multi-axis force detection sensor
It is a circuit diagram which shows the 1st Example of the Wheatstone bridge circuit for detecting the moment component around an axis.

FIG. 10 is a circuit diagram showing a first embodiment of a Wheatstone bridge circuit for detecting a moment component around the Z axis applied to the load introducing portion of the multi-axis force detection sensor.

FIG. 11 is a state explanatory view showing a deformed state of the multi-axis force detection sensor when a force component F _X in the X-axis direction is applied to the load introducing portion.

FIG. 12 is a state explanatory view showing a deformed state of the multi-axis force detection sensor when a force component F _Y in the Y-axis direction is applied to the load introducing portion.

FIG. 13 is a state explanatory view showing a deformed state of the multi-axis force detection sensor when a force component F _Z in the Z-axis direction is applied to the load introducing portion.

FIG. 14 is a moment component M _X around the X axis at the load introducing portion.
It is a state explanatory view showing a deformed state of the multi-axis force detection sensor when is given.

FIG. 15: Moment component M _Y around the Y axis at the load introducing part
It is a state explanatory view showing a deformed state of the multi-axis force detection sensor when is given.

FIG. 16 is a moment component M _Z around the Z axis at the load introducing portion.
FIG. 8 is a side view of the state explanatory view showing the deformed state of the multi-axis force detection sensor when is given.

FIG. 17 is a moment component M _Z around the Z axis at the load introducing portion.
FIG. 9 is a plan view of the state explanatory view showing the deformed state of the multi-axis force detection sensor when is given.

FIG. 18 is a circuit diagram which constitutes a second embodiment of the present invention and is a circuit diagram showing a method of connecting strain gauges when constructing a Wheatstone bridge circuit for detecting a force component F _X in the X-axis direction. Is.

FIG. 19 is another circuit diagram constituting the second embodiment of the present invention, showing a connecting method of strain gauges when constructing a Wheatstone bridge circuit for detecting a force component F _Y in the Y-axis direction. It is a circuit diagram.

FIG. 20 is one of the circuit diagram groups constituting the third embodiment of the present invention, and is a method for connecting strain gauges when a Wheatstone bridge circuit for detecting a force component F _Z in the Z-axis direction is constructed. It is a circuit diagram which shows an example.

FIG. 21 is another one of the circuit diagram groups constituting the third embodiment of the present invention, which is a method of connecting a strain gauge when forming a Wheatstone bridge circuit for detecting a force component F _Z in the Z-axis direction. FIG. 8 is a circuit diagram showing another modified example of FIG.

FIG. 22 is another one of the circuit diagram groups constituting the third embodiment of the present invention, and is a method of connecting strain gauges when constructing a Wheatstone bridge circuit for detecting a force component F _Z in the Z-axis direction. It is a circuit diagram which shows another modification of.

FIG. 23 is another one of the circuit diagram groups constituting the third embodiment of the present invention, and is a method of connecting a strain gauge when forming a Wheatstone bridge circuit for detecting a force component F _Z in the Z-axis direction. It is a circuit diagram which shows another modification of.

FIG. 24 is another one of the circuit diagram groups constituting the third embodiment of the present invention, which is a method of connecting strain gauges when constructing a Wheatstone bridge circuit for detecting a force component F _Z in the Z-axis direction. It is a circuit diagram which shows another modification of.

FIG. 25 is another one of the circuit diagram groups constituting the third embodiment of the present invention, which is a connecting method of strain gauges when forming a Wheatstone bridge circuit for detecting a force component F _Z in the Z-axis direction. It is a circuit diagram which shows another modification of.

FIG. 26 is one of the circuit diagram groups constituting the fourth embodiment of the present invention, and is an example of a connecting method of strain gauges when constructing a Wheatstone bridge circuit for detecting a moment component M _Z around the Z axis. It is a circuit diagram showing.

FIG. 27 is another one of the circuit diagram groups forming the fourth embodiment of the present invention, and is a connecting method of strain gauges when forming a Wheatstone bridge circuit for detecting a moment component M _Z around the Z axis. FIG. 8 is a circuit diagram showing another modified example of FIG.

FIG. 28 is another one of the circuit diagram groups forming the fourth embodiment of the present invention, and is a connecting method of strain gauges when forming a Wheatstone bridge circuit for detecting a moment component M _Z around the Z axis. It is a circuit diagram which shows another modification of.

FIG. 29 is another one of the circuit diagram groups forming the fourth embodiment of the present invention, and is a connecting method of strain gauges when forming a Wheatstone bridge circuit for detecting a moment component M _Z around the Z axis. It is a circuit diagram which shows another modification of.

FIG. 30 is another one of the circuit diagram groups forming the fourth embodiment of the present invention, and is a connecting method of strain gauges when forming a Wheatstone bridge circuit for detecting a moment component M _Z around the Z axis. It is a circuit diagram which shows another modification of.

FIG. 31 is a characteristic of an electric signal output from eight strain gauges used to detect a force component F _{X in} the X-axis direction and eight strain gauges used to detect a force component F _{Y in} the Y-axis direction. It is an output polarity relationship diagram which shows the property of the electric signal output from.

FIG. 32: 16 used for detection of force component F _{Z in} the Z-axis direction
Of the electrical signal output from each strain gauge and X
FIG. 9 is an output polarity relationship diagram showing the properties of electric signals output from eight strain gauges used to detect a moment component M _X around an axis.

FIG. 33 is a characteristic of an electric signal output from eight strain gauges used for detecting a moment component M _Y around the Y axis and 4 used for detecting a moment component M _Z around the Z axis.
It is an output polarity relationship diagram which shows the property of the electric signal output from each strain gauge.

34 is a force component F _X in the X-axis direction in the Wheatstone bridge circuit of the second embodiment shown in FIGS. 18 and 19. FIG.
FIG. 3 is an output polarity relationship diagram showing the property of an electric signal output from a strain gauge used for detection of and the property of an electric signal output from a strain gauge used for detection of a force component F _{Y in} the Y-axis direction.

FIG. 35 is a graph showing three characteristics of electric signals output from the strain gauge used for detecting the force component F _Z in the Z-axis direction in the three Wheatstone bridge circuits according to the third embodiment shown in FIGS. 20 to 22; It is a part of output polarity relationship diagram.

FIG. 36 is a graph showing three characteristics of electric signals output from the strain gauge used for detecting the force component F _Z in the Z-axis direction in the three Wheatstone bridge circuits according to the third embodiment shown in FIGS. 23 to 25; It is the rest of the output polarity relationship diagram.

FIG. 37 shows the characteristics of the electric signal output from the strain gauge used to detect the moment component M _Z around the Z axis in the five Wheatstone bridge circuits according to the fourth embodiment shown in FIGS. 26 to 5; FIG. 7 is a relation diagram of two output polarities.

[Explanation of symbols]

10 multi-axis force detection sensor P center point 11 pedestal member 12 flat plate strain member 12a load introduction part 121 first side 122 second side 123 third side 124 fourth side 13 first through groove 131 partial groove near X axis 132 Y-axis-side partial groove 14 Second through-groove 141 X-axis-side partial groove 142 Y-axis-side partial groove 15 Third through-groove 151 X-axis-side partial groove 152 Y-axis-side partial groove 16 Fourth through-groove 161 X-axis-side part Groove 162 Partial groove 21 near the Y-axis 21,22 Deformation portion perforation on the first side 23,24 Deformation portion perforation on the second side 25,26 Deformation portion perforation on the third side 27,28 Deformation portion perforation on the fourth side 31,32 First side thin portion 33,34 Second side thin portion 35,36 Third side thin portion 37,38 Fourth side thin portion 41 First columnar flexure member 42 Second columnar flexure member 43 Third columnar rise Distortion member 44 Fourth columnar strain element Member 45-48 Lower deformation part perforation 451,452 First pillar lower thin part 461,462 Second pillar lower thin part 471,472 Third pillar lower thin part 481,482 Fourth pillar lower thin part 51-54 Upper deformation part Perforation 511, 512 First pillar upper thin part 521, 522 Second pillar upper thin part 531, 532 Third pillar upper thin part 541, 542 Fourth pillar upper thin part 1 _b-3 and 1 _b-4 , 2 _{b- 3} and 2 _b-4 , 3 _b-1 and 3 _b-2 , 4
_b-1 and 4 _b-2 X-axis force component detection strain gauges 1 _a-1 , 1 _a-2 , 2 _a-1 , 2 _a-2 , 3 _a-1 , 3 _a-2 , 4
_a-1 , 4 _a-2 Y-axis force component detection strain gauges 5 _a-1 and 5 _a-2 , 5 _b-1 and 5 _b-2 , 6 _a-1 and 6 _a-2 , 6
_b-1 and 6 _b-2 , 7 _a-1 and 7 _a-2 , 7 _b-1 and 7 _b-2 , 8 _a-1
And 8 _a-2 , 8 _b-1 and 8 _b-2 Z-axis force component detection strain gauges 1 _a-3 , 1 _a-4 , 2 _a-3 , 2 _a-4 , 3 _a-3 , 3 _{a -4} , 4
_a-3 , 4 _a-4 Strain gauges for detecting moment component around X axis 1 _b-1 and 1 _{b-2 '} , 2 _b-1 and 2 _b-2' , 3 _b-3 and 3 _{b-4 '} , Four
_b-3 and 4 _{b-4 '} Strain gauge for detecting moment component around Y axis 1 _b-2 , 2 _b-2 , 3 _b-4 , 4 _b-4 Strain gauge for detecting moment component around Z axis

Front page continuation (72) Inventor Sakae Chiba 3-5 Chofugaoka, Chofu-shi, Tokyo 1-share company within Kyowa Denki (72) Inventor Hisako Tanaka 3-5 Chofugaoka, Chofu-shi, Tokyo 1 share Inside the company Kyowa Denki (72) Inventor Tatsuo Makishi 3-5 Chofugaoka, Chofu-shi, Tokyo 1 share Company Inside the company Kyowa Denki

Claims (4)

[Claims] 1. An X-axis and a Y-axis set so as to be orthogonal to each other through a center point of a multi-axis force detection sensor, and the X-axis and the Y-axis.
A Z-axis that is set so as to pass through the intersection of the axis and the Y-axis and intersect perpendicularly to the plane including the X-axis and the Y-axis, and the directions of the X-axis, the Y-axis, and the Z-axis, respectively. In a strain-flexing body structure forming a base body of a multi-axis force detection sensor for measuring a force component applied to the and a moment component about an axis about the X-axis, the Y-axis, and the Z-axis. The above-mentioned Z is provided as a constituent member and is connected to one side of the object to be measured.
A thick plate-shaped pedestal member provided so as to be positioned on the axis, and provided as a member that constitutes another part of the strain-flexing structure, and for coupling with the other side of the measured object. Each of the two Z-axis members is provided so as to be parallel to the pedestal member at a predetermined distance in the Z-axis, and is set at positions equidistant from the Z-axis and orthogonal to the X-axis. There are four sides of a substantially regular quadrangle, each side and two sides that are equidistant from the Z axis and that are set at positions orthogonal to the Y axis, and a load is applied on the Z axis. A flat plate-shaped flexure member formed so as to have an introduction part, and provided as a member that constitutes still another part of the flexure structure, and the pedestal member and the flat-plate flexure member From the X-axis and the Y-axis to connect between Re each of the Z to the position of the symmetrical four positions each other with respect to a to and the Z-axis at a position equidistant increments
Along the axis, provided so as to be parallel to each other, and each has a substantially regular quadrangular cross-sectional shape having four sides that are respectively parallel to the four sides of the regular quadrilateral of the plate-shaped flexure member. The four columnar flexure members formed, and the Z in the four side regions of the flat flexure member.
It is provided in a region symmetrical with respect to the axis, and when the load introducing portion is applied with an external force in the Z-axis direction, each bends in parallel, and at least the load introducing portion has the X-direction.
It has a parallel plate structure that acts as a rigid body when an external force is applied in the axial direction and the Y-axis direction, and a pair is provided on each side across the X-axis and the Y-axis. When the external force in the X-axis direction is applied to the load introducing section, the first group deformation detecting section and the four columnar strain generating element members are respectively bent in parallel, and at least the above A second group composite deformation detection unit provided as a deformation detection unit of a parallel plate structure that acts as a rigid body when an external force is applied to the load introduction unit in the Y-axis direction and the Z-axis direction, respectively. And, when an external force in the Y-axis direction is applied to the load introducing portion, each of the four columnar flexure members is bent in parallel, and at least the load introducing portion is provided in the X-axis direction. And a third group composite deformation detection unit provided as a deformation detection unit having a parallel plate structure, each of which acts as a rigid portion when an external force in the Z-axis direction is applied. A strain-generating body structure of a multi-axis force detection sensor characterized by the above. 2. The flexure body structure of the multiaxial force detection sensor according to claim 1, wherein the four columnar flexure body members are parallel to the Y-axis at a position near one end in the longitudinal direction. The second group composite deformation detecting portion is provided by forming a thin strain element by punching a through-hole, while a portion of the four columnar strain element body members near the other end in the longitudinal direction, A strain-generating body structure for a multi-axis force detection sensor, wherein the third group composite deformation detecting portion is provided by forming a thin strain-generating portion by forming a through hole parallel to the X axis. 3. An X-axis and a Y-axis set to pass through the center point of the multi-axis force detection sensor so as to be orthogonal to each other, and the X-axis and the Y-axis.
A Z-axis that is set so as to pass through the intersection of the axis and the Y-axis and intersect perpendicularly to the plane including the X-axis and the Y-axis, and the directions of the X-axis, the Y-axis, and the Z-axis, respectively. In the multi-axis force detection sensor for measuring the force component applied to the multi-axis force and these axial moment components related to the X-axis, Y-axis, and Z-axis, And a thick plate-shaped pedestal member provided so as to be located on the Z-axis so as to be coupled to one side of the object to be measured, and constitutes another part of the flexure body structure. It is provided as a member and is provided so as to be parallel to the pedestal member at a predetermined interval in the Z-axis so as to be coupled to the other side of the object to be measured, and further at equal intervals from the Z-axis. A position which is orthogonal to the X axis. And two sides, has a substantially positive quadrilateral quadrilateral consisting of the two sides are set to a position perpendicular to the Z-axis, respectively and the Y axis an equidistant position from, moreover, the Z
A flat plate-shaped flexure element member formed so as to have a load introduction portion on an axis, and provided as a member that constitutes still another part of the flexure element structure, and the pedestal member and the flat plate shape In order to connect with the strain-flexing member, the Z-axis is provided at four positions that are equidistant from the X-axis and the Y-axis and are symmetrical to each other with respect to the Z-axis.
Formed in parallel with each other along the axis, and each having a substantially regular quadrangular cross-sectional shape having four sides positioned parallel to the four sides of the regular quadrilateral of the plate-shaped strain body member. Four columnar flexure members, and the Z in the region of the four sides of the flat plate flexure member.
It is provided in a region symmetrical with respect to the axis, and when the load introducing portion is applied with an external force in the Z-axis direction, each bends in parallel, and at least the load introducing portion has the X-direction.
It has a parallel plate structure that acts as a rigid body when an external force is applied in the axial direction and the Y-axis direction, and a pair is provided on each side across the X-axis and the Y-axis. When the external force in the X-axis direction is applied to the load introducing section, the first group deformation detecting section and the four columnar strain generating element members are respectively bent in parallel, and at least the above A second group composite deformation detection unit provided as a deformation detection unit of a parallel plate structure that acts as a rigid body when an external force is applied to the load introduction unit in the Y-axis direction and the Z-axis direction, respectively. And when each of the four columnar flexure members is flexed in parallel when an external force of the Y axis is applied to the load introducing portion, and at least the load introducing portion has the X-direction.
A third group composite deformation detecting section provided as a deformation detecting section of a parallel plate structure that acts as a rigid body when an external force is applied in the axial direction and the Z-axis direction, respectively; A multi-axis force detection sensor, comprising: a deformation detecting section; a plurality of strain gauges attached to each of the second group composite deformation detecting section and the third group composite deformation detecting section. 4. The multi-axis force detection sensor according to claim 3, wherein a plurality of strain gauges attached to each of the first group deformation detection units are used to detect a force component in the Z-axis direction, The strain gauges attached to the second group composite deformation detection section and the third group composite deformation detection section are used to detect residual force components and moment components around the three axes. A multi-axis force detection sensor.