JPS58204375A - 基板の絶縁導通判定装置 - Google Patents
基板の絶縁導通判定装置Info
- Publication number
- JPS58204375A JPS58204375A JP57087165A JP8716582A JPS58204375A JP S58204375 A JPS58204375 A JP S58204375A JP 57087165 A JP57087165 A JP 57087165A JP 8716582 A JP8716582 A JP 8716582A JP S58204375 A JPS58204375 A JP S58204375A
- Authority
- JP
- Japan
- Prior art keywords
- board
- substrate
- terminal
- probe
- registered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57087165A JPS58204375A (ja) | 1982-05-22 | 1982-05-22 | 基板の絶縁導通判定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57087165A JPS58204375A (ja) | 1982-05-22 | 1982-05-22 | 基板の絶縁導通判定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58204375A true JPS58204375A (ja) | 1983-11-29 |
| JPH0343591B2 JPH0343591B2 (enrdf_load_stackoverflow) | 1991-07-03 |
Family
ID=13907371
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57087165A Granted JPS58204375A (ja) | 1982-05-22 | 1982-05-22 | 基板の絶縁導通判定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58204375A (enrdf_load_stackoverflow) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5572210A (en) * | 1978-11-22 | 1980-05-30 | Fujitsu Ltd | Drive control system for circuit testing prober |
| JPS55160866A (en) * | 1979-05-30 | 1980-12-15 | Asahi Denki Seisakusho:Kk | Device for deciding short-circuit and disconnection |
-
1982
- 1982-05-22 JP JP57087165A patent/JPS58204375A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5572210A (en) * | 1978-11-22 | 1980-05-30 | Fujitsu Ltd | Drive control system for circuit testing prober |
| JPS55160866A (en) * | 1979-05-30 | 1980-12-15 | Asahi Denki Seisakusho:Kk | Device for deciding short-circuit and disconnection |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0343591B2 (enrdf_load_stackoverflow) | 1991-07-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4997127B2 (ja) | 検査方法及びこの検査方法を記録したプログラム記録媒体 | |
| JP4939156B2 (ja) | 位置合わせ対象物の再登録方法及びその方法を記録した記録媒体 | |
| JP2986142B2 (ja) | プローブ方法 | |
| US5124931A (en) | Method of inspecting electric characteristics of wafers and apparatus therefor | |
| JPS58204375A (ja) | 基板の絶縁導通判定装置 | |
| WO2017200324A1 (ko) | 기판 결함 검사 장치 및 이를 이용한 검사 방법 | |
| KR100820752B1 (ko) | 평판표시소자의 프로브 검사장치 및 이를 이용한 프로브검사방법 | |
| EP0309109B1 (en) | Testing process for electronic devices | |
| JPH0441495B2 (enrdf_load_stackoverflow) | ||
| JPH0317106B2 (enrdf_load_stackoverflow) | ||
| TWI784088B (zh) | 電子半導體組件之光學表示方法及裝置 | |
| JPH09230005A (ja) | 回路基板検査装置 | |
| JPH065690B2 (ja) | 半導体ウエハプローブ方法 | |
| US5023557A (en) | Testing process for electronic devices | |
| JP3034583B2 (ja) | プローブ移動式回路基板検査装置用検査順設定装置 | |
| JPH09199553A (ja) | プローブ方法 | |
| JPH0750730B2 (ja) | プロ−ブ装置 | |
| KR0139025B1 (ko) | 웨이퍼의 전기특성 검사 방법 및 그 장치 | |
| JPH02137347A (ja) | 位置合わせ方法 | |
| JPS6020917B2 (ja) | 電極検査装置 | |
| JPH06232224A (ja) | プローブ装置 | |
| JPH09213757A (ja) | ウエハプローブ容易化方法 | |
| JPH06294817A (ja) | プローブカード | |
| JPH07280868A (ja) | セラミック基板の配線パターン検査装置と方法 | |
| JP2726899B2 (ja) | プローブ装置 |