JPS58202767A - ラツピング用治具 - Google Patents

ラツピング用治具

Info

Publication number
JPS58202767A
JPS58202767A JP57081677A JP8167782A JPS58202767A JP S58202767 A JPS58202767 A JP S58202767A JP 57081677 A JP57081677 A JP 57081677A JP 8167782 A JP8167782 A JP 8167782A JP S58202767 A JPS58202767 A JP S58202767A
Authority
JP
Japan
Prior art keywords
wrapping
substrate
ring
face
jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57081677A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0323305B2 (enrdf_load_stackoverflow
Inventor
Shuji Sasaki
修二 佐々木
Giichi Sugita
杉田　義一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Tungsten Co Ltd
Original Assignee
Tokyo Tungsten Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Tungsten Co Ltd filed Critical Tokyo Tungsten Co Ltd
Priority to JP57081677A priority Critical patent/JPS58202767A/ja
Publication of JPS58202767A publication Critical patent/JPS58202767A/ja
Publication of JPH0323305B2 publication Critical patent/JPH0323305B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP57081677A 1982-05-17 1982-05-17 ラツピング用治具 Granted JPS58202767A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57081677A JPS58202767A (ja) 1982-05-17 1982-05-17 ラツピング用治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57081677A JPS58202767A (ja) 1982-05-17 1982-05-17 ラツピング用治具

Publications (2)

Publication Number Publication Date
JPS58202767A true JPS58202767A (ja) 1983-11-26
JPH0323305B2 JPH0323305B2 (enrdf_load_stackoverflow) 1991-03-28

Family

ID=13752978

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57081677A Granted JPS58202767A (ja) 1982-05-17 1982-05-17 ラツピング用治具

Country Status (1)

Country Link
JP (1) JPS58202767A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2677293A1 (fr) * 1991-06-06 1992-12-11 Commissariat Energie Atomique Machine de polissage a tete support de plaquettes perfectionnee.

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52130095A (en) * 1976-04-26 1977-11-01 Hitachi Ltd Method of grinding and polishing plate-line articles

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52130095A (en) * 1976-04-26 1977-11-01 Hitachi Ltd Method of grinding and polishing plate-line articles

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2677293A1 (fr) * 1991-06-06 1992-12-11 Commissariat Energie Atomique Machine de polissage a tete support de plaquettes perfectionnee.

Also Published As

Publication number Publication date
JPH0323305B2 (enrdf_load_stackoverflow) 1991-03-28

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