JPS58188959U - variable slit device - Google Patents
variable slit deviceInfo
- Publication number
- JPS58188959U JPS58188959U JP8702082U JP8702082U JPS58188959U JP S58188959 U JPS58188959 U JP S58188959U JP 8702082 U JP8702082 U JP 8702082U JP 8702082 U JP8702082 U JP 8702082U JP S58188959 U JPS58188959 U JP S58188959U
- Authority
- JP
- Japan
- Prior art keywords
- slit
- holders
- slit device
- variable slit
- moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図はエネルギ分析器の概略図、第２図は電子線強度
とエネルギの関係を示す図、第３図は本考案の一実施例
を示す断面図、第４図はスリット板の断面略図、第５図
は移動軸の先端部の拡矢図、第６図は移動軸が移動した
場合のスリット幅の変化を示す図、第７図は本考案の他
の実施例を示す図である。
１：試料、２：電子線、３：透過電子線、４：アナライ
ザ、５ニスリツト装置、６：検出器、１０：鏡筒、１１
ニスリット保持体、１２ａｂ １２ａ２． １２ｂ１
゜１２ｂ２：板イくネ、１３ａ、１３ｂ：ホルダ、１４
ａ。
１４ｂ＝スリツト板、１５：移動軸、１６：コイルバネ
、１７：制御棒。Fig. 1 is a schematic diagram of an energy analyzer, Fig. 2 is a diagram showing the relationship between electron beam intensity and energy, Fig. 3 is a cross-sectional view showing an embodiment of the present invention, and Fig. 4 is a schematic cross-sectional diagram of a slit plate. , FIG. 5 is an enlarged view of the tip of the moving shaft, FIG. 6 is a diagram showing changes in slit width when the moving shaft is moved, and FIG. 7 is a diagram showing another embodiment of the present invention. . 1: Sample, 2: Electron beam, 3: Transmission electron beam, 4: Analyzer, 5 Nisritt device, 6: Detector, 10: Lens barrel, 11
Nislit holder, 12ab 12a2. 12b1
゜12b2: Board, 13a, 13b: Holder, 14
a. 14b=slit plate, 15: moving shaft, 16: coil spring, 17: control rod.
Claims (1)
と、各スリット板のスリット形成用のスリット辺が常に
Ｘ方向と平行を保ちつつそのｙ方向位置を規制する二つ
のスリットホルダど、該両ホルダと当接しＸ方向に移動
することによって前記各スリット辺のｙ方向間隔Ｓを可
変するための移動軸とを備えた装置において、前記移動
軸の移動量△×に対する前記各スリット辺のｙ方向移動
量△ｙの比Δｙ／Δ×がＳの値の増加に従って太き（な
るよう構成したことを特徴とする゛可変スリット装置シTwo slit plates provided in the xy plane perpendicular to the axis Z, and two slit holders that regulate the position of the slit in the y direction while keeping the slit side of each slit plate parallel to the x direction. , a moving axis for varying the distance S in the y direction between the respective slit sides by contacting both the holders and moving in the X direction, wherein each of the slit sides is adjusted relative to the amount of movement Δ× of the moving axis. A variable slit device system characterized in that the ratio Δy/Δ× of the y-direction movement amount Δy becomes thicker as the value of S increases.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8702082U JPS58188959U (en) | 1982-06-11 | 1982-06-11 | variable slit device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8702082U JPS58188959U (en) | 1982-06-11 | 1982-06-11 | variable slit device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58188959U true JPS58188959U (en) | 1983-12-15 |
| JPS6242444Y2 JPS6242444Y2 (en) | 1987-10-30 |
Family
ID=30095772
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8702082U Granted JPS58188959U (en) | 1982-06-11 | 1982-06-11 | variable slit device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58188959U (en) |
-
1982
- 1982-06-11 JP JP8702082U patent/JPS58188959U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6242444Y2 (en) | 1987-10-30 |
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