JPS58185428A - 光電部材 - Google Patents

光電部材

Info

Publication number
JPS58185428A
JPS58185428A JP6647782A JP6647782A JPS58185428A JP S58185428 A JPS58185428 A JP S58185428A JP 6647782 A JP6647782 A JP 6647782A JP 6647782 A JP6647782 A JP 6647782A JP S58185428 A JPS58185428 A JP S58185428A
Authority
JP
Japan
Prior art keywords
amorphous silicon
film
gas
silicon layer
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6647782A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6235473B2 (enExample
Inventor
Noboru Ebara
江原　襄
Yoshimi Kojima
小島　義己
Eiji Imada
今田　英治
Toshiro Matsuyama
松山　外志郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP6647782A priority Critical patent/JPS58185428A/ja
Publication of JPS58185428A publication Critical patent/JPS58185428A/ja
Publication of JPS6235473B2 publication Critical patent/JPS6235473B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C23C16/029—Graded interfaces

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
  • Formation Of Insulating Films (AREA)
JP6647782A 1982-04-20 1982-04-20 光電部材 Granted JPS58185428A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6647782A JPS58185428A (ja) 1982-04-20 1982-04-20 光電部材

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6647782A JPS58185428A (ja) 1982-04-20 1982-04-20 光電部材

Publications (2)

Publication Number Publication Date
JPS58185428A true JPS58185428A (ja) 1983-10-29
JPS6235473B2 JPS6235473B2 (enExample) 1987-08-01

Family

ID=13316893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6647782A Granted JPS58185428A (ja) 1982-04-20 1982-04-20 光電部材

Country Status (1)

Country Link
JP (1) JPS58185428A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61188963A (ja) * 1985-02-18 1986-08-22 Matsushita Electric Ind Co Ltd 半導体デバイス
JPS646901A (en) * 1987-06-29 1989-01-11 Nissin Electric Co Ltd Protective film for optical purpose

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61188963A (ja) * 1985-02-18 1986-08-22 Matsushita Electric Ind Co Ltd 半導体デバイス
JPS646901A (en) * 1987-06-29 1989-01-11 Nissin Electric Co Ltd Protective film for optical purpose

Also Published As

Publication number Publication date
JPS6235473B2 (enExample) 1987-08-01

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