JPS58181864A - 表面処理方法 - Google Patents

表面処理方法

Info

Publication number
JPS58181864A
JPS58181864A JP6450782A JP6450782A JPS58181864A JP S58181864 A JPS58181864 A JP S58181864A JP 6450782 A JP6450782 A JP 6450782A JP 6450782 A JP6450782 A JP 6450782A JP S58181864 A JPS58181864 A JP S58181864A
Authority
JP
Japan
Prior art keywords
ions
metal
treatment method
surface treatment
implanted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6450782A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6157904B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Yasuhiro Shimizu
靖弘 清水
Akira Doi
陽 土居
Naoharu Fujimori
直治 藤森
Kunihiro Takahashi
邦博 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP6450782A priority Critical patent/JPS58181864A/ja
Publication of JPS58181864A publication Critical patent/JPS58181864A/ja
Publication of JPS6157904B2 publication Critical patent/JPS6157904B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/48—Ion implantation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP6450782A 1982-04-16 1982-04-16 表面処理方法 Granted JPS58181864A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6450782A JPS58181864A (ja) 1982-04-16 1982-04-16 表面処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6450782A JPS58181864A (ja) 1982-04-16 1982-04-16 表面処理方法

Publications (2)

Publication Number Publication Date
JPS58181864A true JPS58181864A (ja) 1983-10-24
JPS6157904B2 JPS6157904B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-12-09

Family

ID=13260177

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6450782A Granted JPS58181864A (ja) 1982-04-16 1982-04-16 表面処理方法

Country Status (1)

Country Link
JP (1) JPS58181864A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60103179A (ja) * 1983-11-11 1985-06-07 Toyota Motor Corp 鋼板部品の局部強度向上方法
JPS60103180A (ja) * 1983-11-11 1985-06-07 Toyota Motor Corp 鋼板部品の局部強度向上方法
JPS62199763A (ja) * 1986-02-25 1987-09-03 Matsushita Electric Works Ltd ＴｉＮ膜の形成法
JPS62202074A (ja) * 1986-02-28 1987-09-05 Hitachi Ltd イオン注入処理による切削工具の長寿命化方法
JPS62213920A (ja) * 1986-03-14 1987-09-19 Hitachi Ltd イオン注入処理したタツプ
JPS6345479A (ja) * 1986-08-09 1988-02-26 Hitachi Ltd 斜板式圧縮機
JPS6341419U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1986-09-03 1988-03-18
JPS6362873A (ja) * 1986-09-03 1988-03-19 Hitachi Ltd イオン注入処理した切削工具
JPS63195265A (ja) * 1987-02-10 1988-08-12 Nippon Steel Corp 高エネルギ−ビ−ムによるロ−ルおよび鋼材表面の加工方法および装置
JPS63255357A (ja) * 1987-04-09 1988-10-21 Hitachi Ltd タ−ビン動翼とその製造方法
KR20030073693A (ko) * 2002-03-12 2003-09-19 (주) 유니플라텍 혼합이온주입을 이용한 공구의 내마모성 향상기술

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01254995A (ja) * 1988-04-05 1989-10-11 Toshiba Corp ディスプレイ調節装置

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60103179A (ja) * 1983-11-11 1985-06-07 Toyota Motor Corp 鋼板部品の局部強度向上方法
JPS60103180A (ja) * 1983-11-11 1985-06-07 Toyota Motor Corp 鋼板部品の局部強度向上方法
JPS62199763A (ja) * 1986-02-25 1987-09-03 Matsushita Electric Works Ltd ＴｉＮ膜の形成法
JPS62202074A (ja) * 1986-02-28 1987-09-05 Hitachi Ltd イオン注入処理による切削工具の長寿命化方法
JPS62213920A (ja) * 1986-03-14 1987-09-19 Hitachi Ltd イオン注入処理したタツプ
JPS6345479A (ja) * 1986-08-09 1988-02-26 Hitachi Ltd 斜板式圧縮機
JPS6341419U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1986-09-03 1988-03-18
JPS6362873A (ja) * 1986-09-03 1988-03-19 Hitachi Ltd イオン注入処理した切削工具
JPS63195265A (ja) * 1987-02-10 1988-08-12 Nippon Steel Corp 高エネルギ−ビ−ムによるロ−ルおよび鋼材表面の加工方法および装置
JPS63255357A (ja) * 1987-04-09 1988-10-21 Hitachi Ltd タ−ビン動翼とその製造方法
KR20030073693A (ko) * 2002-03-12 2003-09-19 (주) 유니플라텍 혼합이온주입을 이용한 공구의 내마모성 향상기술

Also Published As

Publication number Publication date
JPS6157904B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-12-09

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