JPS58180002A - 厚膜湿度センサ製造方法 - Google Patents

厚膜湿度センサ製造方法

Info

Publication number
JPS58180002A
JPS58180002A JP57062397A JP6239782A JPS58180002A JP S58180002 A JPS58180002 A JP S58180002A JP 57062397 A JP57062397 A JP 57062397A JP 6239782 A JP6239782 A JP 6239782A JP S58180002 A JPS58180002 A JP S58180002A
Authority
JP
Japan
Prior art keywords
thick film
moisture
added
humidity
moisture sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57062397A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6355767B2 (enrdf_load_stackoverflow
Inventor
信夫 佐藤
昭一 岩永
昭 池上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57062397A priority Critical patent/JPS58180002A/ja
Publication of JPS58180002A publication Critical patent/JPS58180002A/ja
Publication of JPS6355767B2 publication Critical patent/JPS6355767B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Non-Adjustable Resistors (AREA)
JP57062397A 1982-04-16 1982-04-16 厚膜湿度センサ製造方法 Granted JPS58180002A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57062397A JPS58180002A (ja) 1982-04-16 1982-04-16 厚膜湿度センサ製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57062397A JPS58180002A (ja) 1982-04-16 1982-04-16 厚膜湿度センサ製造方法

Publications (2)

Publication Number Publication Date
JPS58180002A true JPS58180002A (ja) 1983-10-21
JPS6355767B2 JPS6355767B2 (enrdf_load_stackoverflow) 1988-11-04

Family

ID=13198957

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57062397A Granted JPS58180002A (ja) 1982-04-16 1982-04-16 厚膜湿度センサ製造方法

Country Status (1)

Country Link
JP (1) JPS58180002A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6355767B2 (enrdf_load_stackoverflow) 1988-11-04

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