JPS58176538A - 感湿抵抗素子 - Google Patents

感湿抵抗素子

Info

Publication number
JPS58176538A
JPS58176538A JP5995282A JP5995282A JPS58176538A JP S58176538 A JPS58176538 A JP S58176538A JP 5995282 A JP5995282 A JP 5995282A JP 5995282 A JP5995282 A JP 5995282A JP S58176538 A JPS58176538 A JP S58176538A
Authority
JP
Japan
Prior art keywords
sensitive
substrate
moisture
humidity
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5995282A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6140322B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Hideji Saneyoshi
実吉　秀治
Takashi Sugihara
孝志 杉原
Akihito Jinda
章仁 陣田
Masaya Yanagawa
正也 枅川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP5995282A priority Critical patent/JPS58176538A/ja
Publication of JPS58176538A publication Critical patent/JPS58176538A/ja
Publication of JPS6140322B2 publication Critical patent/JPS6140322B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP5995282A 1982-04-09 1982-04-09 感湿抵抗素子 Granted JPS58176538A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5995282A JPS58176538A (ja) 1982-04-09 1982-04-09 感湿抵抗素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5995282A JPS58176538A (ja) 1982-04-09 1982-04-09 感湿抵抗素子

Publications (2)

Publication Number Publication Date
JPS58176538A true JPS58176538A (ja) 1983-10-17
JPS6140322B2 JPS6140322B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-09-09

Family

ID=13127983

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5995282A Granted JPS58176538A (ja) 1982-04-09 1982-04-09 感湿抵抗素子

Country Status (1)

Country Link
JP (1) JPS58176538A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59142447A (ja) * 1983-02-04 1984-08-15 Japan Synthetic Rubber Co Ltd 湿度センサーの製造方法
EP1139092A3 (en) * 2000-03-31 2004-03-10 TDK Corporation Humidity sensor and method for making
US6730212B1 (en) 2000-10-03 2004-05-04 Hrl Laboratories, Llc Sensor for chemical and biological materials
US7008524B2 (en) 2000-10-03 2006-03-07 Hrl Laboratories, Llc Sensors with variable response behavior
WO2006015010A3 (en) * 2004-07-30 2006-07-20 Gen Electric Silane compositions, processes for their preparation and rubber compositions containing same
KR100640043B1 (ko) 2004-06-12 2006-10-30 공명선 고분자막 습도센서
US7368584B2 (en) 2006-08-14 2008-05-06 Momentive Performance Materials Inc. Mercapto-functional silane
US7504456B2 (en) 2006-02-21 2009-03-17 Momentive Performance Materials Inc. Rubber composition containing organofunctional silane
US7510670B2 (en) 2006-02-21 2009-03-31 Momentive Performance Materials Inc. Free flowing filler composition based on organofunctional silane
US7550540B2 (en) 2006-08-14 2009-06-23 Momentive Performance Materials Inc. Rubber composition and articles therefrom both comprising mercapto-functional silane
US7816435B2 (en) 2007-10-31 2010-10-19 Momentive Performance Materials Inc. Halo-functional silane, process for its preparation, rubber composition containing same and articles manufactured therefrom
US7919650B2 (en) 2006-02-21 2011-04-05 Momentive Performance Materials Inc. Organofunctional silanes and their mixtures

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59142447A (ja) * 1983-02-04 1984-08-15 Japan Synthetic Rubber Co Ltd 湿度センサーの製造方法
EP1139092A3 (en) * 2000-03-31 2004-03-10 TDK Corporation Humidity sensor and method for making
US6730212B1 (en) 2000-10-03 2004-05-04 Hrl Laboratories, Llc Sensor for chemical and biological materials
US7008524B2 (en) 2000-10-03 2006-03-07 Hrl Laboratories, Llc Sensors with variable response behavior
KR100640043B1 (ko) 2004-06-12 2006-10-30 공명선 고분자막 습도센서
US7531588B2 (en) 2004-07-30 2009-05-12 Momentive Performance Materials Inc. Silane compositions, processes for their preparation and rubber compositions containing same
WO2006015010A3 (en) * 2004-07-30 2006-07-20 Gen Electric Silane compositions, processes for their preparation and rubber compositions containing same
US7504456B2 (en) 2006-02-21 2009-03-17 Momentive Performance Materials Inc. Rubber composition containing organofunctional silane
US7510670B2 (en) 2006-02-21 2009-03-31 Momentive Performance Materials Inc. Free flowing filler composition based on organofunctional silane
US7919650B2 (en) 2006-02-21 2011-04-05 Momentive Performance Materials Inc. Organofunctional silanes and their mixtures
US7368584B2 (en) 2006-08-14 2008-05-06 Momentive Performance Materials Inc. Mercapto-functional silane
US7550540B2 (en) 2006-08-14 2009-06-23 Momentive Performance Materials Inc. Rubber composition and articles therefrom both comprising mercapto-functional silane
US7816435B2 (en) 2007-10-31 2010-10-19 Momentive Performance Materials Inc. Halo-functional silane, process for its preparation, rubber composition containing same and articles manufactured therefrom
US8372906B2 (en) 2007-10-31 2013-02-12 Momentive Performance Materials Inc. Halo-functional silane, process for its preparation, rubber composition containing same and articles manufactured therefrom

Also Published As

Publication number Publication date
JPS6140322B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-09-09

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