JPS58172207A - 窒化けい素の製造方法 - Google Patents

窒化けい素の製造方法

Info

Publication number
JPS58172207A
JPS58172207A JP57054179A JP5417982A JPS58172207A JP S58172207 A JPS58172207 A JP S58172207A JP 57054179 A JP57054179 A JP 57054179A JP 5417982 A JP5417982 A JP 5417982A JP S58172207 A JPS58172207 A JP S58172207A
Authority
JP
Japan
Prior art keywords
silicon
silicon nitride
halide
metal
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57054179A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6156161B2 (cg-RX-API-DMAC10.html
Inventor
Mitsuo Umemura
梅村　光雄
Yoshihiro Kubota
芳宏 久保田
Ryoji Iwai
良二 岩井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin-Etsu Chemical Co Ltd
Original Assignee
Shin-Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Chemical Co Ltd filed Critical Shin-Etsu Chemical Co Ltd
Priority to JP57054179A priority Critical patent/JPS58172207A/ja
Publication of JPS58172207A publication Critical patent/JPS58172207A/ja
Publication of JPS6156161B2 publication Critical patent/JPS6156161B2/ja
Granted legal-status Critical Current

Links

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  • Ceramic Products (AREA)
JP57054179A 1982-04-01 1982-04-01 窒化けい素の製造方法 Granted JPS58172207A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57054179A JPS58172207A (ja) 1982-04-01 1982-04-01 窒化けい素の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57054179A JPS58172207A (ja) 1982-04-01 1982-04-01 窒化けい素の製造方法

Publications (2)

Publication Number Publication Date
JPS58172207A true JPS58172207A (ja) 1983-10-11
JPS6156161B2 JPS6156161B2 (cg-RX-API-DMAC10.html) 1986-12-01

Family

ID=12963311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57054179A Granted JPS58172207A (ja) 1982-04-01 1982-04-01 窒化けい素の製造方法

Country Status (1)

Country Link
JP (1) JPS58172207A (cg-RX-API-DMAC10.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59107908A (ja) * 1982-12-08 1984-06-22 Toyo Soda Mfg Co Ltd 焼結性に優れた窒化珪素粉末の製造法
FR2616768A1 (fr) * 1987-06-22 1988-12-23 Basf Ag Nitrure de silicium amorphe en poudre, sa preparation et son utilisation

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53130300A (en) * 1977-04-20 1978-11-14 Kagaku Gijutsucho Mukizai Method of synthesizing silicon nitride or silicon imide
JPS54134098A (en) * 1978-04-11 1979-10-18 Asahi Glass Co Ltd Preparing silicon nitride

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53130300A (en) * 1977-04-20 1978-11-14 Kagaku Gijutsucho Mukizai Method of synthesizing silicon nitride or silicon imide
JPS54134098A (en) * 1978-04-11 1979-10-18 Asahi Glass Co Ltd Preparing silicon nitride

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59107908A (ja) * 1982-12-08 1984-06-22 Toyo Soda Mfg Co Ltd 焼結性に優れた窒化珪素粉末の製造法
FR2616768A1 (fr) * 1987-06-22 1988-12-23 Basf Ag Nitrure de silicium amorphe en poudre, sa preparation et son utilisation

Also Published As

Publication number Publication date
JPS6156161B2 (cg-RX-API-DMAC10.html) 1986-12-01

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