JPS58170001A - 感温装置 - Google Patents

感温装置

Info

Publication number
JPS58170001A
JPS58170001A JP5280682A JP5280682A JPS58170001A JP S58170001 A JPS58170001 A JP S58170001A JP 5280682 A JP5280682 A JP 5280682A JP 5280682 A JP5280682 A JP 5280682A JP S58170001 A JPS58170001 A JP S58170001A
Authority
JP
Japan
Prior art keywords
thin film
semiconductor thin
temperature
resistor
sensing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5280682A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0364811B2 (enExample
Inventor
古田土　節夫
杉浦　吾男
清 高橋
誠 小長井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP5280682A priority Critical patent/JPS58170001A/ja
Publication of JPS58170001A publication Critical patent/JPS58170001A/ja
Publication of JPH0364811B2 publication Critical patent/JPH0364811B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Thermistors And Varistors (AREA)
JP5280682A 1982-03-31 1982-03-31 感温装置 Granted JPS58170001A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5280682A JPS58170001A (ja) 1982-03-31 1982-03-31 感温装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5280682A JPS58170001A (ja) 1982-03-31 1982-03-31 感温装置

Publications (2)

Publication Number Publication Date
JPS58170001A true JPS58170001A (ja) 1983-10-06
JPH0364811B2 JPH0364811B2 (enExample) 1991-10-08

Family

ID=12925083

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5280682A Granted JPS58170001A (ja) 1982-03-31 1982-03-31 感温装置

Country Status (1)

Country Link
JP (1) JPS58170001A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62267629A (ja) * 1986-05-16 1987-11-20 Japan Atom Energy Res Inst 高磁場領域における極低温計測用温度計
US5426412A (en) * 1992-10-27 1995-06-20 Matsushita Electric Works, Ltd. Infrared detecting device and infrared detecting element for use in the device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5258579A (en) * 1975-11-10 1977-05-14 Hitachi Ltd Temperature detector
JPS5344072A (en) * 1976-10-04 1978-04-20 Tdk Corp Detector element

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5258579A (en) * 1975-11-10 1977-05-14 Hitachi Ltd Temperature detector
JPS5344072A (en) * 1976-10-04 1978-04-20 Tdk Corp Detector element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62267629A (ja) * 1986-05-16 1987-11-20 Japan Atom Energy Res Inst 高磁場領域における極低温計測用温度計
US5426412A (en) * 1992-10-27 1995-06-20 Matsushita Electric Works, Ltd. Infrared detecting device and infrared detecting element for use in the device

Also Published As

Publication number Publication date
JPH0364811B2 (enExample) 1991-10-08

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