JPS58168572U - 液相成長装置 - Google Patents

液相成長装置

Info

Publication number
JPS58168572U
JPS58168572U JP6582482U JP6582482U JPS58168572U JP S58168572 U JPS58168572 U JP S58168572U JP 6582482 U JP6582482 U JP 6582482U JP 6582482 U JP6582482 U JP 6582482U JP S58168572 U JPS58168572 U JP S58168572U
Authority
JP
Japan
Prior art keywords
liquid phase
phase growth
growth equipment
substrate holder
growth apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6582482U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6127976Y2 (enrdf_load_stackoverflow
Inventor
鷹箸　継典
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6582482U priority Critical patent/JPS58168572U/ja
Publication of JPS58168572U publication Critical patent/JPS58168572U/ja
Application granted granted Critical
Publication of JPS6127976Y2 publication Critical patent/JPS6127976Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP6582482U 1982-05-06 1982-05-06 液相成長装置 Granted JPS58168572U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6582482U JPS58168572U (ja) 1982-05-06 1982-05-06 液相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6582482U JPS58168572U (ja) 1982-05-06 1982-05-06 液相成長装置

Publications (2)

Publication Number Publication Date
JPS58168572U true JPS58168572U (ja) 1983-11-10
JPS6127976Y2 JPS6127976Y2 (enrdf_load_stackoverflow) 1986-08-20

Family

ID=30075757

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6582482U Granted JPS58168572U (ja) 1982-05-06 1982-05-06 液相成長装置

Country Status (1)

Country Link
JP (1) JPS58168572U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62197393A (ja) * 1986-02-24 1987-09-01 Hitachi Cable Ltd 液相エピタキシヤル成長方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62197393A (ja) * 1986-02-24 1987-09-01 Hitachi Cable Ltd 液相エピタキシヤル成長方法

Also Published As

Publication number Publication date
JPS6127976Y2 (enrdf_load_stackoverflow) 1986-08-20

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