JPS58168560U - プラズマｃｖｄ装置 - Google Patents

プラズマｃｖｄ装置

Info

Publication number
JPS58168560U
JPS58168560U JP6412682U JP6412682U JPS58168560U JP S58168560 U JPS58168560 U JP S58168560U JP 6412682 U JP6412682 U JP 6412682U JP 6412682 U JP6412682 U JP 6412682U JP S58168560 U JPS58168560 U JP S58168560U
Authority
JP
Japan
Prior art keywords
discharge field
plasma
plasma cvd
cvd equipment
plasma discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6412682U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6140771Y2 (enExample
Inventor
下井　三郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP6412682U priority Critical patent/JPS58168560U/ja
Publication of JPS58168560U publication Critical patent/JPS58168560U/ja
Application granted granted Critical
Publication of JPS6140771Y2 publication Critical patent/JPS6140771Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP6412682U 1982-04-30 1982-04-30 プラズマｃｖｄ装置 Granted JPS58168560U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6412682U JPS58168560U (ja) 1982-04-30 1982-04-30 プラズマｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6412682U JPS58168560U (ja) 1982-04-30 1982-04-30 プラズマｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS58168560U true JPS58168560U (ja) 1983-11-10
JPS6140771Y2 JPS6140771Y2 (enExample) 1986-11-20

Family

ID=30074174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6412682U Granted JPS58168560U (ja) 1982-04-30 1982-04-30 プラズマｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPS58168560U (enExample)

Also Published As

Publication number Publication date
JPS6140771Y2 (enExample) 1986-11-20

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