JPS58168253A - ウエハの回転保持具 - Google Patents

ウエハの回転保持具

Info

Publication number
JPS58168253A
JPS58168253A JP5240382A JP5240382A JPS58168253A JP S58168253 A JPS58168253 A JP S58168253A JP 5240382 A JP5240382 A JP 5240382A JP 5240382 A JP5240382 A JP 5240382A JP S58168253 A JPS58168253 A JP S58168253A
Authority
JP
Japan
Prior art keywords
rotating body
plate
air passage
center
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5240382A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6142421B2 (enExample
Inventor
Masaaki Sadamori
貞森　将昭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP5240382A priority Critical patent/JPS58168253A/ja
Publication of JPS58168253A publication Critical patent/JPS58168253A/ja
Publication of JPS6142421B2 publication Critical patent/JPS6142421B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Jigs For Machine Tools (AREA)
JP5240382A 1982-03-29 1982-03-29 ウエハの回転保持具 Granted JPS58168253A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5240382A JPS58168253A (ja) 1982-03-29 1982-03-29 ウエハの回転保持具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5240382A JPS58168253A (ja) 1982-03-29 1982-03-29 ウエハの回転保持具

Publications (2)

Publication Number Publication Date
JPS58168253A true JPS58168253A (ja) 1983-10-04
JPS6142421B2 JPS6142421B2 (enExample) 1986-09-20

Family

ID=12913824

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5240382A Granted JPS58168253A (ja) 1982-03-29 1982-03-29 ウエハの回転保持具

Country Status (1)

Country Link
JP (1) JPS58168253A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0595071A1 (en) * 1992-10-27 1994-05-04 Sumitomo Electric Industries, Limited Wafer holding apparatus for holding a wafer
US5370709A (en) * 1990-07-18 1994-12-06 Kabushiki Kaisha Toshiba Semiconductor wafer processing apparatus having a Bernoulli chuck

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5370709A (en) * 1990-07-18 1994-12-06 Kabushiki Kaisha Toshiba Semiconductor wafer processing apparatus having a Bernoulli chuck
EP0595071A1 (en) * 1992-10-27 1994-05-04 Sumitomo Electric Industries, Limited Wafer holding apparatus for holding a wafer

Also Published As

Publication number Publication date
JPS6142421B2 (enExample) 1986-09-20

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