JPS58167491A - 単結晶を溶融物から成長させる装置 - Google Patents
単結晶を溶融物から成長させる装置Info
- Publication number
- JPS58167491A JPS58167491A JP57048062A JP4806282A JPS58167491A JP S58167491 A JPS58167491 A JP S58167491A JP 57048062 A JP57048062 A JP 57048062A JP 4806282 A JP4806282 A JP 4806282A JP S58167491 A JPS58167491 A JP S58167491A
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- furnace
- rod
- nut
- melt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57048062A JPS58167491A (ja) | 1982-03-25 | 1982-03-25 | 単結晶を溶融物から成長させる装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57048062A JPS58167491A (ja) | 1982-03-25 | 1982-03-25 | 単結晶を溶融物から成長させる装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58167491A true JPS58167491A (ja) | 1983-10-03 |
| JPS6117796B2 JPS6117796B2 (cg-RX-API-DMAC7.html) | 1986-05-09 |
Family
ID=12792857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57048062A Granted JPS58167491A (ja) | 1982-03-25 | 1982-03-25 | 単結晶を溶融物から成長させる装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58167491A (cg-RX-API-DMAC7.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60195087A (ja) * | 1984-03-16 | 1985-10-03 | Hamamatsu Photonics Kk | 単結晶育成炉 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0388392U (cg-RX-API-DMAC7.html) * | 1989-12-25 | 1991-09-10 |
-
1982
- 1982-03-25 JP JP57048062A patent/JPS58167491A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60195087A (ja) * | 1984-03-16 | 1985-10-03 | Hamamatsu Photonics Kk | 単結晶育成炉 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6117796B2 (cg-RX-API-DMAC7.html) | 1986-05-09 |
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