JPS58162823A - 流動媒体の質量及び／又は温度を測定する測定センサ− - Google Patents
流動媒体の質量及び／又は温度を測定する測定センサ−Info
- Publication number
- JPS58162823A JPS58162823A JP58034712A JP3471283A JPS58162823A JP S58162823 A JPS58162823 A JP S58162823A JP 58034712 A JP58034712 A JP 58034712A JP 3471283 A JP3471283 A JP 3471283A JP S58162823 A JPS58162823 A JP S58162823A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- carrier
- measurement sensor
- resistance
- dependent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 title claims description 6
- 239000010410 layer Substances 0.000 claims description 31
- 230000001419 dependent effect Effects 0.000 claims description 22
- 238000005259 measurement Methods 0.000 claims description 19
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 8
- 229910052715 tantalum Inorganic materials 0.000 claims description 7
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 6
- 239000010936 titanium Substances 0.000 claims description 6
- 229910052719 titanium Inorganic materials 0.000 claims description 6
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 239000011241 protective layer Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 claims description 2
- 239000002356 single layer Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 230000006978 adaptation Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 235000002492 Rungia klossii Nutrition 0.000 description 1
- 244000117054 Rungia klossii Species 0.000 description 1
- 229910004154 TaNi Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003340 mental effect Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
- G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
- G01F1/692—Thin-film arrangements
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19823208096 DE3208096A1 (de) | 1982-03-06 | 1982-03-06 | Messsonde zur bestimmung der masse und/oder temperatur eines stroemenden mediums |
| DE32080964 | 1982-03-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58162823A true JPS58162823A (ja) | 1983-09-27 |
Family
ID=6157489
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58034712A Pending JPS58162823A (ja) | 1982-03-06 | 1983-03-04 | 流動媒体の質量及び／又は温度を測定する測定センサ− |
Country Status (4)
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60152928U (ja) * | 1984-03-22 | 1985-10-11 | 日本電子機器株式会社 | 熱線式流量計 |
| JPWO2008149887A1 (ja) * | 2007-06-06 | 2010-08-26 | 株式会社 女性医療研究所 | 骨盤臓器脱防止及び治療装置 |
Families Citing this family (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4691566A (en) * | 1984-12-07 | 1987-09-08 | Aine Harry E | Immersed thermal fluid flow sensor |
| US4790181A (en) * | 1983-12-01 | 1988-12-13 | Aine Harry E | Thermal mass flow meter and method of making same |
| DE3515206A1 (de) * | 1984-04-26 | 1985-10-31 | Nippon Soken, Inc., Nishio, Aichi | Direkt-beheizte gasstroemungs-messvorrichtung |
| JPS60236024A (ja) * | 1984-05-09 | 1985-11-22 | Nippon Soken Inc | 直熱型空気流量センサ |
| US4576050A (en) * | 1984-08-29 | 1986-03-18 | General Motors Corporation | Thermal diffusion fluid flow sensor |
| US4594889A (en) * | 1984-12-06 | 1986-06-17 | Ford Motor Company | Mass airflow sensor |
| JPS61178614A (ja) * | 1985-02-02 | 1986-08-11 | Nippon Soken Inc | 直熱型流量センサ |
| DE3604202C2 (de) * | 1985-02-14 | 1997-01-09 | Nippon Denso Co | Direkt beheizte Strömungsmeßvorrichtung |
| US4609913A (en) * | 1985-02-22 | 1986-09-02 | Wickes Manufacturing Company | Fluid level sensor |
| WO1987000917A1 (en) * | 1985-08-09 | 1987-02-12 | Motorola, Inc. | Mass airflow sensor |
| US4776214A (en) * | 1985-08-09 | 1988-10-11 | Motorola, Inc. | Mass air flow sensor |
| JPS62123318A (ja) * | 1985-08-13 | 1987-06-04 | Nippon Soken Inc | 直熱型流量センサ |
| DE3542788A1 (de) * | 1985-12-04 | 1987-06-19 | Degussa | Vorrichtung zur thermischen massenstrommessung von gasen und fluessigkeiten |
| DE3606850A1 (de) * | 1986-03-03 | 1987-09-10 | Vdo Schindling | Anordnung zur messung der stroemungsgeschwindigkeit |
| DE3606853A1 (de) * | 1986-03-03 | 1987-09-10 | Vdo Schindling | Messsonde |
| US4808009A (en) * | 1986-06-05 | 1989-02-28 | Rosemount, Inc. | Integrated semiconductor resistance temperature sensor and resistive heater |
| DE3638138A1 (de) * | 1986-11-08 | 1988-05-11 | Bosch Gmbh Robert | Vorrichtung zur bestimmung der masse eines stroemenden mediums |
| DE3638137A1 (de) * | 1986-11-08 | 1988-05-11 | Bosch Gmbh Robert | Vorrichtung zur bestimmung der masse eines stroemenden mediums |
| JPS63177023A (ja) * | 1987-01-19 | 1988-07-21 | Nippon Soken Inc | 流量センサ |
| KR890010539A (ko) * | 1987-12-08 | 1989-08-09 | 시끼모리야 | 감열식 유량센서 |
| DE3829195A1 (de) * | 1988-08-29 | 1990-03-08 | Bosch Gmbh Robert | Temperaturfuehler |
| US5366292A (en) * | 1989-02-01 | 1994-11-22 | Leybold Ag | Sensor formed from a deformation heat recoverable material having a predetermined range of temperatures in which recovery occurs and used for measuring a physical characteristic of a system |
| US5201221A (en) * | 1991-03-15 | 1993-04-13 | Ford Motor Company | Flow sensor and method of manufacture |
| US5205170A (en) * | 1991-04-01 | 1993-04-27 | Ford Motor Company | Mass flow sensor |
| DE4115040A1 (de) * | 1991-05-08 | 1992-11-12 | Bosch Gmbh Robert | Messelement |
| IT1250833B (it) * | 1991-07-31 | 1995-04-21 | Fiat Auto Spa | Dispositivo rilevatore per valutare le condizioni di conforto termico in un ambiente, ad esempio nell'abitacolo di un autoveicolo. |
| DE4139631C1 (en) * | 1991-11-30 | 1993-03-11 | Robert Bosch Gmbh, 7000 Stuttgart, De | Measuring element for intake air flowmeter of IC engine - has slot in substrate board separating film resistors |
| JPH05215583A (ja) * | 1992-02-04 | 1993-08-24 | Mitsubishi Electric Corp | 感熱式流量センサ |
| US5369247A (en) * | 1992-10-29 | 1994-11-29 | Doljack; Frank A. | Self-regulating electrical heater system and method |
| JPH06249693A (ja) * | 1993-02-25 | 1994-09-09 | Robert Bosch Gmbh | 質量流量センサおよびその製造方法 |
| DE4308227C2 (de) * | 1993-03-16 | 1996-02-01 | Bosch Gmbh Robert | Vorrichtung zur Bestimmung der Masse eines strömenden Mediums |
| US5722772A (en) * | 1996-01-11 | 1998-03-03 | Keil; Gary D. | Quench cooling effectiveness apparatus for continous monitoring |
| DE19808248A1 (de) * | 1998-02-27 | 1999-09-02 | Pierburg Ag | Meßvorrichtung zur Messung der Masse eines strömenden Mediums |
| DE19860725A1 (de) * | 1998-12-30 | 2000-08-17 | Abb Patent Gmbh | Verfahren zur Durchflußmessung mit einer Heißfilmanemometeranordnung |
| US6631638B2 (en) | 2001-01-30 | 2003-10-14 | Rosemount Aerospace Inc. | Fluid flow sensor |
| DE102017204299B4 (de) * | 2017-03-15 | 2020-01-30 | Phoenix Contact Gmbh & Co. Kg | Trennvorrichtung mit einer thermischen Abtrenneinrichtung für ein Überspannungsschutzelement und eine Anordnung aus einem Gehäuse mit einer Trennvorrichtung mit einer thermischen Abtrennvorrichtung und ein Überspannungsschutzelement |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1086565A (en) * | 1963-11-20 | 1967-10-11 | British Aircraft Corp Ltd | Improvements relating to temperature and/or strain gauges |
| US3435400A (en) * | 1966-01-26 | 1969-03-25 | Paul Beckman | Thermal probe |
| DE2048489A1 (de) * | 1969-10-03 | 1971-04-15 | Vyzk Ustav Organickysch Syntez | Temperaturflachenfuhler |
| US3603147A (en) * | 1969-11-05 | 1971-09-07 | Thermo Systems Inc | Pulsed anemometer circuit |
| FR2188158A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1972-06-14 | 1974-01-18 | Bailey Meter Co | |
| GB1477007A (en) * | 1974-07-09 | 1977-06-22 | Welwyn Electric Ltd | Resistors |
| DE7533116U (de) * | 1975-10-17 | 1976-02-12 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Vorrichtung zur messung der temperatur stroemender luft mit hohem staubanteil |
| DE2900220A1 (de) * | 1979-01-04 | 1980-07-17 | Bosch Gmbh Robert | Vorrichtung zur messung der masse eines stroemenden mediums |
| DE2965814D1 (en) * | 1979-03-21 | 1983-08-11 | Bbc Brown Boveri & Cie | Thin film resistor having a high temperature coefficient and method of manufacturing the same |
| DE2919433C2 (de) * | 1979-05-15 | 1987-01-22 | Robert Bosch Gmbh, 7000 Stuttgart | Meßsonde zur Messung der Masse und/oder Temperatur eines strömenden Mediums |
| DE2925975A1 (de) * | 1979-06-27 | 1981-01-15 | Siemens Ag | Mengendurchflussmesser |
| US4399697A (en) * | 1980-03-26 | 1983-08-23 | Nippon Soken, Inc. | Gas flow measuring apparatus |
-
1982
- 1982-03-06 DE DE19823208096 patent/DE3208096A1/de active Granted
-
1983
- 1983-01-20 FR FR8300877A patent/FR2522811B1/fr not_active Expired
- 1983-02-28 US US06/470,270 patent/US4498337A/en not_active Expired - Fee Related
- 1983-03-04 JP JP58034712A patent/JPS58162823A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60152928U (ja) * | 1984-03-22 | 1985-10-11 | 日本電子機器株式会社 | 熱線式流量計 |
| JPWO2008149887A1 (ja) * | 2007-06-06 | 2010-08-26 | 株式会社 女性医療研究所 | 骨盤臓器脱防止及び治療装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| US4498337A (en) | 1985-02-12 |
| FR2522811B1 (fr) | 1987-08-21 |
| DE3208096C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-09-24 |
| DE3208096A1 (de) | 1983-09-15 |
| FR2522811A1 (fr) | 1983-09-09 |