JPS58161978A - Method of bonding ceramic member and metal member - Google Patents
Method of bonding ceramic member and metal memberInfo
- Publication number
- JPS58161978A JPS58161978A JP4014382A JP4014382A JPS58161978A JP S58161978 A JPS58161978 A JP S58161978A JP 4014382 A JP4014382 A JP 4014382A JP 4014382 A JP4014382 A JP 4014382A JP S58161978 A JPS58161978 A JP S58161978A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic member
- metal
- parts
- paste
- weight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- Ceramic Products (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
[発明の技術分野]
本発明は、セラミック部材に対するメタライズ用ペース
トの塗布性を改良し、かつセラミック部材とメタライズ
面との密着性を向上させたセラミック部材と金属部材と
の接合方法に関する。Detailed Description of the Invention [Technical Field of the Invention] The present invention provides a ceramic member and a metal member that have improved applicability of a metallizing paste to the ceramic member and improved adhesion between the ceramic member and the metallized surface. Regarding the joining method.
[発明の技術的背景とその問題点1
従来よりセラミック部材に金属部材をろう付けして形成
される封着部品は、気密性、耐熱性、熱間絶縁性、耐電
圧性等に優れているためシリコン整流素子外囲器、マイ
クロ波ダイオード用ケース等の電子部品として広く用い
られてい゛る。[Technical background of the invention and its problems 1 Conventionally, sealed parts formed by brazing a metal member to a ceramic member have excellent airtightness, heat resistance, hot insulation, voltage resistance, etc. Therefore, it is widely used as electronic components such as silicon rectifier envelopes and microwave diode cases.
このような@看部品はセラミック部材にモリブデン等の
高融点金属微粉末を主成分とするメタライズ用ペースト
を塗布し、約1500℃の還元雰囲気中で加熱焼結して
メタライズ処理を行ない、次いでニッケルメッキ処理、
銀ろうによる金属部材へのろう付けによって製造されて
いる。Such parts are manufactured by coating a ceramic member with a metallizing paste mainly composed of fine powder of a high-melting metal such as molybdenum, heating and sintering it in a reducing atmosphere at about 1500°C, and then metallizing it with nickel. plating treatment,
Manufactured by brazing to metal parts using silver solder.
しかしてメタライズ用ペーストとしてはモリブデン粉末
にマンガン、ケイ素等の化合物を添加混合し有機バイン
ダによりペースト化されたものが多用されている。As a metallizing paste, a paste prepared by adding and mixing compounds such as manganese and silicon to molybdenum powder and forming it into a paste with an organic binder is often used.
しかしながらこのものは塗布時に垂れやすいため、塗布
面からはみ出してしまう欠点があった。However, this product has the disadvantage that it tends to drip during application, causing it to protrude from the applied surface.
このような塗布面からのはみ出しを防止するには、11
機バインダの醋を減らして粉末成分の比率を多くすれば
よいが、有機バインダの量を減らすと展延性が低下して
塗布しにくくなるという欠点があった。To prevent such protrusion from the coated surface, 11
Although it is possible to reduce the amount of organic binder and increase the ratio of powder components, there is a drawback that reducing the amount of organic binder reduces spreadability and makes coating difficult.
またこのようなメタライズ用ペーストは、ニッケルメッ
キとの適合性が不十分なため、この上にニッケルメッキ
を施すとニッケルメッキ層にふくれが生じたり、あるい
は必要な厚さのニッケルメッキ層が得られなくなって銀
ろうがメタライズ層中に侵入してリークの原因になると
いう問題があった。In addition, such metallizing pastes are not sufficiently compatible with nickel plating, so if nickel plating is applied on top of this, the nickel plating layer may bulge or the required thickness of the nickel plating layer may not be obtained. There was a problem in that when the silver wax ran out, it invaded the metallized layer and caused leakage.
[発明の目的コ
本発明はメタライズ用ペーストのセラミック部材に対す
る塗布性を改良してセラミック部材とメタライズ層との
密着性を向上させるとともに′、ニッケルメツ・キとの
適合性を改良したセラミック部材と金属部材との接合方
法を提供しようとするものである。[Object of the Invention] The present invention improves the applicability of a metallizing paste to a ceramic member to improve the adhesion between the ceramic member and the metallized layer, and also improves the compatibility between the ceramic member and the metal with nickel metal. The purpose is to provide a method for joining members.
[発明の概要]
本発明は、モリブデン粉末にマンガンの酸化物と力焼タ
ルクおよび必要に応じて二酸化チクダンとを添加し、有
機バインダによりペースト状にしてなるメタライズ用ペ
ーストをセラミック部材に塗布焼付けし、この焼付は面
に金属メッキを施した後この金属面に金属部材をにろう
付けすることを特徴とする。[Summary of the Invention] The present invention involves adding manganese oxide, force-baked talc, and optionally chikdan dioxide to molybdenum powder, and applying and baking a metallizing paste made into a paste with an organic binder onto a ceramic member. This baking is characterized by applying metal plating to the surface and then brazing the metal member to this metal surface.
本発明における力焼タルクは、タルクをあらかじめ10
00〜1100℃に加熱して結晶水を除去して得られる
ものであり、粒径が0.5μ論以下のものが適している
。本発明において、この力焼タルクはメタライズ用ペー
ストに対して増粘作用とチクント0と−を改良する作用
をする。この力焼タルクの添加量はモリブデン粉末10
0重量部に対して3〜10重量部が適切である。この値
より少ない場合は効果が得られず、この値を越える場合
にはセラミック部材とメタライズ面との密着性が低下す
る。The force-baked talc in the present invention is prepared by adding 10% of the talc in advance.
It is obtained by heating to 00 to 1100°C to remove crystal water, and particles with a particle size of 0.5 μm or less are suitable. In the present invention, this force-baked talc has the effect of thickening the metallizing paste and improving the chikunto. The amount of this force-baked talc added is 10 molybdenum powder.
3 to 10 parts by weight is suitable for 0 parts by weight. If it is less than this value, no effect will be obtained, and if it exceeds this value, the adhesion between the ceramic member and the metallized surface will deteriorate.
なお本発明においては、力焼タルクを5重量部以上添加
する場合には、二酸化チタンをモリブデン粉末に対して
1〜5重量部添加してセラミック部材とメタライズ面と
の密着性の低下を防ぐことが望ましい。なお、′この二
酸化チタンは密着強度をあげる以外に焼結を促進する作
用をする。In the present invention, when adding 5 parts by weight or more of force-calcined talc, 1 to 5 parts by weight of titanium dioxide should be added to the molybdenum powder to prevent a decrease in the adhesion between the ceramic member and the metallized surface. is desirable. Note that this titanium dioxide has the effect of promoting sintering in addition to increasing adhesion strength.
本発明におけるマンガンの酸化物としては二酸化マンガ
ン、−酸化マンガンがあり、いずれも使用可能である。Manganese oxides in the present invention include manganese dioxide and -manganese oxide, both of which can be used.
このマンガンの酸化物の添7301はモリブデン粉末1
00重量部に対して通常1〜5重陽部が適切である。This manganese oxide additive 7301 is molybdenum powder 1
Generally, 1 to 5 parts by weight per 00 parts by weight is appropriate.
[発明の実施例] 次に本発明の実施例について説明する。[Embodiments of the invention] Next, examples of the present invention will be described.
実施例
エチルセルロース5重量部をベンジルアルコール251
1部に溶解させたビヒクルにモリブデン粉末100重量
部、二酸化マンガン11!量部、力焼タルク10垂歯部
、二酸化チタン3f!量部の混合粉末を添加混合してペ
ースト状とし、外径16籠、内径12nの円筒状セラミ
ック部材の端面に塗布したところ垂れは全く生じなかっ
た。このペーストの塗布されたセラミック部材を水素気
流中で1500℃に加熱し、次いで常法によりペースト
塗布面上にニッケルメッキを施した。このニッケルメッ
キ表面は1000℃に加熱してもニッケルメッキ■にふ
くれは見られなかった。Example: 5 parts by weight of ethyl cellulose was mixed with 251 parts by weight of benzyl alcohol.
100 parts by weight of molybdenum powder dissolved in 1 part vehicle, 11 parts manganese dioxide! Quantity part, force-baked talc 10 vertical teeth part, titanium dioxide 3f! When a certain amount of the mixed powder was added and mixed to form a paste, and the paste was applied to the end face of a cylindrical ceramic member having an outer diameter of 16 mm and an inner diameter of 12 nm, no sag occurred at all. The ceramic member coated with this paste was heated to 1500° C. in a hydrogen stream, and then nickel plating was performed on the paste coated surface by a conventional method. Even when the nickel plated surface was heated to 1000°C, no blistering was observed on the nickel plated surface.
しかる模このニッケルメッキ面に、モリブデン板を銀ろ
うを用いてろう接し、セラミック部材とモリブデン板の
剥離強度を測定した。セラミック部材とメタライズ層と
の剥離強度は2.5kg/−(平均値)であった。A molybdenum plate was soldered to the nickel-plated surface of the model using silver solder, and the peel strength between the ceramic member and the molybdenum plate was measured. The peel strength between the ceramic member and the metallized layer was 2.5 kg/- (average value).
一方、力焼タルクの代りに加熱処理を施さない結晶水を
有するタルクを添加したメタライズ用ペーストをセラミ
ック部材の端面に塗布したセラミック部材を1500℃
に加熱し、同様にしてペースト塗布面にニッケルメッキ
を施したところ30個の内2個に若干のニッケルメッキ
のふくれが見られた。またこのようにして得られたセラ
ミック部材にモリブデン板を銀ろう付けし、セラミック
部材とメタライズ層との剥離強度を測定したところ1.
8kg/c((平均値)であった。さらにモリブデン粉
末100重量部とマンガンの酸化物7重量部とをペース
ト状にしたメタライズ用ペーストを使用して同様の実験
を行ったところ、ペーストの垂れが著しく生じ、これに
ニッケルメッキを施したものでは30個全部のメッキ層
にわずかながらふくれが見られた。またセラミック部材
とメタライズ層との剥離強度は1.1kg/mイ(平均
値)であった。On the other hand, a ceramic member in which a metallizing paste containing talc containing water of crystallization without heat treatment was applied instead of force-baked talc was applied to the end face of the ceramic member at 1500°C.
When nickel plating was applied to the paste-applied surface in the same manner, slight blistering of the nickel plating was observed on 2 out of 30 pieces. Furthermore, a molybdenum plate was silver-brazed to the ceramic member thus obtained, and the peel strength between the ceramic member and the metallized layer was measured.1.
8 kg/c ((average value).Furthermore, when a similar experiment was conducted using a metallizing paste made of 100 parts by weight of molybdenum powder and 7 parts by weight of manganese oxide, the paste dripped. Significant nickel plating occurred, and slight blistering was observed in all 30 plated layers.Also, the peel strength between the ceramic member and the metallized layer was 1.1 kg/m2 (average value). there were.
[発明の効果1
以上の実施例からも明らかなように、本発明方法によれ
ばぜラミック部材に塗布されたメタライズ用ペーストに
垂れが生じるようなことがなく、またニッケルメッキと
の適合性ならびにセラミック部材とメタライズ層との密
着性にも優れている。[Effect of the invention 1] As is clear from the above examples, according to the method of the present invention, the metallizing paste applied to the zeramic member does not drip, and is compatible with nickel plating. It also has excellent adhesion between the ceramic member and the metallized layer.
(7317) 代理人弁理士 則近憲佑(ほか1名) 385−(7317) Representative patent attorney Kensuke Norichika (and 1 other person) 385-
Claims (2)
および必要に応じて二酸化チタンとを添加し、有機バイ
ンダによりペースト状にじてなるメタライズ用ペースト
をセラミック部材に冑布焼付けし、この焼付は面に金属
メッキを施した後この金属面に金属部材をろう付けする
ことを特徴とするセラミック部材と金属部材との接合方
法。(1) Manganese oxidation, force-baked talc, and titanium dioxide as necessary are added to molybdenum powder, and the metallizing paste, which is made into a paste with an organic binder, is baked onto a ceramic member. A method for joining a ceramic member and a metal member, which comprises applying metal plating to the surface and then brazing the metal member to the metal surface.
て3乃至10重量部である特許請求の範囲第1項記載の
セラミック部材と金属部材との接合方法。(2) The method of joining a ceramic member and a metal member according to claim 1, wherein the amount of force-calcined talc is 3 to 10 parts by weight per 100 parts by weight of molybdenum powder.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4014382A JPS58161978A (en) | 1982-03-16 | 1982-03-16 | Method of bonding ceramic member and metal member |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4014382A JPS58161978A (en) | 1982-03-16 | 1982-03-16 | Method of bonding ceramic member and metal member |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS58161978A true JPS58161978A (en) | 1983-09-26 |
Family
ID=12572549
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4014382A Pending JPS58161978A (en) | 1982-03-16 | 1982-03-16 | Method of bonding ceramic member and metal member |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58161978A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4758814A (en) * | 1985-12-02 | 1988-07-19 | Motorola, Inc. | Structure and method for wire lead attachment to a high temperature ceramic sensor |
-
1982
- 1982-03-16 JP JP4014382A patent/JPS58161978A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4758814A (en) * | 1985-12-02 | 1988-07-19 | Motorola, Inc. | Structure and method for wire lead attachment to a high temperature ceramic sensor |
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