JPS5816156A - 極低温発生装置 - Google Patents

極低温発生装置

Info

Publication number
JPS5816156A
JPS5816156A JP11368681A JP11368681A JPS5816156A JP S5816156 A JPS5816156 A JP S5816156A JP 11368681 A JP11368681 A JP 11368681A JP 11368681 A JP11368681 A JP 11368681A JP S5816156 A JPS5816156 A JP S5816156A
Authority
JP
Japan
Prior art keywords
expansion engine
filter
pressure
gas tank
cryogenic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11368681A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6246782B2 (enrdf_load_stackoverflow
Inventor
松田　紀元
今村　実
別府　忠
徳田　光雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11368681A priority Critical patent/JPS5816156A/ja
Publication of JPS5816156A publication Critical patent/JPS5816156A/ja
Publication of JPS6246782B2 publication Critical patent/JPS6246782B2/ja
Granted legal-status Critical Current

Links

JP11368681A 1981-07-22 1981-07-22 極低温発生装置 Granted JPS5816156A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11368681A JPS5816156A (ja) 1981-07-22 1981-07-22 極低温発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11368681A JPS5816156A (ja) 1981-07-22 1981-07-22 極低温発生装置

Publications (2)

Publication Number Publication Date
JPS5816156A true JPS5816156A (ja) 1983-01-29
JPS6246782B2 JPS6246782B2 (enrdf_load_stackoverflow) 1987-10-05

Family

ID=14618604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11368681A Granted JPS5816156A (ja) 1981-07-22 1981-07-22 極低温発生装置

Country Status (1)

Country Link
JP (1) JPS5816156A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6246782B2 (enrdf_load_stackoverflow) 1987-10-05

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