JPS5816136Y2 - 電子線走査型装置の焦点合せ装置 - Google Patents
電子線走査型装置の焦点合せ装置Info
- Publication number
- JPS5816136Y2 JPS5816136Y2 JP1976044601U JP4460176U JPS5816136Y2 JP S5816136 Y2 JPS5816136 Y2 JP S5816136Y2 JP 1976044601 U JP1976044601 U JP 1976044601U JP 4460176 U JP4460176 U JP 4460176U JP S5816136 Y2 JPS5816136 Y2 JP S5816136Y2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- value
- output
- focus
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1976044601U JPS5816136Y2 (ja) | 1976-04-10 | 1976-04-10 | 電子線走査型装置の焦点合せ装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1976044601U JPS5816136Y2 (ja) | 1976-04-10 | 1976-04-10 | 電子線走査型装置の焦点合せ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52136547U JPS52136547U (ru) | 1977-10-17 |
JPS5816136Y2 true JPS5816136Y2 (ja) | 1983-04-01 |
Family
ID=28503666
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1976044601U Expired JPS5816136Y2 (ja) | 1976-04-10 | 1976-04-10 | 電子線走査型装置の焦点合せ装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5816136Y2 (ru) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50141261A (ru) * | 1974-04-24 | 1975-11-13 |
-
1976
- 1976-04-10 JP JP1976044601U patent/JPS5816136Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50141261A (ru) * | 1974-04-24 | 1975-11-13 |
Also Published As
Publication number | Publication date |
---|---|
JPS52136547U (ru) | 1977-10-17 |
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