JPS52136547U - - Google Patents
Info
- Publication number
- JPS52136547U JPS52136547U JP4460176U JP4460176U JPS52136547U JP S52136547 U JPS52136547 U JP S52136547U JP 4460176 U JP4460176 U JP 4460176U JP 4460176 U JP4460176 U JP 4460176U JP S52136547 U JPS52136547 U JP S52136547U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976044601U JPS5816136Y2 (ja) | 1976-04-10 | 1976-04-10 | 電子線走査型装置の焦点合せ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976044601U JPS5816136Y2 (ja) | 1976-04-10 | 1976-04-10 | 電子線走査型装置の焦点合せ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52136547U true JPS52136547U (ru) | 1977-10-17 |
| JPS5816136Y2 JPS5816136Y2 (ja) | 1983-04-01 |
Family
ID=28503666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976044601U Expired JPS5816136Y2 (ja) | 1976-04-10 | 1976-04-10 | 電子線走査型装置の焦点合せ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5816136Y2 (ru) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50141261A (ru) * | 1974-04-24 | 1975-11-13 |
-
1976
- 1976-04-10 JP JP1976044601U patent/JPS5816136Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50141261A (ru) * | 1974-04-24 | 1975-11-13 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5816136Y2 (ja) | 1983-04-01 |