JPS58159342A - 半導体素子のパタ−ン欠陥検出方法 - Google Patents
半導体素子のパタ−ン欠陥検出方法Info
- Publication number
- JPS58159342A JPS58159342A JP4331282A JP4331282A JPS58159342A JP S58159342 A JPS58159342 A JP S58159342A JP 4331282 A JP4331282 A JP 4331282A JP 4331282 A JP4331282 A JP 4331282A JP S58159342 A JPS58159342 A JP S58159342A
- Authority
- JP
- Japan
- Prior art keywords
- mask
- image
- pattern
- binarized
- scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007547 defect Effects 0.000 title claims abstract description 33
- 239000004065 semiconductor Substances 0.000 title claims description 9
- 238000001514 detection method Methods 0.000 title description 2
- 238000000034 method Methods 0.000 claims abstract description 14
- 230000000737 periodic effect Effects 0.000 abstract description 8
- 230000000007 visual effect Effects 0.000 description 15
- 238000010586 diagram Methods 0.000 description 5
- 238000007796 conventional method Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 3
- 238000007689 inspection Methods 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- 241000239290 Araneae Species 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 241000270666 Testudines Species 0.000 description 1
- 238000011888 autopsy Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 235000003642 hunger Nutrition 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000037351 starvation Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4331282A JPS58159342A (ja) | 1982-03-17 | 1982-03-17 | 半導体素子のパタ−ン欠陥検出方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4331282A JPS58159342A (ja) | 1982-03-17 | 1982-03-17 | 半導体素子のパタ−ン欠陥検出方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58159342A true JPS58159342A (ja) | 1983-09-21 |
| JPS6222528B2 JPS6222528B2 (enrdf_load_stackoverflow) | 1987-05-19 |
Family
ID=12660280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4331282A Granted JPS58159342A (ja) | 1982-03-17 | 1982-03-17 | 半導体素子のパタ−ン欠陥検出方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58159342A (enrdf_load_stackoverflow) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5093772A (enrdf_load_stackoverflow) * | 1973-12-21 | 1975-07-26 | ||
| JPS5266380A (en) * | 1975-11-28 | 1977-06-01 | Fujitsu Ltd | Inspection of patterns |
-
1982
- 1982-03-17 JP JP4331282A patent/JPS58159342A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5093772A (enrdf_load_stackoverflow) * | 1973-12-21 | 1975-07-26 | ||
| JPS5266380A (en) * | 1975-11-28 | 1977-06-01 | Fujitsu Ltd | Inspection of patterns |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6222528B2 (enrdf_load_stackoverflow) | 1987-05-19 |
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