JPS6222528B2 - - Google Patents
Info
- Publication number
- JPS6222528B2 JPS6222528B2 JP57043312A JP4331282A JPS6222528B2 JP S6222528 B2 JPS6222528 B2 JP S6222528B2 JP 57043312 A JP57043312 A JP 57043312A JP 4331282 A JP4331282 A JP 4331282A JP S6222528 B2 JPS6222528 B2 JP S6222528B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- image
- visual field
- mask
- binarized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4331282A JPS58159342A (ja) | 1982-03-17 | 1982-03-17 | 半導体素子のパタ−ン欠陥検出方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4331282A JPS58159342A (ja) | 1982-03-17 | 1982-03-17 | 半導体素子のパタ−ン欠陥検出方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58159342A JPS58159342A (ja) | 1983-09-21 |
| JPS6222528B2 true JPS6222528B2 (enrdf_load_stackoverflow) | 1987-05-19 |
Family
ID=12660280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4331282A Granted JPS58159342A (ja) | 1982-03-17 | 1982-03-17 | 半導体素子のパタ−ン欠陥検出方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58159342A (enrdf_load_stackoverflow) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5093772A (enrdf_load_stackoverflow) * | 1973-12-21 | 1975-07-26 | ||
| JPS5855657B2 (ja) * | 1975-11-28 | 1983-12-10 | 富士通株式会社 | パタ−ンケンサホウホウ |
-
1982
- 1982-03-17 JP JP4331282A patent/JPS58159342A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58159342A (ja) | 1983-09-21 |
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