JPS58154234A - 半導体基体の腐食方法 - Google Patents

半導体基体の腐食方法

Info

Publication number
JPS58154234A
JPS58154234A JP3777182A JP3777182A JPS58154234A JP S58154234 A JPS58154234 A JP S58154234A JP 3777182 A JP3777182 A JP 3777182A JP 3777182 A JP3777182 A JP 3777182A JP S58154234 A JPS58154234 A JP S58154234A
Authority
JP
Japan
Prior art keywords
etching
substrates
jig
semiconductor
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3777182A
Other languages
English (en)
Japanese (ja)
Other versions
JPH049376B2 (enExample
Inventor
Isamu Fukui
勇 福井
Toshio Kawasaki
川崎　敏夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp, Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electronics Corp
Priority to JP3777182A priority Critical patent/JPS58154234A/ja
Publication of JPS58154234A publication Critical patent/JPS58154234A/ja
Publication of JPH049376B2 publication Critical patent/JPH049376B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Weting (AREA)
JP3777182A 1982-03-09 1982-03-09 半導体基体の腐食方法 Granted JPS58154234A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3777182A JPS58154234A (ja) 1982-03-09 1982-03-09 半導体基体の腐食方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3777182A JPS58154234A (ja) 1982-03-09 1982-03-09 半導体基体の腐食方法

Publications (2)

Publication Number Publication Date
JPS58154234A true JPS58154234A (ja) 1983-09-13
JPH049376B2 JPH049376B2 (enExample) 1992-02-20

Family

ID=12506727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3777182A Granted JPS58154234A (ja) 1982-03-09 1982-03-09 半導体基体の腐食方法

Country Status (1)

Country Link
JP (1) JPS58154234A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5172901A (en) * 1990-07-31 1992-12-22 Sharp Kabushiki Kaisha Paper feeding device
JPH05128640A (ja) * 1991-11-06 1993-05-25 Fujitsu Ten Ltd テープ再生装置
US8821054B2 (en) 2007-01-17 2014-09-02 Nisca Corporation Printer apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5172901A (en) * 1990-07-31 1992-12-22 Sharp Kabushiki Kaisha Paper feeding device
JPH05128640A (ja) * 1991-11-06 1993-05-25 Fujitsu Ten Ltd テープ再生装置
US8821054B2 (en) 2007-01-17 2014-09-02 Nisca Corporation Printer apparatus

Also Published As

Publication number Publication date
JPH049376B2 (enExample) 1992-02-20

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