JPS58152977A - 真空容器用ゲ−トバルブ - Google Patents

真空容器用ゲ−トバルブ

Info

Publication number
JPS58152977A
JPS58152977A JP3342182A JP3342182A JPS58152977A JP S58152977 A JPS58152977 A JP S58152977A JP 3342182 A JP3342182 A JP 3342182A JP 3342182 A JP3342182 A JP 3342182A JP S58152977 A JPS58152977 A JP S58152977A
Authority
JP
Japan
Prior art keywords
bellows
partition plate
valve
shaped
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3342182A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6227309B2 (enExample
Inventor
Hajime Ishimaru
石丸　肇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KOUENERUGII BUTSURIGAKU KENKYUSHO
Original Assignee
KOUENERUGII BUTSURIGAKU KENKYUSHO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KOUENERUGII BUTSURIGAKU KENKYUSHO filed Critical KOUENERUGII BUTSURIGAKU KENKYUSHO
Priority to JP3342182A priority Critical patent/JPS58152977A/ja
Publication of JPS58152977A publication Critical patent/JPS58152977A/ja
Publication of JPS6227309B2 publication Critical patent/JPS6227309B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/20—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the seats
    • F16K3/207—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the seats by means of hydraulic forces

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Valves (AREA)
  • Sliding Valves (AREA)
JP3342182A 1982-03-03 1982-03-03 真空容器用ゲ−トバルブ Granted JPS58152977A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3342182A JPS58152977A (ja) 1982-03-03 1982-03-03 真空容器用ゲ−トバルブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3342182A JPS58152977A (ja) 1982-03-03 1982-03-03 真空容器用ゲ−トバルブ

Publications (2)

Publication Number Publication Date
JPS58152977A true JPS58152977A (ja) 1983-09-10
JPS6227309B2 JPS6227309B2 (enExample) 1987-06-13

Family

ID=12386095

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3342182A Granted JPS58152977A (ja) 1982-03-03 1982-03-03 真空容器用ゲ−トバルブ

Country Status (1)

Country Link
JP (1) JPS58152977A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2557246A1 (fr) * 1983-12-26 1985-06-28 Fuji Bellows Co Ltd Dispositif d'obturation pour robinet-vanne
JP2007292273A (ja) * 2006-04-27 2007-11-08 Ulvac Japan Ltd 真空ゲートバルブ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4888514A (enExample) * 1972-02-23 1973-11-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4888514A (enExample) * 1972-02-23 1973-11-20

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2557246A1 (fr) * 1983-12-26 1985-06-28 Fuji Bellows Co Ltd Dispositif d'obturation pour robinet-vanne
JP2007292273A (ja) * 2006-04-27 2007-11-08 Ulvac Japan Ltd 真空ゲートバルブ

Also Published As

Publication number Publication date
JPS6227309B2 (enExample) 1987-06-13

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