JPS58149188A - 搬送ロボツト - Google Patents

搬送ロボツト

Info

Publication number
JPS58149188A
JPS58149188A JP3124782A JP3124782A JPS58149188A JP S58149188 A JPS58149188 A JP S58149188A JP 3124782 A JP3124782 A JP 3124782A JP 3124782 A JP3124782 A JP 3124782A JP S58149188 A JPS58149188 A JP S58149188A
Authority
JP
Japan
Prior art keywords
acceleration
transported
weight
supplied
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3124782A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0132039B2 (cs
Inventor
太一 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Electric Co Ltd
Original Assignee
Shinko Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Co Ltd filed Critical Shinko Electric Co Ltd
Priority to JP3124782A priority Critical patent/JPS58149188A/ja
Publication of JPS58149188A publication Critical patent/JPS58149188A/ja
Publication of JPH0132039B2 publication Critical patent/JPH0132039B2/ja
Granted legal-status Critical Current

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  • Numerical Control (AREA)
JP3124782A 1982-02-26 1982-02-26 搬送ロボツト Granted JPS58149188A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3124782A JPS58149188A (ja) 1982-02-26 1982-02-26 搬送ロボツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3124782A JPS58149188A (ja) 1982-02-26 1982-02-26 搬送ロボツト

Publications (2)

Publication Number Publication Date
JPS58149188A true JPS58149188A (ja) 1983-09-05
JPH0132039B2 JPH0132039B2 (cs) 1989-06-29

Family

ID=12326038

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3124782A Granted JPS58149188A (ja) 1982-02-26 1982-02-26 搬送ロボツト

Country Status (1)

Country Link
JP (1) JPS58149188A (cs)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6198409A (ja) * 1984-10-19 1986-05-16 Hitachi Seiki Co Ltd Ｎｃ駆動制御装置
JPS6289119A (ja) * 1985-10-16 1987-04-23 Pioneer Electronic Corp 加減速制御方法
WO1991018717A1 (en) * 1990-05-25 1991-12-12 Fanuc Ltd Acceleration/deceleration time constant control system of robot
JPH06151559A (ja) * 1992-11-13 1994-05-31 Nippon Ee S M Kk 縦型熱処理装置用ロードロックチャンバー
JPH0677245U (ja) * 1994-04-22 1994-10-28 大日本スクリーン製造株式会社 半導体製造装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856785A (ja) * 1981-09-30 1983-04-04 株式会社三協精機製作所 工業用ロボツトの動作制御装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856785A (ja) * 1981-09-30 1983-04-04 株式会社三協精機製作所 工業用ロボツトの動作制御装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6198409A (ja) * 1984-10-19 1986-05-16 Hitachi Seiki Co Ltd Ｎｃ駆動制御装置
JPS6289119A (ja) * 1985-10-16 1987-04-23 Pioneer Electronic Corp 加減速制御方法
WO1991018717A1 (en) * 1990-05-25 1991-12-12 Fanuc Ltd Acceleration/deceleration time constant control system of robot
US5325467A (en) * 1990-05-25 1994-06-28 Fanuc Ltd. Robot control method based on an acceleration/deceleration time constant
JPH06151559A (ja) * 1992-11-13 1994-05-31 Nippon Ee S M Kk 縦型熱処理装置用ロードロックチャンバー
JPH0677245U (ja) * 1994-04-22 1994-10-28 大日本スクリーン製造株式会社 半導体製造装置

Also Published As

Publication number Publication date
JPH0132039B2 (cs) 1989-06-29

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