JPS58147887A - 半導体記憶装置 - Google Patents
半導体記憶装置Info
- Publication number
- JPS58147887A JPS58147887A JP57032008A JP3200882A JPS58147887A JP S58147887 A JPS58147887 A JP S58147887A JP 57032008 A JP57032008 A JP 57032008A JP 3200882 A JP3200882 A JP 3200882A JP S58147887 A JPS58147887 A JP S58147887A
- Authority
- JP
- Japan
- Prior art keywords
- transistor
- drain
- memory device
- semiconductor memory
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 23
- 239000000758 substrate Substances 0.000 claims description 10
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 6
- 230000003068 static effect Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000002427 irreversible effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000010415 tropism Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
Landscapes
- Static Random-Access Memory (AREA)
- Semiconductor Memories (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57032008A JPS58147887A (ja) | 1982-02-26 | 1982-02-26 | 半導体記憶装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57032008A JPS58147887A (ja) | 1982-02-26 | 1982-02-26 | 半導体記憶装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58147887A true JPS58147887A (ja) | 1983-09-02 |
JPH0315351B2 JPH0315351B2 (enrdf_load_stackoverflow) | 1991-02-28 |
Family
ID=12346840
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57032008A Granted JPS58147887A (ja) | 1982-02-26 | 1982-02-26 | 半導体記憶装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58147887A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60136095A (ja) * | 1983-12-23 | 1985-07-19 | Hitachi Ltd | 半導体メモリ |
JPH05151779A (ja) * | 1990-06-29 | 1993-06-18 | Digital Equip Corp <Dec> | バイポーラトランジスタメモリセル及び方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101402381B1 (ko) * | 2013-04-11 | 2014-06-03 | 한국가스공사 | Lng 탱크 컨테이너를 이용한 원격지 천연가스 공급 스테이션 및 이를 이용한 천연가스 공급 방법 |
-
1982
- 1982-02-26 JP JP57032008A patent/JPS58147887A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60136095A (ja) * | 1983-12-23 | 1985-07-19 | Hitachi Ltd | 半導体メモリ |
JPH05151779A (ja) * | 1990-06-29 | 1993-06-18 | Digital Equip Corp <Dec> | バイポーラトランジスタメモリセル及び方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0315351B2 (enrdf_load_stackoverflow) | 1991-02-28 |
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