JPS58142942U - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS58142942U
JPS58142942U JP3929882U JP3929882U JPS58142942U JP S58142942 U JPS58142942 U JP S58142942U JP 3929882 U JP3929882 U JP 3929882U JP 3929882 U JP3929882 U JP 3929882U JP S58142942 U JPS58142942 U JP S58142942U
Authority
JP
Japan
Prior art keywords
semiconductor
dielectric rod
coaxial line
metal films
semiconductor equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3929882U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6246321Y2 (enrdf_load_stackoverflow
Inventor
清春 清野
中沢　俊夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3929882U priority Critical patent/JPS58142942U/ja
Publication of JPS58142942U publication Critical patent/JPS58142942U/ja
Application granted granted Critical
Publication of JPS6246321Y2 publication Critical patent/JPS6246321Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Waveguides (AREA)
JP3929882U 1982-03-19 1982-03-19 半導体装置 Granted JPS58142942U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3929882U JPS58142942U (ja) 1982-03-19 1982-03-19 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3929882U JPS58142942U (ja) 1982-03-19 1982-03-19 半導体装置

Publications (2)

Publication Number Publication Date
JPS58142942U true JPS58142942U (ja) 1983-09-27
JPS6246321Y2 JPS6246321Y2 (enrdf_load_stackoverflow) 1987-12-14

Family

ID=30050588

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3929882U Granted JPS58142942U (ja) 1982-03-19 1982-03-19 半導体装置

Country Status (1)

Country Link
JP (1) JPS58142942U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6246321Y2 (enrdf_load_stackoverflow) 1987-12-14

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