JPS5814183A - El display panel - Google Patents

El display panel

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Publication number
JPS5814183A
JPS5814183A JP56111748A JP11174881A JPS5814183A JP S5814183 A JPS5814183 A JP S5814183A JP 56111748 A JP56111748 A JP 56111748A JP 11174881 A JP11174881 A JP 11174881A JP S5814183 A JPS5814183 A JP S5814183A
Authority
JP
Japan
Prior art keywords
insulating substrate
display panel
layer
substrate
front electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56111748A
Other languages
Japanese (ja)
Inventor
雅行 脇谷
佐藤 精威
三浦 照信
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56111748A priority Critical patent/JPS5814183A/en
Publication of JPS5814183A publication Critical patent/JPS5814183A/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 本発明はエレクトロルミネッセンスl装置のである。[Detailed description of the invention] The present invention is an electroluminescent device.

近年、EL層を誘電体層でサンドイッチ状にはEL表示
パネルが開発、実用化されている。このよりなEL表示
パネルの低電圧駆動化を図る一手段として誘電体層をチ
タン酸鉛(PbTi08)のような強誘電体層で形成し
て、EL層に印加される電圧を実質的に大きくするとい
う方法が採られている。
In recent years, EL display panels in which an EL layer is sandwiched between dielectric layers have been developed and put into practical use. As a means of achieving lower voltage driving of the EL display panel, the dielectric layer is formed of a ferroelectric layer such as lead titanate (PbTi08), thereby substantially increasing the voltage applied to the EL layer. The method is being adopted.

このよりなEL表示パネルの構成は一般に第1図に示す
ように透明ガラス板からなる絶縁基板lを用い、その絶
縁基板1上に例えば線状のインジウム錫酸化物(工To
)からなる透明な前面電極2を平行に多数配設し、それ
ら前面電極2表面を含む絶縁基板1表面にPbTi、O
a からなる第1の誘電体層8を介してマンガンを添加
した硫化亜鉛(ZnS : Mn )のよりなEL材料
からなるEL層4を形成し、さらに該EL層4上に酸化
イツトリウム(Y20B)からなる第2の誘電体層5を
介して線状の例えばアルミニウム(Al)からなる背面
電極6を前記前面電極2と直交する関係で並設しである
。そして前面電極2と背面電極6との各交点部セルから
の光を絶縁基板1側から観察するようになっている。
The structure of this EL display panel generally uses an insulating substrate 1 made of a transparent glass plate as shown in FIG.
) are arranged in parallel, and the surface of the insulating substrate 1 including the surface of these front electrodes 2 is coated with PbTi, O
An EL layer 4 made of a strong EL material of zinc sulfide (ZnS:Mn) doped with manganese is formed through a first dielectric layer 8 made of A, and yttrium oxide (Y20B) is further formed on the EL layer 4. A linear back electrode 6 made of, for example, aluminum (Al) is arranged in parallel with orthogonal to the front electrode 2 via a second dielectric layer 5 made of the same material. Light from each intersection cell between the front electrode 2 and the back electrode 6 is observed from the insulating substrate 1 side.

ところで前述のような構成のEL表示パネルの絶縁基板
1として用いる透明ガラス板は所定の耐熱性および熱膨
張係数を有することが必要でおる。
By the way, the transparent glass plate used as the insulating substrate 1 of the EL display panel configured as described above is required to have a predetermined heat resistance and thermal expansion coefficient.

すなわち第1の誘電体層8となるPbTiO3膜を形成
する際には基板温度を600℃程度に保持した状態で高
周波スパッタリングするので、その温度において変形し
ないような耐熱透明ガラヌ板が必要となる。またELM
4の形成後、そのEL層を580℃程度で熱処理つまシ
アニール処理を施すので、その際のEL層のクラック等
を防止するために熱膨張係数が40〜90(XIQ−7
℃−1)程度のものが必要となる。このような熱膨張係
数ならびに耐熱性を兼備した特殊な透明ガラス板はきわ
めて高価であシ、低電圧駆動化を図ったEL表示パネル
の低価格化の大きな障害となっていた。
That is, when forming the PbTiO3 film that will become the first dielectric layer 8, high frequency sputtering is performed while the substrate temperature is maintained at about 600° C., so a heat-resistant transparent Galanic plate that does not deform at that temperature is required. Also ELM
After forming No. 4, the EL layer is heat-treated at about 580°C and subjected to cyanyl treatment, so the thermal expansion coefficient is 40 to 90 (XIQ-7) to prevent cracks in the EL layer at that time.
℃-1) is required. A special transparent glass plate having such a coefficient of thermal expansion and heat resistance is extremely expensive, and has been a major obstacle to reducing the price of EL display panels that are driven at low voltages.

本発明は前述の点に鑑みなされたもので、その目的は安
価な絶縁基板を用いた構造の低電圧駆動可能なEL表示
パネルを提供することであシ、その特徴は絶縁基板上に
配設した所定形状の前面電極と、該前面電極上に対向配
置した背面電極との間にELMをそなえ、当該前面電極
と背面電極との対向領域で発光セルを画定しでなるEL
表示パネルにおいて、1!?J記絶R基板をアルミナ基
体上にガラス層を積層した多層絶縁基板で構成するとと
もに前記発光セルに対応する領域のアルミナ基体が部分
的に除去されてなるところにある。
The present invention has been made in view of the above-mentioned points, and its purpose is to provide an EL display panel that uses an inexpensive insulating substrate and can be driven at low voltage. An EL comprising an ELM provided between a front electrode having a predetermined shape and a back electrode placed oppositely on the front electrode, and a light emitting cell being defined in an area where the front electrode and the back electrode face each other.
On the display panel, 1! ? The J memory R substrate is constituted by a multilayer insulating substrate in which a glass layer is laminated on an alumina base, and the alumina base in the area corresponding to the light emitting cell is partially removed.

以下本発明の実施例につき図面を参照して説明する。Embodiments of the present invention will be described below with reference to the drawings.

第2図は本発明によるEL表示パネルの構造を説明する
だめの要部上面図であシ、第8図は第2図におけるA−
A’断面図であって、第1図と同等部分には同一符号を
付しである。
FIG. 2 is a top view of essential parts for explaining the structure of the EL display panel according to the present invention, and FIG.
It is an A' sectional view, and the same parts as in FIG. 1 are given the same reference numerals.

両図において、ITOからなる透明な前面電極2は多層
絶縁基板7上に配設してあシ、その前面電極2表面を含
む多層絶縁基板7表面にはPbTi0d−(D第1(Z
)誘電体NJB、ZnS : MnからなるELM4お
よびY2O3の第2の誘電体層5が順次積層され、さら
に誘電体層51にAdからなる背面電極6が配設されて
いる。そして背面電極6と前面電極2との各対向領域つ
まシ交点部で発光セルを画定している点は従来のものと
変らないが、本発明のEL表示パネルが従来のものと異
なる点は次の点である。すなわち絶縁基板として高価な
ガラス板を用いる代シに多層絶縁基板7を用いたところ
にある。この多層絶縁基板7はアルミナ基体7b上にガ
ラス層7aを積層したもので、クレーズ被覆アルミナ基
板と呼ばれてハイブリッド集積回路用基板として広く用
いられているものである。
In both figures, a transparent front electrode 2 made of ITO is disposed on a multilayer insulating substrate 7, and the surface of the multilayer insulating substrate 7 including the front electrode 2 surface is coated with PbTi0d-(D first (Z
) Dielectric NJB, ZnS: An ELM 4 made of Mn and a second dielectric layer 5 made of Y2O3 are sequentially laminated, and a back electrode 6 made of Ad is further provided on the dielectric layer 51. The EL display panel of the present invention is different from the conventional EL display panel in that the light emitting cells are defined at the intersections of the opposing regions of the back electrode 6 and the front electrode 2, as follows. This is the point. That is, the multilayer insulating substrate 7 is used instead of using an expensive glass plate as the insulating substrate. This multilayer insulating substrate 7 has a glass layer 7a laminated on an alumina base 7b, and is called a craze-coated alumina substrate and is widely used as a substrate for hybrid integrated circuits.

とのようなグレーズ被覆アルミナ基板は耐熱性に優れか
つ熱膨張係数も40〜90(XIO”−7℃−1)のも
のが市販されておシ、このような特性を有するガラス板
に比べて安価に入手することができる。
Glaze-coated alumina substrates such as those with excellent heat resistance and thermal expansion coefficients of 40 to 90 (XIO"-7℃-1) are commercially available, and compared to glass plates with such characteristics, It can be obtained cheaply.

そこで本発明においてはEL表示パネルを製作する上で
極めて好都合な特性を有する前記のようなグレーズ被覆
アルミナ基板を多層絶縁基板7として用いている。ただ
このような多層絶縁基板7のガラス層7aが透明である
のに対しアルミナ基発光セルからの光を基板側から取シ
出せない。そこでアルミナ基体7bの各発光セルに対応
する領域8部分が除去してあシ、その除去された領域8
を通して各発光セルからの光を取シ出して多層絶縁基板
7側から観察するようになっている。なお前記アルミナ
基体7bの各発光セル対応領域8部分を除去するには例
えば蝕刻液として苛性ソーダ溶液を用いて写真蝕刻法に
より容易かつ精度よく除去することができる。
Therefore, in the present invention, the above-mentioned glaze-coated alumina substrate, which has extremely advantageous characteristics in manufacturing an EL display panel, is used as the multilayer insulating substrate 7. However, although the glass layer 7a of such a multilayer insulating substrate 7 is transparent, light from the alumina-based light emitting cells cannot be extracted from the substrate side. Therefore, the area 8 portion of the alumina base 7b corresponding to each light emitting cell is removed, and the removed area 8 is removed.
The light from each light emitting cell is extracted through the multilayer insulating substrate 7 and observed from the side of the multilayer insulating substrate 7. The portions of the alumina substrate 7b corresponding to the light emitting cells 8 can be easily and accurately removed by photolithography using, for example, a caustic soda solution as the etching solution.

かくして絶縁基板として高価なガラス板の代シに安価な
多層絶縁基板7を用いて、従来の製造工程を変更するこ
となく容易に低電圧駆動化を図ったEL表示パネルを安
価に製作することができ、さらに付加的効果として表示
のコントラスト向上にも寄与する。
Thus, by using the inexpensive multilayer insulating substrate 7 as an insulating substrate instead of an expensive glass plate, it is possible to easily manufacture an EL display panel that can be driven at a low voltage at a low cost without changing the conventional manufacturing process. This also contributes to improving the display contrast as an additional effect.

なお前述の実施例では第1の誘電体層8をPbT108
で形成した場合について述べたがそれに限らすYgO,
等のその他の誘電体層で形成してもよ(、t7’cEL
層4を誘電体層8および5でサンド7’(KL表示パネ
ルに限らず、EL層を前面電極と背面電極とで直接はさ
んだDC駆動形式のE L表示パネルに適用しても同様
の効果を得ることができる。さらにまた前述の実施例の
ようにアルミナ基体を各発光セルごとに1対1で対応し
て除去する方法に限らず、複数の発光セルに対して共通
に対応した領域のアルミナ基体を除去することもできる
In the above embodiment, the first dielectric layer 8 is made of PbT108.
We have described the case where YgO is formed, but this is limited to YgO,
It may also be formed with other dielectric layers such as (, t7'cEL
Layer 4 is sandwiched between dielectric layers 8 and 5 and 7' (not limited to KL display panels, the same effect can be obtained even when applied to DC drive type EL display panels in which the EL layer is directly sandwiched between the front electrode and the back electrode). Furthermore, the method is not limited to the method of removing the alumina substrate in a one-to-one correspondence with each light-emitting cell as in the above-mentioned embodiment, but it is also possible to remove the alumina substrate in a region that corresponds commonly to a plurality of light-emitting cells. It is also possible to remove the alumina substrate.

以上の説明から明らかなよりに要するに本発明は、絶縁
基板上に配設した所定形状の前面電極と該前面電極玉に
対向配置した背面電極との間にEL層をそなえ、当該前
面電極と背面電極との対向領域で発光セルを画定し又な
るEL表示パネルにおいて、前記絶縁基板をアルミナ基
体上にガラス層を積層した多層絶縁基板で構成し、アル
ミナ基体の発光セル対応領域を除去することによって、
その除去部分を通して発光セルからの光を基板側から取
9出すようにしたもので、従来の高価なガラス基板の代
如に安価な多層絶縁基板を用いることによシ、低電圧駆
動可能なEL表示パネルが安価に実現できる利点を有す
る。
As is clear from the above description, the present invention provides an EL layer between a front electrode of a predetermined shape disposed on an insulating substrate and a back electrode placed opposite to the front electrode ball, and provides an EL layer between the front electrode and the back surface. In an EL display panel in which a light emitting cell is defined in a region facing an electrode, the insulating substrate is composed of a multilayer insulating substrate in which a glass layer is laminated on an alumina base, and by removing the region of the alumina base corresponding to the light emitting cell. ,
The light emitted from the light emitting cell is taken out from the substrate side through the removed portion, and by using an inexpensive multilayer insulating substrate instead of the conventional expensive glass substrate, it is an EL device that can be driven at low voltage. This has the advantage that the display panel can be realized at low cost.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来のEL表示パネルの構造を説明するための
要部断面図、第2図は本発明にょるKL表示パネルの構
造を説明するための要部上面図、第8図は第2図におけ
るA−A’断面図である。 1:絶縁基板、2:前面電極、3.5:誘電体層・6:
背面電極、7:多層絶縁基板、7aミニガラス、7’b
;アルミナ基体、8:アルミナ基体が除去された領域。 第1図 第21 第3図
FIG. 1 is a cross-sectional view of the main part for explaining the structure of a conventional EL display panel, FIG. 2 is a top view of the main part for explaining the structure of the KL display panel according to the present invention, and FIG. It is an AA' sectional view in a figure. 1: Insulating substrate, 2: Front electrode, 3.5: Dielectric layer, 6:
Back electrode, 7: multilayer insulating substrate, 7a mini glass, 7'b
; Alumina base; 8: Area where the alumina base was removed. Figure 1 Figure 21 Figure 3

Claims (1)

【特許請求の範囲】[Claims] 絶縁基板上に配設した所定形状の前面電極と、該前面電
極上に対向配置した背面電極との間にEL層をそなえ、
当該前面電極と背面電極との対向領域で発光セルを両足
してなるEL表示パネルにおいて、前記絶縁基板をアル
ミナ基体上にガラス層を積層した多層絶縁基板で構成す
るとともに前記発光上μに対応する領域のアルミナ基体
が部分的に除去されてなることを特徴とするEL表示パ
ネル。
An EL layer is provided between a front electrode of a predetermined shape disposed on an insulating substrate and a back electrode disposed opposite to the front electrode,
In the EL display panel formed by both light-emitting cells in the area facing the front electrode and the back electrode, the insulating substrate is constituted by a multilayer insulating substrate in which a glass layer is laminated on an alumina substrate, and the above-mentioned luminescence upper μ corresponds to An EL display panel characterized in that an alumina substrate in a region is partially removed.
JP56111748A 1981-07-16 1981-07-16 El display panel Pending JPS5814183A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56111748A JPS5814183A (en) 1981-07-16 1981-07-16 El display panel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56111748A JPS5814183A (en) 1981-07-16 1981-07-16 El display panel

Publications (1)

Publication Number Publication Date
JPS5814183A true JPS5814183A (en) 1983-01-26

Family

ID=14569181

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56111748A Pending JPS5814183A (en) 1981-07-16 1981-07-16 El display panel

Country Status (1)

Country Link
JP (1) JPS5814183A (en)

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