JPS58140604A - 温度補償回路付き集積化センサ - Google Patents

温度補償回路付き集積化センサ

Info

Publication number
JPS58140604A
JPS58140604A JP57022633A JP2263382A JPS58140604A JP S58140604 A JPS58140604 A JP S58140604A JP 57022633 A JP57022633 A JP 57022633A JP 2263382 A JP2263382 A JP 2263382A JP S58140604 A JPS58140604 A JP S58140604A
Authority
JP
Japan
Prior art keywords
point
semiconductor strain
circuit
temperature compensation
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57022633A
Other languages
English (en)
Japanese (ja)
Other versions
JPH038482B2 (en, 2012
Inventor
Hideo Sato
秀夫 佐藤
Motohisa Nishihara
西原　元久
Kazuji Yamada
一二 山田
Kiyomitsu Suzuki
清光 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=12088230&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JPS58140604(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57022633A priority Critical patent/JPS58140604A/ja
Priority to DE8383101281T priority patent/DE3373344D1/de
Priority to EP83101281A priority patent/EP0086462B2/en
Priority to US06/466,027 priority patent/US4480478A/en
Publication of JPS58140604A publication Critical patent/JPS58140604A/ja
Publication of JPH038482B2 publication Critical patent/JPH038482B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
  • Pressure Sensors (AREA)
JP57022633A 1982-02-17 1982-02-17 温度補償回路付き集積化センサ Granted JPS58140604A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP57022633A JPS58140604A (ja) 1982-02-17 1982-02-17 温度補償回路付き集積化センサ
DE8383101281T DE3373344D1 (en) 1982-02-17 1983-02-10 Pressure sensor employing semiconductor strain gauge
EP83101281A EP0086462B2 (en) 1982-02-17 1983-02-10 Pressure sensor employing semiconductor strain gauge
US06/466,027 US4480478A (en) 1982-02-17 1983-02-14 Pressure sensor employing semiconductor strain gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57022633A JPS58140604A (ja) 1982-02-17 1982-02-17 温度補償回路付き集積化センサ

Publications (2)

Publication Number Publication Date
JPS58140604A true JPS58140604A (ja) 1983-08-20
JPH038482B2 JPH038482B2 (en, 2012) 1991-02-06

Family

ID=12088230

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57022633A Granted JPS58140604A (ja) 1982-02-17 1982-02-17 温度補償回路付き集積化センサ

Country Status (4)

Country Link
US (1) US4480478A (en, 2012)
EP (1) EP0086462B2 (en, 2012)
JP (1) JPS58140604A (en, 2012)
DE (1) DE3373344D1 (en, 2012)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61215936A (ja) * 1985-03-22 1986-09-25 Yokogawa Electric Corp 半導体圧力変換器
JPS6220305U (en, 2012) * 1985-07-20 1987-02-06
JPH02257017A (ja) * 1988-09-06 1990-10-17 Delco Electron Corp 温度補償回路

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8314846D0 (en) * 1983-05-27 1983-07-06 Bell & Howell Co Temperature controlled electronic devices
JPS6184535A (ja) * 1984-10-03 1986-04-30 Seiko Instr & Electronics Ltd 水晶式気体圧力計
US4672853A (en) * 1984-10-30 1987-06-16 Burr-Brown Corporation Apparatus and method for a pressure-sensitive device
IT206726Z2 (it) * 1985-09-17 1987-10-01 Marelli Autronica Dispositivo misuratore di pressione
JPH0797010B2 (ja) * 1986-03-26 1995-10-18 株式会社日立製作所 半導体歪ゲ−ジブリツジ回路
US4798093A (en) * 1986-06-06 1989-01-17 Motorola, Inc. Apparatus for sensor compensation
JPH0691265B2 (ja) * 1986-08-01 1994-11-14 株式会社日立製作所 半導体圧力センサ
US4766763A (en) * 1987-05-05 1988-08-30 Kulite Semiconductor Products, Inc. Gas leak detection apparatus and methods
US4800759A (en) * 1987-08-31 1989-01-31 Yokogawa Electric Corporation Semiconductor pressure converter
DE3908795A1 (de) * 1989-03-17 1990-09-20 Bosch Gmbh Robert Verfahren und vorrichtung zur messung einer mechanischen verformung
US5099695A (en) * 1990-04-23 1992-03-31 Smc Corporation Pressure detection apparatus
JPH05256716A (ja) * 1992-03-13 1993-10-05 Mitsubishi Electric Corp 半導体装置
FR2703155B1 (fr) * 1993-03-25 1995-06-09 Aerospatiale Système intégré pour mesures de pression multivoie et procédé de mesures correspondant.
US5568815A (en) * 1994-11-21 1996-10-29 Becton Dickinson And Company Self-powered interface circuit for use with a transducer sensor
ES2132628T3 (es) * 1994-12-02 1999-08-16 Getinge Ab Un metodo de compensacion de temperatura en sensores de presion.
US5708190A (en) * 1996-04-02 1998-01-13 Ssi Technologies, Inc. Gas concentration sensor
KR100206652B1 (ko) * 1997-06-07 1999-07-01 이종훈 존재응력 측정기기
US6700473B2 (en) * 2000-02-14 2004-03-02 Kulite Semiconductor Products, Inc. Pressure transducer employing on-chip resistor compensation
US6725165B1 (en) 2000-08-10 2004-04-20 Autoliv Asp, Inc. Weight measurement system, method and weight sensor
GB2370122B (en) * 2000-12-16 2005-04-27 Senstronics Ltd Temperature compensated strain gauge
US6679100B2 (en) * 2001-03-05 2004-01-20 Delphi Technologies, Inc. Spark plug mounted thick film strain gauge
KR100782126B1 (ko) * 2006-01-10 2007-12-05 한국에너지기술연구원 오일에 함유된 유리지방산을 제거하기 위한 텅스텐옥사이드 지르코니아 촉매 및 이의 용도
CN101275876B (zh) * 2007-03-27 2011-05-11 豪威国际控股有限公司 压力传感器信号调理集成电路的桥臂平衡补偿电阻的设计方法
JP2010107500A (ja) * 2008-09-30 2010-05-13 Ngk Spark Plug Co Ltd 圧力検出装置
US7918137B2 (en) * 2009-02-06 2011-04-05 Kulite Semiconductor Products, Inc. Method for temperature compensation of a piezoresistive gaged metal diaphragm
FR3007520A1 (fr) 2013-06-25 2014-12-26 St Microelectronics Crolles 2 Procede de determination d'un champ de contraintes tridimensionnelles d'un objet, en particulier une structure integree, et systeme correspondant
US10101145B2 (en) * 2016-01-19 2018-10-16 Rosemount Aerospace Inc. Passive temperature error compensation for strain gauge pressure sensors

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5070067A (en, 2012) * 1973-10-05 1975-06-11

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB791882A (en) * 1955-01-20 1958-03-12 Rheostatic Co Ltd Improved temperature control device
US3207984A (en) * 1960-11-18 1965-09-21 Gen Dynamics Corp Thermistor and diode bridge circuit for thermal compensation of a resistive load
US3808469A (en) * 1972-10-27 1974-04-30 Bell & Howell Co Temperature compensation circuit for sensor of physical variables such as temperature and pressure
US4233848A (en) * 1978-01-06 1980-11-18 Hitachi, Ltd. Strain gauge pressure transducer apparatus having an improved impedance bridge
JPS55113904A (en) * 1979-02-26 1980-09-02 Hitachi Ltd Method of zero point temperature compensation for strain-electric signal transducer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5070067A (en, 2012) * 1973-10-05 1975-06-11

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61215936A (ja) * 1985-03-22 1986-09-25 Yokogawa Electric Corp 半導体圧力変換器
JPS6220305U (en, 2012) * 1985-07-20 1987-02-06
JPH02257017A (ja) * 1988-09-06 1990-10-17 Delco Electron Corp 温度補償回路

Also Published As

Publication number Publication date
US4480478A (en) 1984-11-06
EP0086462A3 (en) 1984-08-01
EP0086462B2 (en) 1994-01-19
DE3373344D1 (en) 1987-10-08
JPH038482B2 (en, 2012) 1991-02-06
EP0086462A2 (en) 1983-08-24
EP0086462B1 (en) 1987-09-02

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