ES2132628T3 - Un metodo de compensacion de temperatura en sensores de presion. - Google Patents

Un metodo de compensacion de temperatura en sensores de presion.

Info

Publication number
ES2132628T3
ES2132628T3 ES95906571T ES95906571T ES2132628T3 ES 2132628 T3 ES2132628 T3 ES 2132628T3 ES 95906571 T ES95906571 T ES 95906571T ES 95906571 T ES95906571 T ES 95906571T ES 2132628 T3 ES2132628 T3 ES 2132628T3
Authority
ES
Spain
Prior art keywords
pressure
bridge
measuring points
temperature
sub
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES95906571T
Other languages
English (en)
Inventor
Olle Mattsson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Getinge AB
Original Assignee
Getinge AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Getinge AB filed Critical Getinge AB
Application granted granted Critical
Publication of ES2132628T3 publication Critical patent/ES2132628T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

LA INVENCION SE REFIERE A UN METODO PARA COMPENSAR LA TEMPERATURA DE DETECTORES DE PRESION DEL TIPO EN EL QUE LA PRESION ES DETECTADA MEDIANTE UN DIAFRAGMA CONECTADO A UN CIRCUITO DE PUENTE ELECTRICO. ESTE ULTIMO CONSISTE EN CUATRO RESISTENCIAS (2, 3, 4, 5) CONECTADAS EN SERIE A UN PUENTE CUADRILATERO (1), LO QUE SE DENOMINA UN PUENTE DE WHEATSTONE. EL VALOR DE ESTAS RESISTENCIAS CAMBIA EN RESPUESTA A ALTERACIONES EN LA CONFIGURACION DEL DIAFRAGMA TALES COMO LAS PROVOCADAS POR LOS CAMBIOS EN LA PRESION DETECTADA. EN DOS PUNTOS DIAGONALMENTE OPUESTOS (8, 9) SE SUMINISTRA AL PUENTE UNA CORRIENTE CONSTANTE (I{SUB,K}). PRIMERO SE TRAZAN LOS PUNTOS DE MEDICION DE LAS SEÑALES DE SALIDA DESPLAZADAS QUE SALEN DEL PUENTE (1) DEL DETECTOR DE PRESION A UNA SERIE DE NIVELES DE TEMPERATURA EN UN GRAFICO EN QUE SE REPRESENTA LA TENSION COMO UNA FUNCION DE LA RESISTENCIA RESULTANTE (R{SUB,B}) DEL PUENTE (1) Y DESPUES SE UNEN LOS PUNTOS DE MEDICION ADYACENTES CON LINEAS RECTAS Y SE REALIZA UN CALCULO MEDIANTE LA INTERPOLACION ENTRE LOS PUNTOS DE MEDICION. LA SENSIBILIDAD DEL DETECTOR DE PRESION, TAL COMO UNA UNIDAD DE TENSION/PRESION, SE DETERMINA DE FORMA CORRESPONDIENTE A DIFERENTES NIVELES DE TEMPERATURA TRAZANDO UNOS SEGUNDOS PUNTOS DE MEDICION EN UN SEGUNDO GRAFICO REPRESENTATIVO DE LA SENSIBILIDAD COMO UNA FUNCION DE LA RESISTENCIA RESULTANTE (R{SUB,B}). DE FORMA PARECIDA SE UNEN LOS ULTIMOS PUNTOS DE MEDICION MENCIONADOS CON LINEAS RECTAS Y SE REALIZA UN CALCULO MEDIANTE LA INTERPOLACION ENTRE LOS PUNTOS DE MEDICION. LAS CURVAS RESULTANTES SE PROCESAN EN UN ORDENADOR, TRAS LO CUAL UNA SEÑAL DE LA LECTURA DE LA PRESION PROPORCIONA UN VALOR DE PRESION CON LA TEMPERATURA DIRECTAMENTE COMPENSADA QUE SE PUEDE LEER EN UN TERCER GRAFICO REPRESENTATIVO DE UNA SEÑAL DE SALIDA PROPORCIONAL A LA PRESION DOMINANTE.
ES95906571T 1994-12-02 1994-12-02 Un metodo de compensacion de temperatura en sensores de presion. Expired - Lifetime ES2132628T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SE1994/001160 WO1996017236A1 (en) 1994-12-02 1994-12-02 A temperature compensation method in pressure sensors

Publications (1)

Publication Number Publication Date
ES2132628T3 true ES2132628T3 (es) 1999-08-16

Family

ID=20393554

Family Applications (1)

Application Number Title Priority Date Filing Date
ES95906571T Expired - Lifetime ES2132628T3 (es) 1994-12-02 1994-12-02 Un metodo de compensacion de temperatura en sensores de presion.

Country Status (9)

Country Link
US (1) US5877423A (es)
EP (1) EP0803054B1 (es)
JP (1) JPH11511849A (es)
AU (1) AU691239B2 (es)
DE (1) DE69419183T2 (es)
ES (1) ES2132628T3 (es)
FI (1) FI972895A (es)
WO (1) WO1996017236A1 (es)
ZA (1) ZA9510231B (es)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114061823A (zh) * 2021-11-16 2022-02-18 杭州电子科技大学温州研究院有限公司 一种温度自补偿的高灵敏度压力传感器阵列及其制备方法

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FR2741951B1 (fr) * 1995-12-04 1998-02-20 Europ Propulsion Pont de wheatstone avec compensation de gradient de temperature entre resistances principales du pont et application a un capteur de pression a jauges extensometriques
FR2776384B1 (fr) * 1998-03-20 2000-06-23 Snecma Capteur de pression avec compensation de la non-linearite de la derive de zero aux tres basses temperatures
US6700473B2 (en) * 2000-02-14 2004-03-02 Kulite Semiconductor Products, Inc. Pressure transducer employing on-chip resistor compensation
US6581468B2 (en) 2001-03-22 2003-06-24 Kavlico Corporation Independent-excitation cross-coupled differential-pressure transducer
DE10120982B4 (de) * 2001-04-28 2017-05-04 Hottinger Baldwin Messtechnik Gmbh Vorrichtung und Verfahren zum Kalibrieren von Dehnungsmessschaltungen
DE10156951A1 (de) * 2001-11-20 2003-05-28 Wabco Gmbh & Co Ohg Elektrische Schaltungsanordnung
US6725514B2 (en) * 2002-05-31 2004-04-27 Delphi Technologies, Inc. Method of making thick film pressure and temperature sensors on a stainless steel diaphragm
US6901794B2 (en) * 2003-10-16 2005-06-07 Festo Corporation Multiple technology flow sensor
US7164355B2 (en) * 2004-05-19 2007-01-16 Rosemount Inc. Process transmitter with a plurality of operating modes
US7331237B2 (en) * 2006-02-01 2008-02-19 Brooks Automation, Inc. Technique for improving Pirani gauge temperature compensation over its full pressure range
US8701460B2 (en) * 2011-03-31 2014-04-22 Freescale Semiconductor, Inc. Method and system to compensate for temperature and pressure in piezo resistive devices
JP6090742B2 (ja) * 2013-02-28 2017-03-08 日立オートモティブシステムズ株式会社 圧力検出装置
DE102013110368A1 (de) * 2013-09-19 2015-03-19 Endress + Hauser Gmbh + Co. Kg Druckmessumformer
JP2016003977A (ja) * 2014-06-18 2016-01-12 セイコーエプソン株式会社 物理量センサー装置、高度計、電子機器および移動体
JP7420022B2 (ja) * 2020-09-03 2024-01-23 Tdk株式会社 圧力センサ
CN112414594B (zh) * 2020-11-09 2022-04-01 中国电子科技集团公司第四十九研究所 硅压阻式压力传感器温度误差修正方法
CN116067537B (zh) * 2023-02-01 2024-05-03 大诚精密医疗技术(深圳)有限公司 压阻式传感器感测电路、医用导管及医疗监测系统
CN117553946B (zh) * 2024-01-12 2024-06-04 锐马（福建）电气制造有限公司 一种测力传感器温度补偿方法
CN117889999B (zh) * 2024-03-14 2024-06-21 锐马（福建）电气制造有限公司 一种六维力传感器零点补偿方法及系统
CN117949137B (zh) * 2024-03-26 2024-06-21 锐马（福建）电气制造有限公司 一种六维力传感器温度补偿方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4192005A (en) * 1977-11-21 1980-03-04 Kulite Semiconductor Products, Inc. Compensated pressure transducer employing digital processing techniques
JPS58140604A (ja) * 1982-02-17 1983-08-20 Hitachi Ltd 温度補償回路付き集積化センサ
JPS60135717A (ja) * 1983-12-24 1985-07-19 Shimadzu Corp 圧力検出回路
DE3427743A1 (de) * 1984-07-27 1986-02-06 Keller AG für Druckmeßtechnik, Winterthur Verfahren zur temperaturkompensation und messschaltung hierfuer
US4765188A (en) * 1986-11-24 1988-08-23 Bourns Instruments, Inc. Pressure transducer with integral digital temperature compensation
JP3071202B2 (ja) * 1989-07-19 2000-07-31 富士電機株式会社 半導体圧力センサの増巾補償回路
US5146788A (en) * 1990-10-25 1992-09-15 Becton, Dickinson And Company Apparatus and method for a temperature compensation of a catheter tip pressure transducer
US5116331A (en) * 1991-04-23 1992-05-26 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Pressure transducer and system for cryogenic environments

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114061823A (zh) * 2021-11-16 2022-02-18 杭州电子科技大学温州研究院有限公司 一种温度自补偿的高灵敏度压力传感器阵列及其制备方法
CN114061823B (zh) * 2021-11-16 2024-04-02 杭州电子科技大学温州研究院有限公司 一种温度自补偿的高灵敏度压力传感器阵列及其制备方法

Also Published As

Publication number Publication date
JPH11511849A (ja) 1999-10-12
DE69419183T2 (de) 1999-12-09
FI972895A (fi) 1997-08-28
FI972895A0 (fi) 1997-07-08
US5877423A (en) 1999-03-02
ZA9510231B (en) 1996-07-16
DE69419183D1 (de) 1999-07-22
WO1996017236A1 (en) 1996-06-06
AU1468995A (en) 1996-06-19
EP0803054A1 (en) 1997-10-29
EP0803054B1 (en) 1999-06-16
AU691239B2 (en) 1998-05-14

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