JPS58135111A - 窒化物薄膜の形成方法 - Google Patents
窒化物薄膜の形成方法Info
- Publication number
- JPS58135111A JPS58135111A JP1489682A JP1489682A JPS58135111A JP S58135111 A JPS58135111 A JP S58135111A JP 1489682 A JP1489682 A JP 1489682A JP 1489682 A JP1489682 A JP 1489682A JP S58135111 A JPS58135111 A JP S58135111A
- Authority
- JP
- Japan
- Prior art keywords
- nitride
- thin film
- nitride thin
- substrate
- boron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 150000004767 nitrides Chemical class 0.000 title claims abstract description 25
- 239000010409 thin film Substances 0.000 title claims abstract description 20
- 230000015572 biosynthetic process Effects 0.000 title 1
- 239000000126 substance Substances 0.000 claims abstract description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 claims abstract description 7
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910001873 dinitrogen Inorganic materials 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims description 9
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 8
- 229910052796 boron Inorganic materials 0.000 claims description 8
- 238000005121 nitriding Methods 0.000 claims description 3
- 230000005291 magnetic effect Effects 0.000 abstract description 8
- 239000010408 film Substances 0.000 abstract description 3
- 239000004743 Polypropylene Substances 0.000 abstract description 2
- 230000000694 effects Effects 0.000 abstract description 2
- 239000002184 metal Substances 0.000 abstract description 2
- 229910052751 metal Inorganic materials 0.000 abstract description 2
- 229920000728 polyester Polymers 0.000 abstract description 2
- -1 polypropylene Polymers 0.000 abstract description 2
- 229920001155 polypropylene Polymers 0.000 abstract description 2
- 229920003002 synthetic resin Polymers 0.000 abstract description 2
- 239000000057 synthetic resin Substances 0.000 abstract description 2
- 238000001465 metallisation Methods 0.000 abstract 2
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 229910052804 chromium Inorganic materials 0.000 abstract 1
- 229910052735 hafnium Inorganic materials 0.000 abstract 1
- 229910052749 magnesium Inorganic materials 0.000 abstract 1
- 229910052750 molybdenum Inorganic materials 0.000 abstract 1
- 229910052759 nickel Inorganic materials 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen(.) Chemical compound [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 abstract 1
- 229910052719 titanium Inorganic materials 0.000 abstract 1
- 229910052720 vanadium Inorganic materials 0.000 abstract 1
- 229910052726 zirconium Inorganic materials 0.000 abstract 1
- 229910052582 BN Inorganic materials 0.000 description 4
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 238000005422 blasting Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Lubricants (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1489682A JPS58135111A (ja) | 1982-02-03 | 1982-02-03 | 窒化物薄膜の形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1489682A JPS58135111A (ja) | 1982-02-03 | 1982-02-03 | 窒化物薄膜の形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58135111A true JPS58135111A (ja) | 1983-08-11 |
| JPS629666B2 JPS629666B2 (enrdf_load_stackoverflow) | 1987-03-02 |
Family
ID=11873749
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1489682A Granted JPS58135111A (ja) | 1982-02-03 | 1982-02-03 | 窒化物薄膜の形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58135111A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58132589U (ja) * | 1982-02-28 | 1983-09-07 | ヤマハ発動機株式会社 | 液体分離装置 |
| JPS6365079A (ja) * | 1986-09-04 | 1988-03-23 | Mitsubishi Metal Corp | 耐欠損性のすぐれた切削工具用表面被覆硬質合金 |
| JPH03259417A (ja) * | 1990-11-30 | 1991-11-19 | Tdk Corp | 磁気記録媒体 |
| JP2007031167A (ja) * | 2005-07-22 | 2007-02-08 | National Institute For Materials Science | 窒化ホウ素ナノホーンの製造方法 |
-
1982
- 1982-02-03 JP JP1489682A patent/JPS58135111A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58132589U (ja) * | 1982-02-28 | 1983-09-07 | ヤマハ発動機株式会社 | 液体分離装置 |
| JPS6365079A (ja) * | 1986-09-04 | 1988-03-23 | Mitsubishi Metal Corp | 耐欠損性のすぐれた切削工具用表面被覆硬質合金 |
| JPH03259417A (ja) * | 1990-11-30 | 1991-11-19 | Tdk Corp | 磁気記録媒体 |
| JP2007031167A (ja) * | 2005-07-22 | 2007-02-08 | National Institute For Materials Science | 窒化ホウ素ナノホーンの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS629666B2 (enrdf_load_stackoverflow) | 1987-03-02 |
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