JPS58130275A - 真空蒸着用焼結体 - Google Patents

真空蒸着用焼結体

Info

Publication number
JPS58130275A
JPS58130275A JP57011245A JP1124582A JPS58130275A JP S58130275 A JPS58130275 A JP S58130275A JP 57011245 A JP57011245 A JP 57011245A JP 1124582 A JP1124582 A JP 1124582A JP S58130275 A JPS58130275 A JP S58130275A
Authority
JP
Japan
Prior art keywords
sintered body
vacuum deposition
film
electron beam
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57011245A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6151281B2 (enrdf_load_stackoverflow
Inventor
Hidetaka Takayama
高山　秀隆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to JP57011245A priority Critical patent/JPS58130275A/ja
Publication of JPS58130275A publication Critical patent/JPS58130275A/ja
Publication of JPS6151281B2 publication Critical patent/JPS6151281B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Physical Vapour Deposition (AREA)
JP57011245A 1982-01-27 1982-01-27 真空蒸着用焼結体 Granted JPS58130275A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57011245A JPS58130275A (ja) 1982-01-27 1982-01-27 真空蒸着用焼結体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57011245A JPS58130275A (ja) 1982-01-27 1982-01-27 真空蒸着用焼結体

Publications (2)

Publication Number Publication Date
JPS58130275A true JPS58130275A (ja) 1983-08-03
JPS6151281B2 JPS6151281B2 (enrdf_load_stackoverflow) 1986-11-08

Family

ID=11772550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57011245A Granted JPS58130275A (ja) 1982-01-27 1982-01-27 真空蒸着用焼結体

Country Status (1)

Country Link
JP (1) JPS58130275A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63192857A (ja) * 1987-02-05 1988-08-10 Sumitomo Electric Ind Ltd 超電導薄膜の作製法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63192857A (ja) * 1987-02-05 1988-08-10 Sumitomo Electric Ind Ltd 超電導薄膜の作製法

Also Published As

Publication number Publication date
JPS6151281B2 (enrdf_load_stackoverflow) 1986-11-08

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