JPS5812980B2 - コタイノ キヨクブテキカガクブンセキオオコナウホウホウトソウチ - Google Patents
コタイノ キヨクブテキカガクブンセキオオコナウホウホウトソウチInfo
- Publication number
- JPS5812980B2 JPS5812980B2 JP50080468A JP8046875A JPS5812980B2 JP S5812980 B2 JPS5812980 B2 JP S5812980B2 JP 50080468 A JP50080468 A JP 50080468A JP 8046875 A JP8046875 A JP 8046875A JP S5812980 B2 JPS5812980 B2 JP S5812980B2
- Authority
- JP
- Japan
- Prior art keywords
- particles
- space
- target
- sample
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002245 particle Substances 0.000 claims description 48
- 239000000523 sample Substances 0.000 claims description 35
- 238000004458 analytical method Methods 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 13
- 239000000126 substance Substances 0.000 claims description 9
- 238000003795 desorption Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000001179 sorption measurement Methods 0.000 claims description 5
- 238000004949 mass spectrometry Methods 0.000 claims description 4
- 238000009614 chemical analysis method Methods 0.000 claims 1
- 150000002500 ions Chemical group 0.000 description 39
- 239000000463 material Substances 0.000 description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 8
- 239000010949 copper Substances 0.000 description 8
- 238000010494 dissociation reaction Methods 0.000 description 6
- 230000005593 dissociations Effects 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229910052702 rhenium Inorganic materials 0.000 description 6
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 6
- 150000001793 charged compounds Chemical class 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 4
- 238000005192 partition Methods 0.000 description 4
- 239000012071 phase Substances 0.000 description 4
- 239000011163 secondary particle Substances 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- -1 tantalum carbide Chemical class 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 230000000875 corresponding effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 238000006386 neutralization reaction Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 229910003468 tantalcarbide Inorganic materials 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000003610 charcoal Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000000752 ionisation method Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 238000004452 microanalysis Methods 0.000 description 1
- 239000011859 microparticle Substances 0.000 description 1
- 230000009149 molecular binding Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7422722A FR2279093A1 (fr) | 1974-06-28 | 1974-06-28 | Procede et dispositif d'analyse chimique locale des solides |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5124292A JPS5124292A (en) | 1976-02-27 |
| JPS5812980B2 true JPS5812980B2 (ja) | 1983-03-11 |
Family
ID=9140694
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50080468A Expired JPS5812980B2 (ja) | 1974-06-28 | 1975-06-28 | コタイノ キヨクブテキカガクブンセキオオコナウホウホウトソウチ |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4001582A (show.php) |
| JP (1) | JPS5812980B2 (show.php) |
| CH (1) | CH591079A5 (show.php) |
| DE (1) | DE2528596A1 (show.php) |
| FR (1) | FR2279093A1 (show.php) |
| GB (1) | GB1463795A (show.php) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2739829C2 (de) * | 1977-09-03 | 1986-04-10 | Gesellschaft für Strahlen- und Umweltforschung mbH, 8000 München | Anordnung zur Analyse einer Probenschicht durch Beschuß mit elektromagnetischer Strahlung |
| JP2640935B2 (ja) * | 1983-12-23 | 1997-08-13 | エス・ア−ル・アイ・インタ−ナシヨナル | 表面の検査方法および装置 |
| GB8408043D0 (en) * | 1984-03-28 | 1984-05-10 | Ion Tech Ltd | Mass spectrometer analysis |
| US6995847B2 (en) | 2002-05-24 | 2006-02-07 | Honeywell International Inc. | Methods and systems for substrate surface evaluation |
| US20060026807A1 (en) * | 2003-08-07 | 2006-02-09 | Carnevali Jeffrey D | Quick release mounting apparatus |
| US20100306941A1 (en) * | 2009-06-03 | 2010-12-09 | Hayco Manufacturing Limited | Toothbrush |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1402020A (fr) * | 1964-04-27 | 1965-06-11 | Csf | Perfectionnements aux sources d'ions |
| GB1210218A (en) * | 1967-02-08 | 1970-10-28 | Ass Elect Ind | Improvements relating to ion probe target analysis |
| US3660655A (en) * | 1969-09-08 | 1972-05-02 | Ass Elect Ind | Ion probe with means for mass analyzing neutral particles sputtered from a specimen |
| US3864575A (en) * | 1970-07-25 | 1975-02-04 | Nujeeb Hashmi | Contact ionization ion source |
| US3770954A (en) * | 1971-12-29 | 1973-11-06 | Gen Electric | Method and apparatus for analysis of impurities in air and other gases |
-
1974
- 1974-06-28 FR FR7422722A patent/FR2279093A1/fr active Granted
-
1975
- 1975-06-19 CH CH797275A patent/CH591079A5/xx not_active IP Right Cessation
- 1975-06-20 US US05/588,706 patent/US4001582A/en not_active Expired - Lifetime
- 1975-06-25 GB GB2698375A patent/GB1463795A/en not_active Expired
- 1975-06-26 DE DE19752528596 patent/DE2528596A1/de not_active Ceased
- 1975-06-28 JP JP50080468A patent/JPS5812980B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2279093B1 (show.php) | 1979-08-03 |
| FR2279093A1 (fr) | 1976-02-13 |
| JPS5124292A (en) | 1976-02-27 |
| DE2528596A1 (de) | 1976-01-15 |
| GB1463795A (en) | 1977-02-09 |
| US4001582A (en) | 1977-01-04 |
| CH591079A5 (show.php) | 1977-08-31 |
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