JPS5812828Y2 - インライン式蒸着装置 - Google Patents

インライン式蒸着装置

Info

Publication number
JPS5812828Y2
JPS5812828Y2 JP1978097922U JP9792278U JPS5812828Y2 JP S5812828 Y2 JPS5812828 Y2 JP S5812828Y2 JP 1978097922 U JP1978097922 U JP 1978097922U JP 9792278 U JP9792278 U JP 9792278U JP S5812828 Y2 JPS5812828 Y2 JP S5812828Y2
Authority
JP
Japan
Prior art keywords
sample
vapor deposition
cart
deposition chamber
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1978097922U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5515260U (enrdf_load_stackoverflow
Inventor
佐野久義
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1978097922U priority Critical patent/JPS5812828Y2/ja
Publication of JPS5515260U publication Critical patent/JPS5515260U/ja
Application granted granted Critical
Publication of JPS5812828Y2 publication Critical patent/JPS5812828Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chain Conveyers (AREA)
  • Physical Vapour Deposition (AREA)
JP1978097922U 1978-07-15 1978-07-15 インライン式蒸着装置 Expired JPS5812828Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978097922U JPS5812828Y2 (ja) 1978-07-15 1978-07-15 インライン式蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978097922U JPS5812828Y2 (ja) 1978-07-15 1978-07-15 インライン式蒸着装置

Publications (2)

Publication Number Publication Date
JPS5515260U JPS5515260U (enrdf_load_stackoverflow) 1980-01-31
JPS5812828Y2 true JPS5812828Y2 (ja) 1983-03-11

Family

ID=29033211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978097922U Expired JPS5812828Y2 (ja) 1978-07-15 1978-07-15 インライン式蒸着装置

Country Status (1)

Country Link
JP (1) JPS5812828Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5520741Y2 (enrdf_load_stackoverflow) * 1974-08-15 1980-05-19
JPS5443084Y2 (enrdf_load_stackoverflow) * 1975-05-12 1979-12-13

Also Published As

Publication number Publication date
JPS5515260U (enrdf_load_stackoverflow) 1980-01-31

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