JPS58126613A - 薄膜電極の加工方法 - Google Patents
薄膜電極の加工方法Info
- Publication number
- JPS58126613A JPS58126613A JP923182A JP923182A JPS58126613A JP S58126613 A JPS58126613 A JP S58126613A JP 923182 A JP923182 A JP 923182A JP 923182 A JP923182 A JP 923182A JP S58126613 A JPS58126613 A JP S58126613A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film electrode
- electrode
- processing
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 38
- 238000000034 method Methods 0.000 title claims description 15
- 238000003754 machining Methods 0.000 title 1
- 229910000510 noble metal Inorganic materials 0.000 claims description 3
- 239000002131 composite material Substances 0.000 claims 3
- 239000010408 film Substances 0.000 claims 3
- 238000001704 evaporation Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 239000011521 glass Substances 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- 238000003486 chemical etching Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Manufacturing Of Electric Cables (AREA)
- Electrodes Of Semiconductors (AREA)
- Non-Insulated Conductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP923182A JPS58126613A (ja) | 1982-01-22 | 1982-01-22 | 薄膜電極の加工方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP923182A JPS58126613A (ja) | 1982-01-22 | 1982-01-22 | 薄膜電極の加工方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58126613A true JPS58126613A (ja) | 1983-07-28 |
JPH0237047B2 JPH0237047B2 (enrdf_load_stackoverflow) | 1990-08-22 |
Family
ID=11714627
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP923182A Granted JPS58126613A (ja) | 1982-01-22 | 1982-01-22 | 薄膜電極の加工方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58126613A (enrdf_load_stackoverflow) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05303916A (ja) * | 1992-04-27 | 1993-11-16 | Futaba Corp | 透明導電膜配線基板の製造方法 |
WO2005076292A1 (ja) * | 2004-02-09 | 2005-08-18 | Asahi Glass Company, Limited | 透明電極の製造方法 |
JP2015181424A (ja) * | 2014-03-25 | 2015-10-22 | 大日本印刷株式会社 | 細胞培養用電極及びその製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50126194A (enrdf_load_stackoverflow) * | 1974-03-22 | 1975-10-03 | ||
JPS5130970A (en) * | 1974-09-10 | 1976-03-16 | Seiko Instr & Electronics | Pataandenkyoku no keiseihoho |
-
1982
- 1982-01-22 JP JP923182A patent/JPS58126613A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50126194A (enrdf_load_stackoverflow) * | 1974-03-22 | 1975-10-03 | ||
JPS5130970A (en) * | 1974-09-10 | 1976-03-16 | Seiko Instr & Electronics | Pataandenkyoku no keiseihoho |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05303916A (ja) * | 1992-04-27 | 1993-11-16 | Futaba Corp | 透明導電膜配線基板の製造方法 |
WO2005076292A1 (ja) * | 2004-02-09 | 2005-08-18 | Asahi Glass Company, Limited | 透明電極の製造方法 |
JPWO2005076292A1 (ja) * | 2004-02-09 | 2007-10-18 | 旭硝子株式会社 | 透明電極の製造方法 |
KR100968389B1 (ko) * | 2004-02-09 | 2010-07-07 | 아사히 가라스 가부시키가이샤 | 투명전극의 제조 방법 |
JP4655939B2 (ja) * | 2004-02-09 | 2011-03-23 | 旭硝子株式会社 | 透明電極の製造方法 |
JP2015181424A (ja) * | 2014-03-25 | 2015-10-22 | 大日本印刷株式会社 | 細胞培養用電極及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0237047B2 (enrdf_load_stackoverflow) | 1990-08-22 |
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