JPS5812134A - 磁気記録媒体の製造方法 - Google Patents

磁気記録媒体の製造方法

Info

Publication number
JPS5812134A
JPS5812134A JP56108586A JP10858681A JPS5812134A JP S5812134 A JPS5812134 A JP S5812134A JP 56108586 A JP56108586 A JP 56108586A JP 10858681 A JP10858681 A JP 10858681A JP S5812134 A JPS5812134 A JP S5812134A
Authority
JP
Japan
Prior art keywords
incident angle
electrode
vapor
substrate
recording medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56108586A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0226292B2 (enExample
Inventor
Koichi Shinohara
紘一 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56108586A priority Critical patent/JPS5812134A/ja
Publication of JPS5812134A publication Critical patent/JPS5812134A/ja
Publication of JPH0226292B2 publication Critical patent/JPH0226292B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/85—Coating a support with a magnetic layer by vapour deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
JP56108586A 1981-07-10 1981-07-10 磁気記録媒体の製造方法 Granted JPS5812134A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56108586A JPS5812134A (ja) 1981-07-10 1981-07-10 磁気記録媒体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56108586A JPS5812134A (ja) 1981-07-10 1981-07-10 磁気記録媒体の製造方法

Publications (2)

Publication Number Publication Date
JPS5812134A true JPS5812134A (ja) 1983-01-24
JPH0226292B2 JPH0226292B2 (enExample) 1990-06-08

Family

ID=14488557

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56108586A Granted JPS5812134A (ja) 1981-07-10 1981-07-10 磁気記録媒体の製造方法

Country Status (1)

Country Link
JP (1) JPS5812134A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6052929A (ja) * 1983-08-10 1985-03-26 Hitachi Condenser Co Ltd 磁気記録媒体の製造装置
JPS6059534A (ja) * 1983-09-09 1985-04-05 Taiyo Yuden Co Ltd 磁気記録媒体の製造方法
JPH0294025A (ja) * 1988-09-29 1990-04-04 Tonen Corp 磁気記録媒体の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6052929A (ja) * 1983-08-10 1985-03-26 Hitachi Condenser Co Ltd 磁気記録媒体の製造装置
JPS6059534A (ja) * 1983-09-09 1985-04-05 Taiyo Yuden Co Ltd 磁気記録媒体の製造方法
JPH0294025A (ja) * 1988-09-29 1990-04-04 Tonen Corp 磁気記録媒体の製造方法

Also Published As

Publication number Publication date
JPH0226292B2 (enExample) 1990-06-08

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