JPS5811842A - 高速ｘ線マツピング装置 - Google Patents

高速ｘ線マツピング装置

Info

Publication number
JPS5811842A
JPS5811842A JP56110400A JP11040081A JPS5811842A JP S5811842 A JPS5811842 A JP S5811842A JP 56110400 A JP56110400 A JP 56110400A JP 11040081 A JP11040081 A JP 11040081A JP S5811842 A JPS5811842 A JP S5811842A
Authority
JP
Japan
Prior art keywords
sample
output
cpu
detector
comparator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56110400A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0332736B2 (en:Method
Inventor
Sanenori Oka
岡　実乗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Nippon Steel Corp
Original Assignee
Seiko Instruments Inc
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc, Nippon Steel Corp filed Critical Seiko Instruments Inc
Priority to JP56110400A priority Critical patent/JPS5811842A/ja
Publication of JPS5811842A publication Critical patent/JPS5811842A/ja
Publication of JPH0332736B2 publication Critical patent/JPH0332736B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP56110400A 1981-07-14 1981-07-14 高速ｘ線マツピング装置 Granted JPS5811842A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56110400A JPS5811842A (ja) 1981-07-14 1981-07-14 高速ｘ線マツピング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56110400A JPS5811842A (ja) 1981-07-14 1981-07-14 高速ｘ線マツピング装置

Publications (2)

Publication Number Publication Date
JPS5811842A true JPS5811842A (ja) 1983-01-22
JPH0332736B2 JPH0332736B2 (en:Method) 1991-05-14

Family

ID=14534838

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56110400A Granted JPS5811842A (ja) 1981-07-14 1981-07-14 高速ｘ線マツピング装置

Country Status (1)

Country Link
JP (1) JPS5811842A (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013019900A (ja) * 2011-07-11 2013-01-31 Fei Co 多モードデータのクラスタ化

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5192182A (en:Method) * 1975-02-10 1976-08-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5192182A (en:Method) * 1975-02-10 1976-08-12

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013019900A (ja) * 2011-07-11 2013-01-31 Fei Co 多モードデータのクラスタ化

Also Published As

Publication number Publication date
JPH0332736B2 (en:Method) 1991-05-14

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