JPS5811842A - High-speed x-ray mapping device - Google Patents

Abstract

PURPOSE:To shorten a scanning time by applying skipping over scanning for a crack or hole part, and allowing different indication for the crack or hold part from other parts. CONSTITUTION:A reflected electron from a sample 4 is inputted to a reflected electron detector 5, whose output is inputted to and compared by a comparator 7 with a threshold level when the output of the detector 5 is lower, it is decided that an electron beam illuminate a crack in the surface of the sample and the outside of the sample 4, thereby inputting this condition to a CPU. Then, the CPU omits the intensity measurement of a radiation and outputs data which corresponds to a next measurement point to a D/A converter 13. Further, a signal having a level lower than the threshold level which is outputted from the CPU is displayed in a different color from the display color of a signal having a level higher than the threshold level.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a high-speed X-shaped mapping system, and more particularly to a novel improvement for displaying parts such as holes or holes in a sample that are different from other parts.

Conventionally, it is not used! ``This type of device was tested, 11
Detection of the contour i and division of 1 is not done in rows 1t)n, but the same detection and scanning fk are performed on the entire surface of the sample.However, in such conventional 11I configuration, there is a trap of performing all scanning * Therefore, the measurement time became longer and the state of the scrapes and holes was not displayed on the display screen.

The invention of 〇 provides an extremely effective means (+1-) for easily eliminating the above-mentioned drawbacks. In addition to interlacing scanning of the hole or hole part and calculating the previous time,
The part with a hole or hole is related to the Buddha's nuc, which makes it different from the other parts.

Hereinafter, preferred embodiments of the Takayuki X-ray manpping device according to the present invention will be explained in detail with reference to the drawings. In the drawings, the reference numeral 1 indicates an electron gun for emitting all electron beams. The beam 1 is emitted from the beam 1, and after being controlled by the lens 2 and scanning coil 3, it is irradiated onto the sample 4.

The backscattered electrons from the electron beam were detected by the backscattered electron detector 5i/c-jp. The radiation of sample 4, which is connected to the input of One terminal of a variable resistor 11 for adding a threshold value is connected to the other input terminal of the general wire 8n. The output of input 'C!, t-shi, C king 1U12 is D/A converter 1
Beam travel via 3; manually powered by 1 and 5. In addition, the output from O)'U12 (0) is connected to OF+'[' as the graph ink display capital 14.

In the above 7) Yotsu 4 configuration, when the high-speed X-ray mapping device according to the present invention is fully activated, when the electron beam is irradiated onto the sample 4, the backscattered electrons from the sample 4 are sent to the backscattered electron detector 5. The signal from the backscattered electron detector 5 is amplified by an amplifier 6 and sent to a comparator 7 as an n1 voltage output.
Input awn to one input terminal of n. The voltage output of the TA resistor 11 is input to the other input stream 1 of the resistor 7, which is used to obtain the Threnskjöld value as shown in FIG. If the output from 6 is lower than the threshold value, then the parts B and D in the characteristic diagram of FIG. In (1) part), if the city and child are friends, then t'ti is 6n1, and this state is CPTT12.
Enter.

This CP TJ' + 2 is manually inputted from the comparator 7 by a signal such as the above 1hi, and the counter 10Lj'+2 is input to the counter 10Lj'! Without starting the machine and omitting the measurement of radiation intensity,
D/A converter 13 (outputs data corresponding to the 7ζth measurement point) The output of this D/A converter 15 is input to the beam launching coil 3, where the electron beam is deflected, and the data corresponding to the next measurement point is output. The electron beam is irradiated on the surface of the sample, which is extremely easy to detect, especially the edges, cracks and holes, and even the outside of the sample (all the edges of the sample are extremely easy to detect, and even if the Xn is below the threshold value of the sample). In the case of a level 7x, the scanning and counting system is stopped and the 7x area is immediately irradiated, so that during detection and analysis of the entire sample, the output is extremely short-red.

Signals with a level below the threshold value output from the output (0PU127+) are displayed in a color or state that is clearly different from the display color of the individual signal with a level above the threshold value.
@:gt, holes, and the outside of the sample can be easily analyzed))

[Brief explanation of drawings]

The drawings are also σ) to show the high speed X-nemapping loading according to the invention. , .mu.m diagram shows the overall structure. FIG. 2 is a characteristic diagram showing the reflected electron intensity of FJm when the sample is irradiated with an electron beam. 1 is an electron a, 2 is a μ-son V, 6 is a beam scanning coil, 4 is a sample, 5 is a backscattered electron detector, 6 is an amplifier,
7 is a comparator, 8 is a radiation detector, 9 is a Nagarasu discriminator, 10
is a counter, 11 is a variable resistor, 12 is a CPU, 15 is a D/A converter, and 14 is a graphic display area. Applicant: Dainiken Co., Ltd. Trade association agent Patent attorney Mogami Mutsu 6-

Claims (1)

[Claims] A backscattered electron detector for detecting the backscattered electrons reflected from the sample, a radiation detector for detecting all the radiation from the sample, a beam scanning coil for scanning the electron beam;
The 7ζth comparator inputs the output of this backscattered electron detector, the wave discriminator inputs the output from this radiation detector, and the output inputs of the comparator and wave height discriminator 70'. a graph/ink display for displaying the output of this CPH, a reference value setter for setting the reference value of the comparator, and a CPU for running the CPU.
:signal? Is the signal below the above-mentioned reference value a stamping means and a gold provision for applying to the beam scanning coil? A high-speed XffI! manping device that is 1% remarkable in that it has a different display from the display of signals above the standard 1■.