JPS5811742B2 - ウエハキヨウキユウソウチ - Google Patents

ウエハキヨウキユウソウチ

Info

Publication number
JPS5811742B2
JPS5811742B2 JP753370A JP337075A JPS5811742B2 JP S5811742 B2 JPS5811742 B2 JP S5811742B2 JP 753370 A JP753370 A JP 753370A JP 337075 A JP337075 A JP 337075A JP S5811742 B2 JPS5811742 B2 JP S5811742B2
Authority
JP
Japan
Prior art keywords
pallet
wafer
mounting table
supplied
predetermined
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP753370A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5178691A (enExample
Inventor
今千代秀
杉田和弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP753370A priority Critical patent/JPS5811742B2/ja
Priority to CA242,588A priority patent/CA1044379A/en
Priority to NL7515149A priority patent/NL7515149A/xx
Priority to US05/645,020 priority patent/US4103232A/en
Priority to DE19752558963 priority patent/DE2558963A1/de
Priority to GB53002/75A priority patent/GB1531429A/en
Publication of JPS5178691A publication Critical patent/JPS5178691A/ja
Publication of JPS5811742B2 publication Critical patent/JPS5811742B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • De-Stacking Of Articles (AREA)
JP753370A 1974-12-28 1974-12-28 ウエハキヨウキユウソウチ Expired JPS5811742B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP753370A JPS5811742B2 (ja) 1974-12-28 1974-12-28 ウエハキヨウキユウソウチ
CA242,588A CA1044379A (en) 1974-12-28 1975-12-24 Wafer transfer device
NL7515149A NL7515149A (nl) 1974-12-28 1975-12-29 Inrichting voor het hanteren van wafels van halfgeleidend materiaal.
US05/645,020 US4103232A (en) 1974-12-28 1975-12-29 Wafer transfer device
DE19752558963 DE2558963A1 (de) 1974-12-28 1975-12-29 Vorrichtung zur anbringung von halbleiterplaettchen
GB53002/75A GB1531429A (en) 1974-12-28 1975-12-29 Apparatus for handling semi-conductor wafers to facilitate making electrical tests on semiconductor devices and testing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP753370A JPS5811742B2 (ja) 1974-12-28 1974-12-28 ウエハキヨウキユウソウチ

Publications (2)

Publication Number Publication Date
JPS5178691A JPS5178691A (enExample) 1976-07-08
JPS5811742B2 true JPS5811742B2 (ja) 1983-03-04

Family

ID=11555450

Family Applications (1)

Application Number Title Priority Date Filing Date
JP753370A Expired JPS5811742B2 (ja) 1974-12-28 1974-12-28 ウエハキヨウキユウソウチ

Country Status (1)

Country Link
JP (1) JPS5811742B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5421174A (en) * 1977-07-18 1979-02-17 Tokyo Ouka Kougiyou Kk Plasma reaction processor
JPS5824946B2 (ja) * 1977-10-31 1983-05-24 株式会社東京精密 ウエハ−検査装置
JPS5851521A (ja) * 1981-09-24 1983-03-26 Hitachi Ltd 半導体ウェハのダイシング方法
JPS5877045U (ja) * 1981-11-16 1983-05-24 リコーエレメックス株式会社 半導体封止用織布含浸レジンの位置決構造

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
IBM TECHNICAL DISCLASURE BULLETIN=1973 *

Also Published As

Publication number Publication date
JPS5178691A (enExample) 1976-07-08

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