JPS5811639B2 - 音響波発生装置 - Google Patents
音響波発生装置Info
- Publication number
- JPS5811639B2 JPS5811639B2 JP52086178A JP8617877A JPS5811639B2 JP S5811639 B2 JPS5811639 B2 JP S5811639B2 JP 52086178 A JP52086178 A JP 52086178A JP 8617877 A JP8617877 A JP 8617877A JP S5811639 B2 JPS5811639 B2 JP S5811639B2
- Authority
- JP
- Japan
- Prior art keywords
- energy
- thin film
- acoustic
- solid body
- acoustic wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007787 solid Substances 0.000 claims description 38
- 239000000463 material Substances 0.000 claims description 18
- 239000011358 absorbing material Substances 0.000 claims description 5
- 230000004044 response Effects 0.000 claims description 2
- 239000010409 thin film Substances 0.000 description 40
- 239000000853 adhesive Substances 0.000 description 19
- 230000001070 adhesive effect Effects 0.000 description 19
- 230000003287 optical effect Effects 0.000 description 15
- 239000012528 membrane Substances 0.000 description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 10
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 9
- 238000010521 absorption reaction Methods 0.000 description 8
- 230000007547 defect Effects 0.000 description 8
- 229910052750 molybdenum Inorganic materials 0.000 description 8
- 239000011733 molybdenum Substances 0.000 description 8
- 239000010453 quartz Substances 0.000 description 8
- 229910052782 aluminium Inorganic materials 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 239000007788 liquid Substances 0.000 description 7
- 230000002745 absorbent Effects 0.000 description 5
- 239000002250 absorbent Substances 0.000 description 5
- 238000001514 detection method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 5
- 229910052721 tungsten Inorganic materials 0.000 description 5
- 239000010937 tungsten Substances 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 241000446313 Lamella Species 0.000 description 4
- 210000000695 crystalline len Anatomy 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 229920002799 BoPET Polymers 0.000 description 3
- 239000005041 Mylar™ Substances 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 229910052593 corundum Inorganic materials 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 239000004519 grease Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 229920000728 polyester Polymers 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 229910001845 yogo sapphire Inorganic materials 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 2
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- VYXSBFYARXAAKO-WTKGSRSZSA-N chembl402140 Chemical compound Cl.C1=2C=C(C)C(NCC)=CC=2OC2=C\C(=N/CC)C(C)=CC2=C1C1=CC=CC=C1C(=O)OCC VYXSBFYARXAAKO-WTKGSRSZSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- VYXSBFYARXAAKO-UHFFFAOYSA-N ethyl 2-[3-(ethylamino)-6-ethylimino-2,7-dimethylxanthen-9-yl]benzoate;hydron;chloride Chemical compound [Cl-].C1=2C=C(C)C(NCC)=CC=2OC2=CC(=[NH+]CC)C(C)=CC2=C1C1=CC=CC=C1C(=O)OCC VYXSBFYARXAAKO-UHFFFAOYSA-N 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000013178 mathematical model Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920003217 poly(methylsilsesquioxane) Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- PYWVYCXTNDRMGF-UHFFFAOYSA-N rhodamine B Chemical compound [Cl-].C=12C=CC(=[N+](CC)CC)C=C2OC2=CC(N(CC)CC)=CC=C2C=1C1=CC=CC=C1C(O)=O PYWVYCXTNDRMGF-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 239000001993 wax Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K15/00—Acoustics not otherwise provided for
- G10K15/04—Sound-producing devices
- G10K15/046—Sound-producing devices using optical excitation, e.g. laser bundle
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02827—Elastic parameters, strength or force
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Multimedia (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
- Thermotherapy And Cooling Therapy Devices (AREA)
- Lasers (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/744,354 US4137991A (en) | 1976-11-23 | 1976-11-23 | Clamped acoustic elastic wave generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5365718A JPS5365718A (en) | 1978-06-12 |
| JPS5811639B2 true JPS5811639B2 (ja) | 1983-03-03 |
Family
ID=24992393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP52086178A Expired JPS5811639B2 (ja) | 1976-11-23 | 1977-07-20 | 音響波発生装置 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US4137991A (en:Method) |
| JP (1) | JPS5811639B2 (en:Method) |
| CA (1) | CA1097791A (en:Method) |
| DE (1) | DE2732855C2 (en:Method) |
| FR (1) | FR2371243A1 (en:Method) |
| GB (1) | GB1583057A (en:Method) |
| IT (1) | IT1118045B (en:Method) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008249557A (ja) * | 2007-03-30 | 2008-10-16 | Mitsubishi Heavy Ind Ltd | 超音波検査装置 |
| WO2009022658A1 (ja) * | 2007-08-10 | 2009-02-19 | Mitsubishi Heavy Industries, Ltd. | 超音波検査装置、超音波検査方法および原子力プラントの非破壊検査方法 |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2952885C2 (de) * | 1978-06-20 | 1986-01-30 | Sumitomo Metal Industries, Ltd., Osaka | Vorrichtung zur berührungslosen Ultraschallfehlerprüfung |
| US4255971A (en) * | 1978-11-01 | 1981-03-17 | Allan Rosencwaig | Thermoacoustic microscopy |
| US4267732A (en) * | 1978-11-29 | 1981-05-19 | Stanford University Board Of Trustees | Acoustic microscope and method |
| US4269067A (en) * | 1979-05-18 | 1981-05-26 | International Business Machines Corporation | Method and apparatus for focusing elastic waves converted from thermal energy |
| US4276780A (en) * | 1979-11-29 | 1981-07-07 | Bell Telephone Laboratories, Incorporated | Optoacoustic spectroscopy of thin layers |
| US4484820A (en) * | 1982-05-25 | 1984-11-27 | Therma-Wave, Inc. | Method for evaluating the quality of the bond between two members utilizing thermoacoustic microscopy |
| US6317388B1 (en) * | 1982-06-28 | 2001-11-13 | Lockheed Martin Corporation | Thermoacoustic bi-static sonar system |
| US4512197A (en) * | 1983-09-01 | 1985-04-23 | The United States Of America As Represented By The Secretary Of The Navy | Apparatus for generating a focusable and scannable ultrasonic beam for non-destructive examination |
| US4567769A (en) * | 1984-03-08 | 1986-02-04 | Rockwell International Corporation | Contact-free ultrasonic transduction for flaw and acoustic discontinuity detection |
| JPS60252257A (ja) * | 1984-05-29 | 1985-12-12 | Agency Of Ind Science & Technol | 表面欠陥検出方法 |
| US4666308A (en) * | 1984-10-30 | 1987-05-19 | Stanford University | Method and apparatus for non-destructive testing using acoustic-optic laser probe |
| US4682897A (en) * | 1984-12-10 | 1987-07-28 | Canon Kabushiki Kaisha | Light scattering measuring apparatus |
| GB8601873D0 (en) * | 1986-01-27 | 1986-03-05 | Atomic Energy Authority Uk | Ultrasonic weld monitoring |
| US4674332A (en) * | 1986-02-20 | 1987-06-23 | Union Camp Corporation | Laser induced acoustic generation for sonic modulus |
| JPS638551A (ja) * | 1986-06-28 | 1988-01-14 | Japan Spectroscopic Co | 顕微光音響赤外分光分析法及び装置 |
| EP0257489A1 (en) * | 1986-08-15 | 1988-03-02 | Canon Kabushiki Kaisha | Method for generating a sound wave by utilizing electron rays etc., and optical device for controlling a light by an elastic wave generated by said method |
| GB8727875D0 (en) * | 1987-11-27 | 1987-12-31 | Cogent Ltd | Ultrasonic probe |
| US5381695A (en) * | 1987-11-27 | 1995-01-17 | British Technology Group Ltd. | Apparatus for investigating a sample with ultrasound |
| DE69131528T2 (de) * | 1990-05-30 | 2000-05-04 | Hitachi, Ltd. | Verfahren und Vorrichtung zur Behandlung eines sehr kleinen Bereichs einer Probe |
| GB2270159A (en) * | 1992-03-13 | 1994-03-02 | Scient Generics Ltd | Optically controlled ultrasound array |
| US5226730A (en) * | 1992-05-27 | 1993-07-13 | The Babcock & Wilcox Company | Internal temperature monitor for work pieces |
| DE19743336C2 (de) | 1997-09-30 | 2002-01-31 | Siemens Ag | Vorrichtung zur Erzeugung von Ultraschallfeldern |
| JP3430258B2 (ja) * | 2000-10-17 | 2003-07-28 | 独立行政法人産業技術総合研究所 | 熱拡散率と界面熱抵抗の測定方法 |
| WO2002101377A1 (en) * | 2001-06-07 | 2002-12-19 | Tokyo Electron Limited | Apparatus and method for determining clamping status of semiconductor wafer |
| US7260023B2 (en) * | 2004-11-02 | 2007-08-21 | United Statesof America As Represented By The Secretary Of The Navy | Remote underwater laser acoustic source |
| US20060272418A1 (en) * | 2005-06-03 | 2006-12-07 | Brown University | Opto-acoustic methods and apparatus for perfoming high resolution acoustic imaging and other sample probing and modification operations |
| US7624640B2 (en) * | 2005-06-03 | 2009-12-01 | Brown University | Opto-acoustic methods and apparatus for performing high resolution acoustic imaging and other sample probing and modification operations |
| WO2008097527A1 (en) * | 2007-02-05 | 2008-08-14 | Brown University | Enhanced ultra-high resolution acoustic microscope |
| JP5078755B2 (ja) * | 2008-05-29 | 2012-11-21 | 三菱重工業株式会社 | 超音波検査装置および原子力プラントの非破壊検査方法 |
| JP4688977B2 (ja) * | 2009-06-08 | 2011-05-25 | パナソニック株式会社 | 音波発生器とその製造方法ならびに音波発生器を用いた音波発生方法 |
| WO2011047016A1 (en) * | 2009-10-13 | 2011-04-21 | Picometrix, Llc | System and method for detection and measurement of interfacial properties in single and multilayer objects |
| KR101989155B1 (ko) * | 2012-08-01 | 2019-06-17 | 삼성전자주식회사 | 초음파 변환기, 이를 포함하는 초음파 발생 장치 및 시스템 |
| US20230236155A1 (en) * | 2020-06-18 | 2023-07-27 | Agency For Science, Technology And Research | A light-acoustic system and a method for detecting an anomaly in a structure |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2483768A (en) * | 1944-06-15 | 1949-10-04 | Rca Corp | Microwave-acoustic wave translator |
| FR1377335A (fr) * | 1963-07-30 | 1964-11-06 | Centre Nat Rech Scient | Adaptation de têtes laser sur des ensembles mécaniques, en particulier sur des microscopes |
| US3322231A (en) * | 1964-12-29 | 1967-05-30 | Mobil Oil Corp | Methods and systems utilizing lasers for generating seismic energy |
| US3392368A (en) * | 1967-03-15 | 1968-07-09 | Ibm | Ultrasonic and hypersonic sound generator |
| US3532181A (en) * | 1967-06-01 | 1970-10-06 | United Aircraft Corp | Laser induced acoustic generator |
| US3583212A (en) * | 1968-11-22 | 1971-06-08 | Bell Telephone Labor Inc | Apparatus for generating and utilizing frequency-swept phonons |
-
1976
- 1976-11-23 US US05/744,354 patent/US4137991A/en not_active Expired - Lifetime
-
1977
- 1977-07-20 JP JP52086178A patent/JPS5811639B2/ja not_active Expired
- 1977-07-20 GB GB30414/77A patent/GB1583057A/en not_active Expired
- 1977-07-21 FR FR7723004A patent/FR2371243A1/fr active Granted
- 1977-07-21 CA CA283,250A patent/CA1097791A/en not_active Expired
- 1977-07-21 DE DE2732855A patent/DE2732855C2/de not_active Expired
- 1977-07-26 IT IT26103/77A patent/IT1118045B/it active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008249557A (ja) * | 2007-03-30 | 2008-10-16 | Mitsubishi Heavy Ind Ltd | 超音波検査装置 |
| US8276452B2 (en) | 2007-03-30 | 2012-10-02 | Mitsubishi Heavy Industries, Ltd. | Ultrasonic inspection apparatus |
| WO2009022658A1 (ja) * | 2007-08-10 | 2009-02-19 | Mitsubishi Heavy Industries, Ltd. | 超音波検査装置、超音波検査方法および原子力プラントの非破壊検査方法 |
| JP2009063558A (ja) * | 2007-08-10 | 2009-03-26 | Mitsubishi Heavy Ind Ltd | 超音波検査装置、超音波検査方法および原子力プラントの非破壊検査方法 |
| US8468890B2 (en) | 2007-08-10 | 2013-06-25 | Mitsubishi Heavy Industries, Ltd. | Ultrasonic detection device, ultrasonic detection method, and atomic power plant nondestructive inspection method |
Also Published As
| Publication number | Publication date |
|---|---|
| US4137991A (en) | 1979-02-06 |
| DE2732855A1 (de) | 1978-05-24 |
| FR2371243A1 (fr) | 1978-06-16 |
| GB1583057A (en) | 1981-01-21 |
| FR2371243B1 (en:Method) | 1982-04-09 |
| DE2732855C2 (de) | 1983-01-20 |
| CA1097791A (en) | 1981-03-17 |
| JPS5365718A (en) | 1978-06-12 |
| IT1118045B (it) | 1986-02-24 |
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