JPS5811011Y2 - Ｘ線検出装置 - Google Patents

Ｘ線検出装置

Info

Publication number
JPS5811011Y2
JPS5811011Y2 JP6627277U JP6627277U JPS5811011Y2 JP S5811011 Y2 JPS5811011 Y2 JP S5811011Y2 JP 6627277 U JP6627277 U JP 6627277U JP 6627277 U JP6627277 U JP 6627277U JP S5811011 Y2 JPS5811011 Y2 JP S5811011Y2
Authority
JP
Japan
Prior art keywords
ray
electron beam
ray detection
ray detector
detection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6627277U
Other languages
English (en)
Japanese (ja)
Other versions
JPS53161687U (enExample
Inventor
一保 河辺
昌樹 斎藤
昭次郎 田形
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP6627277U priority Critical patent/JPS5811011Y2/ja
Publication of JPS53161687U publication Critical patent/JPS53161687U/ja
Application granted granted Critical
Publication of JPS5811011Y2 publication Critical patent/JPS5811011Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP6627277U 1977-05-23 1977-05-23 Ｘ線検出装置 Expired JPS5811011Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6627277U JPS5811011Y2 (ja) 1977-05-23 1977-05-23 Ｘ線検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6627277U JPS5811011Y2 (ja) 1977-05-23 1977-05-23 Ｘ線検出装置

Publications (2)

Publication Number Publication Date
JPS53161687U JPS53161687U (enExample) 1978-12-18
JPS5811011Y2 true JPS5811011Y2 (ja) 1983-03-01

Family

ID=28972112

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6627277U Expired JPS5811011Y2 (ja) 1977-05-23 1977-05-23 Ｘ線検出装置

Country Status (1)

Country Link
JP (1) JPS5811011Y2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0220679Y2 (enExample) * 1980-05-30 1990-06-05
JPS59141045A (ja) * 1983-01-31 1984-08-13 Shimadzu Corp Ｘ線分析装置

Also Published As

Publication number Publication date
JPS53161687U (enExample) 1978-12-18

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