JPH0427665B2 - - Google Patents

Info

Publication number
JPH0427665B2
JPH0427665B2 JP63299294A JP29929488A JPH0427665B2 JP H0427665 B2 JPH0427665 B2 JP H0427665B2 JP 63299294 A JP63299294 A JP 63299294A JP 29929488 A JP29929488 A JP 29929488A JP H0427665 B2 JPH0427665 B2 JP H0427665B2
Authority
JP
Japan
Prior art keywords
sample
particles
slit
ion beam
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63299294A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02145947A (ja
Inventor
Shigeki Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP63299294A priority Critical patent/JPH02145947A/ja
Publication of JPH02145947A publication Critical patent/JPH02145947A/ja
Publication of JPH0427665B2 publication Critical patent/JPH0427665B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
JP63299294A 1988-11-26 1988-11-26 イオン散乱分光装置 Granted JPH02145947A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63299294A JPH02145947A (ja) 1988-11-26 1988-11-26 イオン散乱分光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63299294A JPH02145947A (ja) 1988-11-26 1988-11-26 イオン散乱分光装置

Publications (2)

Publication Number Publication Date
JPH02145947A JPH02145947A (ja) 1990-06-05
JPH0427665B2 true JPH0427665B2 (enExample) 1992-05-12

Family

ID=17870666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63299294A Granted JPH02145947A (ja) 1988-11-26 1988-11-26 イオン散乱分光装置

Country Status (1)

Country Link
JP (1) JPH02145947A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2926666B2 (ja) * 1991-05-13 1999-07-28 株式会社島津製作所 直衝突イオン散乱分光装置
US6674075B2 (en) * 2002-05-13 2004-01-06 Applied Materials, Inc. Charged particle beam apparatus and method for inspecting samples
CN1820194B (zh) 2003-07-30 2012-06-13 应用材料以色列公司 具有多检测器的扫描电子显微镜和基于多检测器成像方法
US7842933B2 (en) 2003-10-22 2010-11-30 Applied Materials Israel, Ltd. System and method for measuring overlay errors

Also Published As

Publication number Publication date
JPH02145947A (ja) 1990-06-05

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