JPS58110001A - 薄膜サ−ミスタ素子とその製造方法 - Google Patents

薄膜サ−ミスタ素子とその製造方法

Info

Publication number
JPS58110001A
JPS58110001A JP21379181A JP21379181A JPS58110001A JP S58110001 A JPS58110001 A JP S58110001A JP 21379181 A JP21379181 A JP 21379181A JP 21379181 A JP21379181 A JP 21379181A JP S58110001 A JPS58110001 A JP S58110001A
Authority
JP
Japan
Prior art keywords
thermistor
thin film
insulator
thermistor element
linear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21379181A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0341961B2 (enrdf_load_stackoverflow
Inventor
玉井　孝
大島　信正
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP21379181A priority Critical patent/JPS58110001A/ja
Publication of JPS58110001A publication Critical patent/JPS58110001A/ja
Publication of JPH0341961B2 publication Critical patent/JPH0341961B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Thermistors And Varistors (AREA)
JP21379181A 1981-12-23 1981-12-23 薄膜サ−ミスタ素子とその製造方法 Granted JPS58110001A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21379181A JPS58110001A (ja) 1981-12-23 1981-12-23 薄膜サ−ミスタ素子とその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21379181A JPS58110001A (ja) 1981-12-23 1981-12-23 薄膜サ−ミスタ素子とその製造方法

Publications (2)

Publication Number Publication Date
JPS58110001A true JPS58110001A (ja) 1983-06-30
JPH0341961B2 JPH0341961B2 (enrdf_load_stackoverflow) 1991-06-25

Family

ID=16645107

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21379181A Granted JPS58110001A (ja) 1981-12-23 1981-12-23 薄膜サ−ミスタ素子とその製造方法

Country Status (1)

Country Link
JP (1) JPS58110001A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0341961B2 (enrdf_load_stackoverflow) 1991-06-25

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