JPS58104179A - Al蒸発器の再充填のための方法と装置 - Google Patents
Al蒸発器の再充填のための方法と装置Info
- Publication number
- JPS58104179A JPS58104179A JP18225482A JP18225482A JPS58104179A JP S58104179 A JPS58104179 A JP S58104179A JP 18225482 A JP18225482 A JP 18225482A JP 18225482 A JP18225482 A JP 18225482A JP S58104179 A JPS58104179 A JP S58104179A
- Authority
- JP
- Japan
- Prior art keywords
- evaporator
- evaporation
- outlet
- electron beam
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 14
- 230000008020 evaporation Effects 0.000 claims description 23
- 238000001704 evaporation Methods 0.000 claims description 23
- 238000010894 electron beam technology Methods 0.000 claims description 14
- 230000008018 melting Effects 0.000 claims description 10
- 238000002844 melting Methods 0.000 claims description 10
- 239000007788 liquid Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 8
- 241000251511 Holothuroidea Species 0.000 claims description 5
- 239000003513 alkali Substances 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910000805 Pig iron Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 241000238631 Hexapoda Species 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 231100001261 hazardous Toxicity 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 239000008267 milk Substances 0.000 description 1
- 210000004080 milk Anatomy 0.000 description 1
- 235000013336 milk Nutrition 0.000 description 1
- GQPLMRYTRLFLPF-UHFFFAOYSA-N nitrous oxide Inorganic materials [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000007928 solubilization Effects 0.000 description 1
- 238000005063 solubilization Methods 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacture And Refinement Of Metals (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD23417481A DD200897A1 (de) | 1981-10-19 | 1981-10-19 | Verfahren und einrichtung zur nachbeschickung von al-verdampfern |
DD23C/234174 | 1981-10-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58104179A true JPS58104179A (ja) | 1983-06-21 |
JPS6327425B2 JPS6327425B2 (enrdf_load_stackoverflow) | 1988-06-02 |
Family
ID=5534181
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18225482A Granted JPS58104179A (ja) | 1981-10-19 | 1982-10-19 | Al蒸発器の再充填のための方法と装置 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS58104179A (enrdf_load_stackoverflow) |
DD (1) | DD200897A1 (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013186969A (ja) * | 2012-03-06 | 2013-09-19 | Ulvac Japan Ltd | 有機el素子の電極膜形成方法、有機el素子の電極膜形成装置 |
-
1981
- 1981-10-19 DD DD23417481A patent/DD200897A1/de not_active IP Right Cessation
-
1982
- 1982-10-19 JP JP18225482A patent/JPS58104179A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013186969A (ja) * | 2012-03-06 | 2013-09-19 | Ulvac Japan Ltd | 有機el素子の電極膜形成方法、有機el素子の電極膜形成装置 |
Also Published As
Publication number | Publication date |
---|---|
DD200897A1 (de) | 1983-06-22 |
JPS6327425B2 (enrdf_load_stackoverflow) | 1988-06-02 |
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