JPS6327425B2 - - Google Patents
Info
- Publication number
- JPS6327425B2 JPS6327425B2 JP18225482A JP18225482A JPS6327425B2 JP S6327425 B2 JPS6327425 B2 JP S6327425B2 JP 18225482 A JP18225482 A JP 18225482A JP 18225482 A JP18225482 A JP 18225482A JP S6327425 B2 JPS6327425 B2 JP S6327425B2
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- vacuum
- evaporator
- melting chamber
- conduits
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacture And Refinement Of Metals (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD23417481A DD200897A1 (de) | 1981-10-19 | 1981-10-19 | Verfahren und einrichtung zur nachbeschickung von al-verdampfern |
| DD23C/234174 | 1981-10-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58104179A JPS58104179A (ja) | 1983-06-21 |
| JPS6327425B2 true JPS6327425B2 (enrdf_load_stackoverflow) | 1988-06-02 |
Family
ID=5534181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18225482A Granted JPS58104179A (ja) | 1981-10-19 | 1982-10-19 | Ａｌ蒸発器の再充填のための方法と装置 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS58104179A (enrdf_load_stackoverflow) |
| DD (1) | DD200897A1 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5976344B2 (ja) * | 2012-03-06 | 2016-08-23 | 株式会社アルバック | 有機ｅｌ素子の電極膜形成方法、有機ｅｌ素子の電極膜形成装置 |
-
1981
- 1981-10-19 DD DD23417481A patent/DD200897A1/de not_active IP Right Cessation
-
1982
- 1982-10-19 JP JP18225482A patent/JPS58104179A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58104179A (ja) | 1983-06-21 |
| DD200897A1 (de) | 1983-06-22 |
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