JPS6327425B2 - - Google Patents

Info

Publication number
JPS6327425B2
JPS6327425B2 JP18225482A JP18225482A JPS6327425B2 JP S6327425 B2 JPS6327425 B2 JP S6327425B2 JP 18225482 A JP18225482 A JP 18225482A JP 18225482 A JP18225482 A JP 18225482A JP S6327425 B2 JPS6327425 B2 JP S6327425B2
Authority
JP
Japan
Prior art keywords
crucible
vacuum
evaporator
melting chamber
conduits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18225482A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58104179A (ja
Inventor
Ietsushu Gyunteru
Erupukamu Uorufuganku
Zenfu Yoahimu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KOMUBINAATO BEBU ROKOMOTEIFUBAUUEREKUTOROTEHINITSUSHE UERUKE HANSU BAIMURERU
Original Assignee
KOMUBINAATO BEBU ROKOMOTEIFUBAUUEREKUTOROTEHINITSUSHE UERUKE HANSU BAIMURERU
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KOMUBINAATO BEBU ROKOMOTEIFUBAUUEREKUTOROTEHINITSUSHE UERUKE HANSU BAIMURERU filed Critical KOMUBINAATO BEBU ROKOMOTEIFUBAUUEREKUTOROTEHINITSUSHE UERUKE HANSU BAIMURERU
Publication of JPS58104179A publication Critical patent/JPS58104179A/ja
Publication of JPS6327425B2 publication Critical patent/JPS6327425B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacture And Refinement Of Metals (AREA)
JP18225482A 1981-10-19 1982-10-19 Ａｌ蒸発器の再充填のための方法と装置 Granted JPS58104179A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DD23417481A DD200897A1 (de) 1981-10-19 1981-10-19 Verfahren und einrichtung zur nachbeschickung von al-verdampfern
DD23C/234174 1981-10-19

Publications (2)

Publication Number Publication Date
JPS58104179A JPS58104179A (ja) 1983-06-21
JPS6327425B2 true JPS6327425B2 (enrdf_load_stackoverflow) 1988-06-02

Family

ID=5534181

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18225482A Granted JPS58104179A (ja) 1981-10-19 1982-10-19 Ａｌ蒸発器の再充填のための方法と装置

Country Status (2)

Country Link
JP (1) JPS58104179A (enrdf_load_stackoverflow)
DD (1) DD200897A1 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5976344B2 (ja) * 2012-03-06 2016-08-23 株式会社アルバック 有機ｅｌ素子の電極膜形成方法、有機ｅｌ素子の電極膜形成装置

Also Published As

Publication number Publication date
JPS58104179A (ja) 1983-06-21
DD200897A1 (de) 1983-06-22

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